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研究生:陳惠軍
研究生(外文):Hui-Chun Chen
論文名稱:氮化鋁粉體表面披覆無機物之抗濕處理研究
論文名稱(外文):The research of water-resistance of AlN powder provided by surface coating inorganic substances
指導教授:鍾賢龍
指導教授(外文):Shyan-Lung Chung
學位類別:碩士
校院名稱:國立成功大學
系所名稱:化學工程學系碩博士班
學門:工程學門
學類:化學工程學類
論文種類:學術論文
畢業學年度:90
語文別:中文
論文頁數:69
中文關鍵詞:氮化鋁表面披覆
外文關鍵詞:surface coatingAlNAluminum nitride
相關次數:
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摘 要
本論文研究分為四個部分進行氮化鋁粉體表面披覆無機物之抗濕處理研究。第三章是在氮化鋁粉體表面披覆二氧化鈦,披覆的方法有溶膠-凝膠法及溶液法,先披覆一層陶瓷前趨物,再以熱處理的方式,使披覆層成為緻密的陶瓷層,實驗結果顯示,披覆二氧化鈦的氮化鋁粉體,在適當的熱處理條件下,經過85℃、85%相對濕度及在去離子水中連續測試一百小時後,含氧量並無明顯上升,具抗濕效果。第四章是在氮化鋁粉體表面披覆二氧化矽與二氧化鈦的複合材料,披覆的方法為溶膠-凝膠法,其原理與第三章的原理類似,結果顯示,披覆二氧化矽與二氧化鈦複合材料的氮化鋁粉體,經過85℃、85%相對濕度連續測試一百小時後,含氧量並無明顯上升,具抗濕效果。
第五章是在氮化鋁粉體表面披覆二氧化鋯,披覆的方法為溶液法,將金屬鹽類溶於溶劑中,再將氮化鋁粉體分散在金屬鹽的溶液中,烘除溶劑致使金屬鹽因濃度到達飽和濃度,而在粉體表面析出,形成金屬鹽的披覆層,再以熱處理使金屬鹽裂解形成陶瓷披覆層,也因熱處理可得到緻密的陶瓷披覆層,實驗結果顯示,披覆二氧化鋯的氮化鋁粉體,在愈高溫的熱處理條件下,經過85℃、85%相對濕度後,有愈佳的抗濕效果,雖仍嫌不足,但在去離子水中連續測試一百小時後,含氧量並無明顯上升,具穩定的抗濕效果。第六章是在氮化鋁粉體表面披覆氧化釔,披覆的方法為溶液法,其原理與第五章的原理類似,結果顯示,披覆氧化釔的氮化鋁粉體,抗濕效果不佳,但期望披覆氧化釔的氮化鋁粉體應用在燒結方面時,會有較好的燒結性。
Abstract
This thesis successfully develops the technique to provide water-resistant and surface-modified aluminum nitride(AlN) powder. The thesis includes four parts. All of them describe the techniques of coating ceramic materials on aluminum nitride powder.
In chapter 3, we coat titania on AlN powder with sol-gel technique or TIAA solution. It was found that the titania-coated AlN powder presents predominant water resistance after immersing in water or 85HT test. In chapter 4, we coat silica-titania on aluminum nitride powder by the means of sol-gel technique. It was found the silica-titania-coated powder presents very excellent water resistance after 85HT test but it was still hydrolyzed after immersing in water.
In chapter 5, we coat zirconium dioxide on AlN powder with ZrO(NO3)2 solution. It was found that the higher the heat-treatment temperature, the more excellent water resistance that the coated powder present after 85HT. And it presents very excellent water resistance after immersing in water. In chapter 6, we develop the technique to coat yttrium dioxide, additive for sintering, on AlN with Y(NO)3 solution. It was found that the coated powder presents very poor water resistance. However, we hope it have advantage in AlN sintering.
總 目 錄
摘要………………………………………………………………………I
Abstract…………………………………………………………………II
總目錄…………………………………………………………………III
表目錄…………………………………………………………………VI
圖目錄………………………………………………………………VII
第一章 緒 論……………………………………………………………1
1-1陶瓷簡介……………………………………………………………1
1-2 氮化鋁的特性與其應用……………………………………………2
1-3 目前氮化鋁的合成技術……………………………………………4
1-4 研究動機……………………………………………………………5
1-5 文獻回顧……………………………………………………………7
1-5.1溶液法披覆SiO2……………………………………………7
1-5.2美國耐火陶瓷科技公司專利………………………………8
1-5.3 射頻電漿化學氣相沉積披覆二氧化矽……………………9
1-5.4 化學表面處理………………………………………………9
1-5.5 表面氧化處理……………………………………………13
第二章 實驗藥品及儀器…………………………………………15
2-1 分析儀器及設備…………………………………………………15
2-2藥品……………………………………………………………16
2-3 產物的測試……………………………………………………17
2-3.1 去離子水中的穩定性測試………………………………17
2-3.2恆溫恆濕機的測試…………………………………………18
2-4 儀器分析………………………………………………………18
2-4.1 氮氧分析儀………………………………………………18
2-4.2 穿透式電子顯微鏡觀察…………………………………19
2-4.3 掃描式電子顯微鏡觀察…………………………………19
2-4.4 Χ光繞射儀分析…………………………………………19
2-4.5 表面吸附儀分析…………………………………………20
第三章 SiO2-TiO2之披覆…………………………………………47
3-1 原理………………………………………………………………47
3-2 實驗過程…………………………………………………………48
3-2.1 溶膠的製備………………………………………………48
3-2.2 溶膠披覆…………………………………………………49
3-3 結果與討論………………………………………………………49
第四章 二氧化鋯之披覆…………………………………………62
A. ΖrO2之披覆…………………………………………………………62
4A-1 原理…………………………………………………………62
4A-2 實驗過程……………………………………………………62
B. ΖrO2-Y2O3之披覆……………………………………………………63
4B-1 原理…………………………………………………………63
4B-2 實驗過程……………………………………………………63
C. 結果與討論…………………………………………………………64
4C-1 披覆ΖrO2之結果與討論……………………………………64
4C-2 披覆ΖrO2-Y2O3之結果與討論………………………………66
第五章 氧化釔之披覆……………………………………………76
5-1 原理………………………………………………………………76
5-2 實驗過程…………………………………………………………76
5-3 結果與討論………………………………………………………77
參考文獻………………………………………………………………85
自 述……………………………………………………………………89
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