摘 要

有鑑於一氧化碳氣體對人體的危害及其無色無味之特性，研究發展能在常溫中精確感測一氧化碳濃度之氣體感測器便極為重要。平板式感測器之特點在於三個電極在基材板之同一側而深具微小化之潛力。本研究即針對以白金為感測電極（Pt）、Nafion®為電解質之平板式感測器，研究針對其在氮氣與空氣中感測一氧化碳之感測特性，並在白金電極上電鍍錫進行改質（Pt/Sn），實驗與理論分析探討在空氣中與氮氣中錫對於促進白金氧化一氧化碳之效果，研究中亦製備不同膜厚之Nafion®薄膜，探討不同Nafion®膜厚對感測一氧化碳之影響。
研究顯示以白金為感測電極，Nafionâ膜厚為0.71μm，在氮氣流速92 ml/min、相對濕度100％RH中感測800 ppm CO時，電位0.3 V(vs. Au)時有一最大之感測電流值2.76μA，在此電位下感測25∼1000 ppm CO之校正曲線成良好線性關係，其靈敏度為3.36 nA/ppm CO。而其感測靈敏度隨著氣體相對濕度由33％RH增加至100％RH時，靈敏度將隨之由0.47 nA/ppm CO 增加至3.36 nA/ppm CO。其感測800 ppm CO之反應時間t90與回復時間t10亦分別由33％RH時的6.27與8.57分鍾，減短至100％RH時的3.77與4.70分鍾。而當氣體流速從35增至50 ml/min時，感測器之靈敏度會由3.17 nA/ppm CO增至3.3 nA/ppm CO；當氣體流速大於50 ml/min時，感測器之靈敏度不再隨氣體流速增快而有明顯之變化。
在空氣中感測800 ppm CO時，在0.3 V (vs. Au)之最大感測電流為1.90μA，低於在氮氣中之最大感測電流2.76μA，其感測25∼800 ppm CO之校正曲線成良好之線性關係，其靈敏度為2.24 nA/ppm CO。
以Pt/Sn為感測電極，在氮氣中感測800 ppm CO、感測電位在0.2∼0.4 V（vs. Au）時有一最大之感測電流範圍，隨著電位偏正增加錫催化效果、感測電流隨之降低。當定電位0.3 V（vs. Au）感測25∼1000 ppm CO時之靈敏度為4.37 nA/ppm，約為純Pt電極靈敏度3.36 nA/ppm的1.3倍。
Pt/Sn電極在空氣中感測一氧化碳時，在0.3∼0.4 V（vs. Au）有一最大之感測電流範圍，其電位範圍略小於在氮氣中之最大感測範圍。受到氧氣存在之影響，在定電位0.3 V（vs. Au）下感測25∼800 CO時之靈敏度為3.8 nA/ppm CO，低於Pt/Sn電極在氮氣中之靈敏度4.37 nA/ppm，但仍高於Pt電極在氮氣中與空氣中之靈敏度3.36 nA/ppm與2.24 nA/ppm。
進一步推算得到Nafionâ膜厚為0.71μm、氣體流速92ml/min及其相對濕度100％RH時之一氧化碳氣體滲透係數為1.21*10-15 mole•cm/sec•cm-Hg•cm2。據此計算得到Nafionâ膜厚0.71μm、氣體濕度100％RH下，在氮氣中，Pt/Sn在電位範圍0.2∼0.4 V(vs. Au)時其感測800 ppm CO之平均一氧化碳外顯反應常數(KN2, 100)為3.1*10-9 mole/sec•cm-Hg，相較於Pt電極在0.3 V(vs. Au)時的0.61*10-9 mole/sec•cm-Hg，顯示錫金屬能有效增進一氧化碳之氧化反應速率常數達5倍之多。在空氣中，Pt/Sn與Pt電極在0.3 V(vs. Au)之外顯反應速率常數(KN2, 100)分別為0.99*10-9與0.30*10-9 mole/sec•cm-Hg，顯示錫在空氣中依然有催化一氧化碳氧化之效果，但其修飾效果較在氮氣中時略為降低，僅為Pt電極的3.3倍。
此外，改變不同之Nafionâ膜厚時，其校正曲線皆呈良好之線性關係，膜厚為0.52μm在氮氣中感測25∼1000 ppm CO時，其靈敏度為3.95 nA/ppm CO，大於膜厚為6.05μm時的1.12 nA/ppm CO。顯示隨著Nafionâ膜厚減小，其感測一氧化碳之靈敏度會隨之增加。

Abstract

Carbon monoxide (CO) is a colorless, odorless toxic gas. For safety concerns, it is important to develop a CO sensor which can be operated at room temperature with high accuracy. Nafion is one kind of solid polymer electrolyte which can be used at room temperature. Planar CO sensor do have the potential to miniaturization because the three electrodes are on the same side of substrate. In this study, we prepared CO planar sensors with platinum (Pt) and tin modified platinum (Pt/Sn) sensing electrode and Nafion solid electrolyte. The sensing behaviors for this planar sensors with Pt and Pt/Sn in N2 and air will be presented. Besides, the effect of thickness of Nafion film on the CO planar sensors was also studied.
For Pt sensing electrode with 0.71μm recast-Nafion-film, a maximum sensing current of 2.76 μA was found at 0.3 V(vs. Au) for 800 ppm CO at 92 ml/min and in 100%RH N2. At this applied potential, the calibration curve of 25~1000 ppm CO was linear and the sensitivity was 3.36 nA/ppm CO. As the gas humidity decreased from 100%RH to 33%RH, the sensitivity of 25~1000 ppm CO decreased apparently from 3.36 nA/ppm to 1.47 nA/ppm. Besides sensitivity, the response time to reach 90% of steady state sensing current increased form 3.77 to 6.27 and the recover time to reach 10% of steady state current increased form 4.70 to 8.57 min. The gas flow ratel affected the sensitivity only when the gas rate below 50 ml/min. When the gas flow rate decreased from 50 to 35 ml/min, the sensitivity decreased from 3.3 to 3.17 nA/ppm CO.
At 92 ml/min and in 100%RH air, a maximum sensing current of 1.90 μA was found at 0.3 V(vs. Au) for 800 ppm CO with Pt sensing electrode. The calibration curve in the range of 25~800 ppm CO was linear and the sensitivity was 2.24 nA/ppm CO.
For Pt/Sn sensing electrode in CO/N2, a maximum sensing current was in the potential range of 0.2 and 0.4 V (vs. Au) in 800 ppm CO. As the sensor was operated at more positive potential, the sensing current decreased and the improvement of tin was less significant. For sensing 25~1000 ppm CO at 0.3V(vs. Au), the calibration curve was linear and the sensitivity was 4.37 nA/ppm CO, about 1.3 times of that with Pt electrode.
For Pt/Sn electrode in CO/air, there was a maximum sensing current in the range of 0.3~0.4 V (vs. Au) in 800 ppm CO. The range is smaller than that in CO/N2. The sensitivity for 25~1000 ppm CO at 0.3V(vs. Au) was 3.8 nA/ppm CO. This sensitivity was smaller than that in N2, 4.37 nA/ppm CO, but was larger than Pt in N2, 3.36 nA/ppm, and in air, 2.24 nA/ppm.
Permeability coefficient for 0.71 μm recast-Nafion-film at 100%RH for CO was 1.21*10-15 (mole*cm/sec*cm-Hg*cm2). At 100%RH, the apparent rate constant of CO oxidation for Pt/Sn was 3.1*10-9 (mole /sec*cm-Hg) at the potential range of 0.2~0.4 V (vs. Au). This rate constant was about five times of that for Pt electrode at 0.3 V (vs. Au), 0.61*10-9 (mole /sec*cm-Hg). Tin also can raised the apparent rate constant of CO in air from 0.30*10-9 (mole /sec*cm-Hg) with Pt to 0.99*10-9 (mole /sec*cm-Hg).
Increase thickness of Nafion film decreased the sensitivity. The sensitivity of recast-Nafion-film with the thickness of 0.52μm were 3.95 nA/ppm CO which was larger than that with the thickness of 6.05μm, 1.12 nA/ppm CO.

中文摘要……………………………………………………………… Ⅰ
英文摘要……………………………………………………………… Ⅲ
目錄 …………………………………………………………………… Ⅴ
表目錄 ……………………………………………………………… Ⅹ
圖目錄 ……………………………………………………………… ⅩⅠ
符號說明 ……………………………………………………………… ⅩⅦ
第一章 序論………………………………...………………………… 1
1.1 一氧化碳簡介………………………………...………………….. 1
1.2 一氧化碳感測氣之種類與原理………………...……………… 5
1.2.1 觸媒燃燒型一氧化碳感測器……………….…………….. 5
1.2.2 氧化物半導體型一氧化碳感測器………………...…….. 6
1.2.3 場效電晶體型一氧化碳感測器………………………...… 8
1.2.4 石英震盪型一氧化碳感測器……………………………... 10
1.2.5 光學式一氧化碳感測器………………...………………… 11
1.2.6 電化式一氧化碳感測器…………………...……………… 13
1.2.6a 電位式一氧化碳感測器……………………...…... 14
1.2.6b 電流式一氧化碳感測器…………………...……... 18

1.3 Nafionâ簡介……………………………………………..………. 20
1.4 Nafionâ在一氧化碳感測器上之應用……………………..……. 22
1.4.1 厚膜式一氧化碳感測器……………..…………………... 24
1.4.1a 熱壓法……………………………..……………… 26
1.4.1b 真空濺鍍法………………………..……………… 26
1.4.1c 無電電鍍法…………………………..…………… 26
1.4.2 平板式一氧化碳感測器……………………..……………. 28
1.5 錫修飾白金電極…………………………………………………. 32
1.6 研究動機…………………………………………………………. 35
第二章 原理………………………………………………………….. 36
2.1 一氧化碳在白金上之反應機構……………………..…………… 36
2.2 一氧化碳氧化反應之動力表示式…………………...…………… 39
2.2.1 線型吸附一氧化碳氧化反應之動力表示式…………...… 40
2.2.2 橋型吸附一氧化碳氧化反應之動力表示式…………… 52
2.3 一氧化碳感測之數學模式……………………………………… 67
2.3.1 質傳控制區 67
2.3.2 動力控制區 73
2.3.3 質傳和動力混合控制區 74

2.4 錫催化一氧化碳之反應機構…………………..………………… 75
第三章 實驗設備與步驟…………………….…………….. 77
3.1 藥品與材料 ……………………………………….……… 77
3.2 儀器設備……………………………………….……………… 78
3.3 感測元件之製備………………………………..……………. 79
3.3.1 氧化鋁陶瓷基板之前處理…………..…………… 79
3.3.2 感測器電極之製備…………………..…………… 79
3.3.3 外接電路之連結………………………..………… 80
3.3.4 錫修飾白金感測電極（Pt/Sn）之製備………. 80
3.3.5 平板式一氧化碳感測器之製備…………….. 83
3.4 感測電極之電化學特性分析……………………….… 84
3.4.1 電極活性真實面積之測定……………...…… 84
3.4.2 一氧化碳電位剝除法測……………………… 86
3.5 感測元件對一氧化碳感測之特性分析……………… 88
3.5.1 感測系統之組裝……………………………… 88
3.5.2 循環伏安法（Cyclic Voltammertry）………… 91
3.5.3 極化曲線(Polarization Curve)…………..……. 91
3.5.4 一氧化碳濃度對感測電流之關係…..……… 92
第四章 結果與討論……………………………………….………… 94
4.1 Pt感測電極之電化學特性…………………………….……..…… 94
4.1.1 循環伏安法………………………….……….……….…… 94
4.1.2 一氧化碳電位剝除法…………………….….……………. 97
4.2 白金感測電極對一氧化碳之感測行為…………….…….……… 103
4.2.1 循環伏安法…………………………………….…….……... 103
4.2.2定電位法與極化曲線……………………………….……… 106
4.2.3 應答時間與回復時間……………………………….……… 110
4.2.4 靈敏度測試………………………………………….……… 112
4.2.5 氣體相對濕度對感測一氧化碳之影響……………….…… 116
4.2.5a 對電化學阻力之影響...……………………….…… 116
4.2.5b 對感測靈敏度之響 ….………………….………… 123
4.2.5c 對應答時間與回復時間之影響…………………… 128
4.2.6 氣體流速對感測一氧化碳之影響…………….…………… 128
4.2.6a 對靈敏度之影響…………………….……...……… 128
4.2.6b 對應答時間之影響……………………….………. 131
4.2.7 模擬真實空氣對Pt電極感測CO之影響……….………. 135
4.3 Pt/Sn電極對一氧化碳之感測行為……………………..……… 144
4.3.1 定電位法與極化曲線…………………………….……… 144
4.3.2 靈敏度測試………………………………….…………… 149
4.3.3 模擬真實空氣對Pt/Sn電極感測CO之影響…………..… 155
4.4 Nafion膜厚對感測特性之影響…………………………….….. 163
4.4.1 定電位法與極化曲線…………………………………..... 164
4.4.2 對感測靈敏度之影響…………………….……………… 166
4.4.3 對應答時間與回復時間之影響………………….……… 169
4.5 綜合與討論………………………………………………….….. 171
4.5.1 Nafion薄膜滲透係數…………………………….……… 171
4.5.2 Pt電極表面CO濃度與反應速率常數…………..……… 175
4.5.3 錫對一氧化碳感測之影響……………………………… 180
4.5.3a 在無氧存在下對一氧化碳感測之影響……...…. 180
4.5.3b 在氧氣存在下對一氧化碳感測之影響……….… 187
4.5.4 氧氣存在對一氧化碳感測之影響……………………… 190
4.5.5 平板式感測器在質傳與反應混合控制區之感測特性… 192
第五章 結論………………………………………………………… 195
建議事項………………………………………………………..…….. 197
參考文獻……………………………………………………………… 198

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