階梯結構表面聲波射頻濾波器是由數個表面聲波共振器以串聯及並聯交互之階梯結構所組合而成的，其中之表面聲波共振器是由製作於壓電基板上之指叉換能器配合兩側之反射器而成。表面聲波共振器之特性通常由壓電基板材料、波傳特性以及換叉換能器與反射器之金屬厚度與幾何結構決定了表面聲波共振器之特性，因此階梯結構表面聲波射頻濾波器之特性亦受上述參數所影響。本論文所採用的壓電基板材料為鉭酸鋰(Y42∘X LiTaO3)，使用梅生等效電路模型與耦合模型來分析單一表面聲波共振器之頻率響應，再利用高頻電路設計模擬軟体來分析階梯結構表面聲波射頻濾波器，觀查其3dB頻寬、插入損失、旁帶抑制、形狀因子等特徵參數。更進一步利用實作階梯結構表面聲波射頻濾波器，與模擬之結果及量測之數據相互比較印證。

A ladder-type surface acoustic wave(SAW) radio frequency(RF) filter consists of several SAW resonators cascaded in series and parallel alternately. A SAW resonator composes of an Interdigital Transducers (IDT) in the center and two reflectors on both sides fabricated on a piezoelectric substrate. The properties of substrate, the modes of wave propagation, the metal film thickness, the geometry of IDT and reflecting grating determine the characteristics of a SAW resonator, and then determine the characteristics of a Ladder-type SAW RF filter. In the paper, the LiTaO3 was used as the substrate. The Mason’s equivalent circuit and coupling-of-modes(COM) were used to simulate the SAW resonators. The RF circuit design soft ware are employed to analyze response of a Ladder-type SAW RF filter of the filters studied. The 3dB bandwidth, insertion loss, band rejection and shape factor were obtained. The simulation and measurement results were compared. The design procedure of a Ladder-type filters were established.

目錄
中文摘要 ………………………………………………………………………… i
英文摘要…………………………………………………………………………..ii
目錄………………………………………………………………………………. iii
圖目錄……………………………………………………………………………. iv
表目錄……………………………………………………………………………. vi
第一章 緒論…………………………………………………………………….. 1
1-1 研究背景與動機………………………………………………………. 1
1-2 論文內容與架構………………………………………………………. 3
第二章 壓電特性與壓電材料…………………………………..……………… 4
2-1 壓電特性……………………………………………………………… 4
2-2 壓電材料……………………………………………………………… 6
第三章 階梯結構表面聲波射頻濾波器之設計……………………..………… 9
3-1 階梯結構表面聲波射頻濾波器之原理與結構………………………. 9
3-1-1 階梯結構濾波器之設計原理…………………………………. 9
3-1-2 階梯結構濾波器之結構化簡………………………………... 15
3-1-3 表面聲波共振器之工作原理與阻抗特性…………………... 18
3-2 表面聲波共振器與濾波器模擬程式之建立……………………...… 22
3-2-1 耦合模型理論………...………...………...………...………... 22
3-2-2 等效電路模型與多埠連接理論……………………………... 24
3-2-2-1指叉換能器與反射器之等效電路模型……………...24
3-2-2-2多埠連接理論………………………………………...33
3-2-3 等效電路模型與耦合模型之參數轉換……………………... 36
3-2-4 階梯結構表面聲波濾波器模擬程式之建立………………... 39
第四章 階梯結構表面聲波射頻濾波器之模擬與測量結果………………… 41
4-1 量測參數定義………………………………………………………... 41
4-2 量測系統………………………...……………………...…………… 42
4-3 模擬與測量結果………………...………………...………………..... 42
第五章 結論與未來方向……………………………………………………… 57
5-1 結論………………………………...………………………………… 57
5-2 未來方向…………………………...………………………………… 60
參考文獻………………………………………………………………………… 61

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