本研究利用一新型的有機無機混成濕度感測材料來製作阻抗式濕度感測器(Impedance-type humidity sensor)，此一感測材料利用溶膠-凝膠法(Sol-gel process)將有機材料2-丙醯2-甲基丙烷磺酸(2-acrylamido-2-methyl-propane sulfonic acid, AMPS)與二氧化矽(silica gel)作一混成反應而得，之後再利用旋轉塗佈法將此感濕材料塗佈於印有一對梳型電極的氧化鋁基板製得所要的感測元件。
混成材料所形成的結構可增強濕度感測器所需要的抗水性能(Water-resistivity)及縮短偵測所需的反應時間等特性。在本實驗探討的參數範圍內，於鍛燒溫度180℃、膜厚20μm以及3.5克的水合TEOS添加量時有最佳的感濕特性。在阻抗分析儀(LCR meter)測試後，於25℃交流阻抗1kHz的條件下，感濕特性由35%RH至95%RH可達四個數量級以上；反應時間從95%RH變化至20%RH僅需10秒左右。此外，在溫度依數特性僅有0.17 %RH/℃的影響(由15至35℃)，遲滯量(Hysteresis)也在1.5% RH以下。其後並利用熱重損失(TGA)、接觸角分析儀(Contact angle)以及掃描式電子顯微鏡(SEM)對混成結構與表面特性做更深入的觀察與探討。

In this study, the impedance-type humidity sensor was prepared by using organic-inorganic composite material and the performance as investigated. The 2-acryl amido-2-methyl-propane sulfonic acid(AMPS) was hybridized in the sol-gel process with silica gel(SiO2). This hybrid material was coated on the Al2O3 substrate with interdigited electrodes by using the spin coating method and was used as a sensing material. The hybrid sensing film could increase the water-resistance and decrease the response time (45s from 95% to 20% RH). On the basis of this study, the better humidity-characteristic device was manufactured by annealing temp of 180℃, thickness of 20μm, and 3.5g hydro-TEOS addition. The impedance varied more than four orders of the magnitude in the range of 35~95% RH under the 1kHz of AC at 25℃. The temperature dependence is only 0.17 %RH/℃ under 15~35℃ and the hysteresis was below 1.5%RH. Furthermore, the surface properties and hybrid structure of the humidity sensor were investigated by using the SEM、TGA and contact angle meter.

中文摘要Ⅰ
英文摘要Ⅱ
誌謝Ⅲ
總目錄Ⅵ表目錄Ⅶ圖目錄Ⅷ
第一章 前 言1
1-1 感測器介紹與重要性1
1-2 濕度定義與偵測重要性2
1-3 有機無機混成材料4
第二章 理論說明與文獻回顧9
2-1濕度與濕度表示法9
2-2 濕度感測器之要件11
2-3 各類型濕度感測器及文獻回顧15
2-3-1 陶瓷式濕度感測器16
2-3-2 電解質濕度感測器19
2-3-3 高分子式濕度感測器20
2-3-3.1電容式高分子濕度感測器20
2-3-3.2電阻式高分子濕度感測器22
2-4 有機無機混成28
2-4-1 溶膠凝膠反應程序28
2-4-2 有機無機混成理論30
第三章 實驗方法與分析43
3-1 實驗藥品44
3-2 實驗設備與儀器45
3-3 實驗流程與步驟46
3-4 性能量測與材料分析48
第四章 結果與討論57
4-1 鍛燒溫度對感濕特性之影響57
4-2 TEOS添加量對感濕特性之影響60
4-2-1 再現特性探討60
4-2-2 膜厚特性探討61
4-2-3 頻率係數探討62
4-2-4 遲滯效應探討63
4-2-5 溫度係數探討64
4-2-6 反應時間與再現穩定性探討64
4-2-7 耐水性能探討66
4-3 AMPS/SiO2混成特性討論67
4-3-1 接觸角分析67
4-3-2 FT-IR紅外線光譜儀分析68
4-3-3 熱重損失(TGA)討論69
4-3-4 電子掃描顯微鏡(SEM)結構分析70
第五章 結 論87
參考文獻89

Bornside D.E., Macosko C.W., and Scriven L.E.,J.Imaging Tech., 13, 1987, 122-129.Chauhan, P.; Annapoorni, S.; Trikha, S.K., “Humidity-sensing properties of nanocrystalline haematite thin films prepared by sol-gel processing”, Thin Solid Film 346 (1999) 266-268 Cicillini, S.A.; Calefi, P.S.; Neri, C. R.; Nassar, E. J., and Serra, O.A., J. Non-Crystalline Solids, 247 (1999) 114-122Durmaz, S.; Okay, O.,”Acrylamide/2-acrylamido-2-methylpropane sulfonic acid sodium salt-based hydrogels: synthesis and characterization”, Polymer 41 (2000) 3693-3704Ekaterina, R.,”Thin plasma-polymerized layers of hexamethyl disiloxane for acoustoelectronic humidity sensors”, Sensors and Actuators B 44(1997) 275-278 Feng, C.D.; Sun, S.L.; Wang, H., “Humidity sensing properties of Nafion and sol-gel derived SiO2/Nafion composite thin films”, Sensors and Actuators B 40(1997) 217-222Geankoplis, “Transport processes and unit operations” chap 6(1995) Prentice-Hall inc.Gong M.-S.; Lee, M.H., “Humidity sensor using cross-linked copolymers containing viologen moiety”, Sensors and Actuators B 73(2001)185-191Gusmano, G.; Bianco, A.; Montesperelli, G.; Travesa, E.,” An EIS study of the humidity -sensitive electrical conduction of alkali-doped TiO2 films”, Pergmon (1995) 342-367Harsanyi,G.,”Polymer films in sensor applications: technology, materials, devices and their characteristics”, TECHNOMIC inc.(1995)Jose M.; Perez, M.; Freyre C., “A poly (ethylene terephtha late)-based humidity sensor”, Sensors and Actuators B 42(1997) 27-30Krutovertsev, S.A.; Tarasova, A.E., ” Integrated multifunctional humidity sensor”, Sensors and Actuators A 62(1997)582-585Li, Y.; Yang M.J.; Camaioni, N.G.; Miceli, C.,” Humidity sensors based on polymer solid electrolytes : investigation on the capacitive and resistive devices construction”, Sensors and Actuators B 77 (2001) 625-631Matsuguchi, M.; Umeda, S.; Sadaoka, Y.; Sakai, Y.,” Characterization of polymers for a capacitive-type humidity sensor based on water sorption behavior”, Sensors and Actuators B 49 (1998) 179-185Matsuguchi, M.; Sadaoka,Y.; Sakai, Y., “A capacitive-type humidity sensor using cross-linked poly(methyl methacrylate) thin films”, J. Electrochem. Soc. 138(1991) 1862-1865Matsuguchi, M.; Kuroiwa, T.; Miyagishi, T.; Suzuki, S.; Ogura, T.; Sakai, Y., “Stability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films”, Sensors and Actuators B 52(1998)53-57Matejka, L.; Dusek, K., ” Formation and structure of the epoxy-silica hybrids”, Polymer 40(1998)171-181Matsuura,Y.; Matsukawa, K.,” Synthesis of polysilane-acrylamide copolymers by photopolymerization and their application to polysilane-silica hybrid thin films”, Polymer 43(2002)1549-1553Nahar, R.K.; Khanna, V.K., ” Ionic doping inversion of the characteris- tic of thin film porous Al2O3 humidity sensor”, Sensors and Actuators B 46(1998)35-41Neri, G.; Bonavita, A., “Humidity sensing properties of Li-iron oxide based thin films”, Sensors and Actuators B 73(2001)89-94Sakai, Y., ” Design of polymer electrolytes-based humidity sensors”, Sensor Tech 2, (1992), 117-132Sakai, Y.; Sadaoka, Y.; Matsuguchi, M., ”A humidity sensor using cross-linked quaternized polyvinylpyridine”, J. Electrochem. Soc., 136(1989) 171-174Sakai, Y.; Matsuguchi, M., “Humidity sensor using cross-linked polychloromethylstyrene)”, Sensors and Actuators B 66 (2000) 135-138 Sakai, Y.,” Humidity sensor using chemically modified polymeric materials”, Sensors and Actuators B 13-14(1993) 82-85Sakai, Y.; Matsuguchi, M., ”Humidity sensor based on alkali salts of poly (2-acrylamido-2-methylpropane sulfonic acid)”, Electro- chimica Acta 46(2001) 1509-1514Sberveglieri, G. Murri, R. Pinto, N.,”Characterization of porous Al2O3-SiO2/Si sensor for low and medium humidity ranges”, Sensors and Actuators B 23(1995) 177-180Schmidt, H., “Sol-gel science-the physics and chemistry of sol-gel hybrid proceeding” , J.Non-Cryst. Soilds, Vol73, (1985)Su, P.G.; Chen, I.C.; Wu, R.J., ”Use of poly (2 — acrylamido — 2 — methyllpropane sulfonate) modified with tetraethyl orthosilicate as sensing material for measurement of humidity”, Analytica Chimica Acta, 449 (2001)103-109Traversa, E.; Gnappi, G. et al, “Ceramic thin films by sol-gel processing as novel materials for integrated humidity sensors”, Sensors and Actuators B 31(1996)59-70Uchikawa, F.; Shimamoto, K., ” Time variability of surface ionic conduction on humidity-sensitive SiO2 films”, Am.Ceram. Soc. Bull. 64 (1985) 1137-1141Yamazoe, N.; Yasuhiro, S., “Humidity sensors：principles and applications”, Sensors and Actuators 10, (1986), 379-398Yang, M.-R.; Chen, K.-S.,” Humidity sensors using polyvinyl alcohol mixed with electrolytes”, Sensors and Actuators B 49(1998) 240-247台灣大學大氣科學學系，大氣研究資料庫， NWP線上資料搜尋系統(1980-2002)，http://databank.as.ntu.edu.tw/李標榮、張緒禮，電子傳感器，北京國防工業，1993年出版。宋隆裕、洪健彰、陶惟翰、鍾財王，以有機無機混成材料(AMPS/SiO2)製作阻抗式濕度感測器之研究，2001年中華民國化學工程研討會論文集，431-434頁林唯芳，有機無機掺合材料，塑膠資訊 NO.60(1989) p 4-9吳明木，陶瓷半導體濕度感知特性之研究，1980，國立成功大學化學研究所論文洪健彰、鍾財王、宋隆裕，混成材料(AMPS/SiO2)濕度感測器之製備與性能研究，2002，中原學報，第30卷第三期劉偉仁，以溶膠-凝膠程序製備無機複合膜於金屬基材之電化學和表面特性分析，中原大學化學工程研究所碩士論文(2001)周明軍，高分子敏濕材料功能設計，傳感器世界，第三期 (2001) 21-25陳忠吾，奈米複材簡介, 塑膠資訊，第六十期 (2001)1-20廖秋峰、詹益松，高分子在感測器上的應用，工業材料 150期(1998) 101-152頁鍾秀瑩，聚氧化乙烯濕度感測器之研究，成大材料科學及工程研究所碩士論文(2001) 陳姿秀，同時聚合下製備聚苯乙烯/矽膠高分子混成體，中央化學工程研究所碩士論文(2000)