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研究生:黃崇信
研究生(外文):Tsung-Hsing Huang
論文名稱:微機電共平面波導管之分析與設計
論文名稱(外文):Analysis and Design of Micromachined Copalnar Waveguides (MCPWs)
指導教授:陳浩暉
指導教授(外文):Hao-Hui Chen
學位類別:碩士
校院名稱:華梵大學
系所名稱:機電工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:86
中文關鍵詞:有限元素法微機電共平面波導管線方法共平面波導管
外文關鍵詞:finite elementmethod of linesmicromachined coplanar waveguide
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在本論文中,將藉由有限元素法結合線方法分析微機電共平面波導管,可清楚看出其傳播特性。此分析方法是將欲分析的結構區分為較複雜及結構為均勻的區域,較複雜的區域交由有限元素法處理,均勻區域則由線方法分析。由微機電共平面波導管的結構中,非均勻介電層及金屬的厚度往往比電路中其他均勻介電層的厚度要小許多,因此利用此方法只有一些部分是由有限元素法作二維度的切割,其它部分則是由線方法作一維度切割,如此便能對複雜結構的微機電共平面波導管作有效率的分析。藉由此方法亦可研究波導管的傳播特性。透過分析的結果可觀察出微機電共平面波導管比傳統的共平面波導管擁有較低的損耗、較快的相位速度以及較高的功率。亦可看出波導管中金屬厚度亦是影響傳播特性的重要因素之一。

The finite element method coupled with method of lines (FEM-MoL) is employed to rigorously investigate the propagation characteristics of a micromachined coplanar waveguide (MCPW). In the FEM-MoL analysis, the complex regions of the structure are appropriately modeled using finite element method, while the homogeneous regions are analyzed by method of lines. Since only some parts of the problem domain are needed to be discretized in two dimension by finite element method, while other parts are handled by one-dimensional discretization following the analysis of method of lines, the complex MCPW structure can be thus analyzed very efficiently by this method. Using this method, the propagation characteristics of a MCPW are fully studied. The results show that the MCPW has much lower line loss and higher phase velocity compared with the conventional CPW. It is also found that the finite-metallization thickness could be an important factor that affects the propagation characteristics of the MCPW.

目錄
致謝…………………………………………………………...Ⅰ
論文摘要...………………………………………………. Ⅱ
ABSTRACT…………………………………………………….Ⅲ
目錄………………………………………………..………...Ⅳ
圖錄………………………………………………..………...Ⅵ
符號說明…………………………...……………………….. XI
第一章 緒論……………….………………….………1
1.1 微機電共平面波導管………………………………1
1.2 微機電共平面波導管之分析方法.…………………..2
第二章 分析方法…………………………………....6
2.1 有限元素法……………..……………………….6
2.2 線方法……………………………….………..14
2.2.1 等距切割之線方法分析………………….14
2.2.2 非等距切割之線方法分析…….…………18
2.3 有限元素法與線方法之結合分析……………….19
2.4 特性阻抗之運算………….…………………..22
2.4.1 有限元素法區域功率之運算…..…………….23
2.4.2 線方法區域功率之運算………..……………23
2.4.3 電位之運算……………………………….28
第三章 結果分析與討論…………………………..34
3.1 理論正確性之驗證………………….………34
3.2 微機電共平面波導管之分析..……….…….35
3.2.1 不考慮基板損耗……………..…………35
3.2.2 考慮基板損耗.….…….…………….…36
第四章 結論與未來研究方向……………………….72
參考文獻………………………………….……….73

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