表面聲波濾波器是由製作於壓電基板上的兩組叉指換能器所構成，因此頻率響應也就決定於壓電基板的波傳特性以及叉指換能器結構。本論文採用傳輸矩陣法將等效的兩個叉指換能器[T]矩陣與延遲距離[D]矩陣串接起來，架構出一個雙埠表面聲波濾波器的模擬程式。用來模擬表面聲波濾波器設計優劣的各項評估參數，諸如：插入損失、3dB頻寬、群延遲鏈波以及旁帶抑制能力等。而本論文的探討主題，即是為了提高表面聲波濾波器的旁帶抑制能力，針對叉指換能器的結構加以變化，選用抽取加權、振幅加權來達到此要求。最後經由程式模擬設計出一個多帶通的表面聲波梳狀濾波器，而且針對輸入埠叉指換能器做振幅加權以提高其旁帶抑制能力
，然後實際製作出元件，再將量測與模擬結果做比較，以建立一個準確的模擬程式。

Surface acoustic wave (SAW) filters consist of pairs of interdigital transducers (IDTs) fabricated on piezoelectric substrates. The frequency responses of SAW filters depend on the characteristic of substrates and the configurations of IDTs. In this thesis, a transmission matrix method is applied to evaluate characteristics, such as : insertion loss, 3dB bandwith, group delay ripple and sidelobe suppression of SAW filters. The aim of this thesis is then to increase sidelobe suppression of SAW filters by apodizing IDTs. Two types of apodization techniques are employed, i.e., withdrawal weightings and apodized weightings. Designing finally a multi-bandpass SAW comb filter and increasing sidelobe suppression aims at apodized weighting configurations of the input IDT. The frequency responses of SAW comb filters with different apodized weightings are simulated and verified with experiments. Comparison results show excellent agreement between theoretic and experiment datas.

摘要………………………………………………………………………i
英文摘要…………………………………………………………………ii
目錄…………………………………………………………………….iii
圖目錄……………………………………………………………………v
表目錄………………………………………………………………….xi
第一章 緒論…………………………………………………………….1
1-1 研究背景……………………………………………………….1
1-2 研究動機與目的……………………………………………….4
1-3 論文架構……………………………………………………….6
第二章 壓電材料特性與應用………………………………………….7
2-0 前言…………………………………………………………….7
2-1 壓電特性……………………………………………………….7
2-1.1 正壓電效應………………………………………………8
2-1.2 逆壓電效應………………………………………………8
2-2 壓電材料……………………………………………………….9
2-3 壓電材料應用於表面聲波元件…………………….………...11
第三章 表面聲波濾波器之設計理論…………………………………12
3-1 表面聲波橫向濾波器…………………………………………12
3-2叉指換能器基本結構………………………………………….13
3-3傳輸矩陣法架構雙埠表面聲波橫向濾波器理論…………….20
3-3.1叉指換能器傳輸矩陣……………………………………20
3-3.2雙埠表面聲波橫向濾波器之理論推導…………………23
3-4 叉指換能器結構加權方式……………………………………26
3-4.1 抽取加權……………………………………………….26
3-4.2 振幅加權……………………………………………….37
3-4.2.1 傅立葉轉換加權法………………………………39
3-4.2.2 道爾夫-契比雪夫陣列加權法…………………...51
第四章 表面聲波元件製作與量測系統的建立………………………58
4-1 表面聲波元件製作……………………………………………58
4-1.1 壓電機板選擇………………………………………….58
4-1.2 光罩製作……………………………………………….58
4-1.3 表面聲波元件晶片製作……………………………….59
4-1.4 量測基板製作………………………………………….59
4-2 量測系統的建立………………………………………………61
第五章 振幅加權表面聲波濾波器設計方式與模擬、量測結果分析.63
5-0 前言……………………………………………………………63
5-1 振幅加權表面聲波濾波器設計方式…………………………65
5-2 模擬與量測結果………………………………………………71
第六章 結論與未來研究方向…………………………………………84
參考文獻……………………………………………………………….86

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