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研究生:吳偉達
研究生(外文):Wei-Da Wu
論文名稱:雙向微流體驅動系統之研究
論文名稱(外文):Study of Bi-directional Microfluid Driving Systems
指導教授:林裕城林裕城引用關係
指導教授(外文):Yu-Cheng Lin
學位類別:碩士
校院名稱:國立成功大學
系所名稱:工程科學系碩博士班
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:62
中文關鍵詞:微流體流體控制微機電
外文關鍵詞:fluid controllmicrofluidMEMS
相關次數:
  • 被引用被引用:1
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  • 下載下載:94
  • 收藏至我的研究室書目清單書目收藏:1
微全分析系統(μTAS)已經在單一晶片上發展出關於化學反應、分離和感測的一些分析過程。在醫學和生醫的應用方面,微全分析系統必須設計特別傳輸機制以透過系統中的微流道使樣品和試劑移動。微流體驅動系統之研究是一種利用氣流動力之微流體驅動方法及裝置,特別適用於操作生化檢測流程之可棄式反應晶片,例如操作核酸檢體處理及鹼基序列檢測之生物晶片。
這個驅動系統是一個單一晶片的結構,沒有移動部分並且不需要微製程中的加熱器或電極。這個氣體驅動器是在晶片裡加入微流道製程,並且藉著吹氣流透過此元件來使它工作。這個雙向驅動模組為吸管和推管兩個個體部分的結合。這個驅動系統提供一個穩定和靈活的雙向微流體驅動控制。藉由調整推出/吸入比例的參數,例如:在進氣流道的位置和氣流速度上,觀察其數值的研究;以及探討不同的流體性質在此驅動系統中的流動情形。
微流體驅動系統與微反應模組之間無須任何管道連結,且所有氣流均固定為向外吹送,因此無微反應模組承載之檢體或反應試劑回溯污染驅動系統之虞;搭配的微反應模組結構中亦無須佈置任何可動元件,將可有效的簡化製程、降低成本。
Micro Total Analysis Systems (μTAS) have been developed to perform a number of analytical processes involving chemical reactions, separation and sensing on a single chip. In medical and biomedical applications, a mTAS must be designed considering special transport mechanisms to move samples and reagents through the microchannels in the system.
This pneumatic system is an on-chip planar structure without moving parts and does not require microfabricated heaters or electrodes. The pumping actuation is introduced to the microchannel fabricated in chip by blowing an airflow through this device. The bi-directional driving module combines two individual components for suction and exclusion. The driving system provides a stable and flexible bi-directional microfluid driving control. The tunable parameters for adjusting the Exclusion/Suction ratios, such as, the location of the inlet channel and the velocities of the airflow were observed in the numerical study. The effects of the structure of the air gallery and the fluidic properties, such as viscosity and surface tension of the liquid are investigated herein
For the presented design, no air conduit was employed to connect the servo-system to the driving system therefore; the packaging difficulty and leakage problem can be eliminated. The final airflow outlet was fixed in one direction so that it can prevent cross-contamination between servo-system and chip. The driving system is therefore particularly suited to micro devices for biochemical analysis.
摘要 I
ABSTRACT II
誌謝 III
目錄 IV
表目錄 VII
圖目錄 VIII
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 3
1.3 驅動系統製作架構 11
第二章 元件之設計與工作原理 12
2.1 單一元件的設計 13
2.3 數值模擬 16
2.4 結果分析 17
2.5 連結通道之尺寸設計 25
第三章 晶片製作 30
3.1 CNC加工 30
3.2 晶片接合技術 32
3.2.1 PMMA 之清洗 32
3.2.2 晶片接合 32
3.2.3 融接接合法壓力參數設定 35
3.3 晶片完成 38
第四章 實驗平臺之建立 41
4.1 實驗方法 41
4.2 實驗平臺架設 42
4.3 溫控平臺架設 46
第五章 結果與討論 48
5.1 T型與粗-居中型驅動器之比較 49
5.2 吸入型與推出型驅動器之比較 51
5.3 粗-居中型與細-居中型驅動器之比較 52
5.4 黏滯性(Kinematic viscosity)對流速影響之探討-甲醇、乙醇 53
5.5 表面張力(Surface tension)對流速影響之探討-甲醇、水 55
第六章 結論與建議 56
6.1 結論 56
6.2 建議 59
參考文獻 60
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