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研究生:吳鑫湧
研究生(外文):Hsin-Yung Wu
論文名稱:基板效應對酞花青物理氣相沈積行為之影響
論文名稱(外文):Phthalocyanines physical vapor deposition behavier of substrate effect
指導教授:張鑑祥張鑑祥引用關係
指導教授(外文):Chien-Hsiang Chang
學位類別:碩士
校院名稱:國立成功大學
系所名稱:化學工程學系碩博士班
學門:工程學門
學類:化學工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:78
中文關鍵詞:原子力顯微鏡LB膜物理氣相沈積矽烷單分子膜
外文關鍵詞:silane monolayerLB filmatomic force microscopyphysical vapor deposition
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本文利用矽烷單分子膜及LB膜將親水性玻璃基板表面進行表面改質後,再利用(Physical Vapor Deposited, PVD)物理氣相沈積技術,將四第三丁基銅□花青(Copper-Tetra-Tert-Butyl Phthalocyanine, CuTTBPc)加熱沈積至矽烷單分子膜改質玻璃基板、單層LB膜改質玻璃基板和玻璃基板上。由動態接觸角(Dynamic Contact Angle, DCA)的測量來分析□花青薄膜的表面潤濕性,並藉由原子力顯微鏡(Atomic Force Microscope, AFM)及X-ray繞射儀(X-ray Diffraction, XRD)來觀察其在固體基板上的型態及結構。探討在不同沈積時間下,基板效應的差異對薄膜成長行為的影響。
由實驗結果發現,在矽烷改質的疏水性玻璃基板上,晶粒數目較高,表面較為平坦,顯示□花青分子與矽烷表面親和力較大,於成長初期之成核速率較快,且薄膜傾向於細小多晶的結構,而在較低的厚度便形成連續膜。在玻璃基板上的晶粒數目相形較少、半徑較大,且平均粗糙度大,使得沈積的薄膜分子傾向於縱向成長,而呈現結晶性較高的情況。在單層LB膜改質玻璃基板上,因□花青分子並非以均勻單分子膜形式排列,而是以細小的分子團分散於玻璃面上,這些分子團在□花青沈積過程中,提供穩定的成核位置,使得薄膜結構亦傾向細小多晶,類似於在矽烷改質玻璃基板面上所得之結果。
Three substrates including hydrophilic glass, silane monolayer, and LB film of CuTTBPc, were used to study the substrate effects on the nucleation and growth behavior of CuTTBPc thin films in the process of physical vapor deposition. The surface morphology and structure of the films were investigated, respectively, by AFM and XRD spectrum.
The results show that the cluster density is small and the morphology is rougher for the films grown on the glass. That is, the nucleation rate is small on the glass and the growth tends to the direction normal to the substrate surface, which leads to a larger grain structure. On the contrary, the cluster density is comparatively higher and the mean roughness is smaller on the substrate of silane monolayer. These phenomena indicate that CuTTBPc molecules have higher adhesive force to the silane surface and a poly-fine-grained structure is resulted.
For the substrate of CuTTBPc LB film, the CuTTBPc molecules aggregate into separated domains of multi-layers. These domains, with higher density, act as stable nucleation sites in the later process of vapor deposition and thus, a poly-fine-grained structure is also resulted.
目錄
摘要i
ABSTRACTii
誌謝iii
目錄iv
表目錄vi
圖目錄viii
符號說明ix
第一章緒論1
1-1前言1
1-2文獻回顧2
1-2-1銅□花青的特性2
1-2-2物理氣相沈積薄膜的成長模式2
1-2-3矽烷自聚性分子膜4
1-2-4□花青LB沈積膜6
第二章實驗19
2-1藥品19
2-2基板的製備19
2-2-1玻璃基板10
2-2-2矽烷改質玻璃基板20
2-2-3單層LB膜改質玻璃基板20
2-3□花青物理氣相沈積薄膜之製備21
2-4薄膜表面特性的分析22
2-4-1動態接觸角的分析22
2-4-2表面型態的分析24
第三章結果與討論36
3-1玻璃基板上□花青物理氣相沈積薄膜的形成36
3-2矽烷改質玻璃基板上□花青物理氣相沈積薄膜的形
成37
3-3單層LB膜改質玻璃基板上□花青物理氣相沈積薄
膜的形成39
第四章結論55
參考文獻56
附錄62
A. □花青薄膜於氣體感測的應用62
A-1未改質玻璃基板沈積5層不同比例LB膜之氣體感測64
A-2矽烷改質玻璃基板沈積6層LB膜之氣體感測64
A-3基板效應對物理氣相沈積CuPc膜之氣體感測65
自述78
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