(3.237.97.64) 您好!臺灣時間:2021/03/03 08:11
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

我願授權國圖
: 
twitterline
研究生:陳炳州
研究生(外文):Ping-Chou Chen
論文名稱:以拉曼光譜研究由磁控濺鍍合併電子迴旋共振系統所成長的類鑽石薄膜
論文名稱(外文):Ramam spectroscopy study of diamond-like carbon films By combining magnetron sputtering and ECR-CVD deposition
指導教授:黃正雄黃正雄引用關係
指導教授(外文):J. S. Huang
學位類別:碩士
校院名稱:國立成功大學
系所名稱:物理學系碩博士班
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:64
中文關鍵詞:拉曼光譜類鑽碳膜電子迴旋共振
外文關鍵詞:DLCECR-CVDRamam spectroscopy
相關次數:
  • 被引用被引用:11
  • 點閱點閱:449
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:110
  • 收藏至我的研究室書目清單書目收藏:0
Diamond Like Carbon, DLC 呈現出一些與鑽石相近的機械性質, 例如它具有極高硬度、低摩擦係數、高化學穩定性……等等,這些相當重要的性質。在機械方面的應用上,如切削工具方面和耐摩耗的機器部件上,這些性質使得 DLC 成為較有吸引力的薄膜。 透過使用 ECR 與磁控管濺射合併,使 DLC摻雜金屬成為一個新穎且奇特的薄膜成長技術。
由 Raman 光譜進行量測,藉以分析改變偏壓和乙炔的流量對沉積在高速鋼上面的a-C:H薄膜之影響, 並且由 Rockwell 方法檢查了硬度。並由此次結果,我們討論並建議較佳的成長機制。
在 Raman 光譜中,通入不同的乙炔流量時, 這個 G line peak的變化和強度比例 (ID/IG )與薄膜硬度相關聯。在 Raman 光譜中,增加偏壓時G line peak會往更高頻率位移而D line peak會往更低的頻率位移。
由此結果,我們可以獲得了高硬度和低摩擦係數DLC薄膜。
DLC film exhibits excellent mechanical properties such extreme hardness and low friction coefficient. These properties make DLC films interesting for industry application on tools and sliding machine parts. By using Electron Cyclotron Resonance, incorporated with metal by magnetron sputtering, a novel hybrid technique for Diamond-like Carbon film is described, which combines magnetron sputtering and Electron Cyclotron Resonance Plasma for deposition of DLC films.
The effect of negative bias voltage and hydrocarbon flow rate on a-C:H films deposited on high speed steel were examined by Raman spectrum, and the hardness were investigated by Rockwell method. As a consequence, growth mechanism of this combined method is suggested. At different hydrocarbon flow rate, the variation of the G line peak and width and integrated intensity ratio (ID/IG) in the Raman spectra correlates well with the film hardness. The Raman spectra shows with increasing negative bias the G peak shift to higher frequency and D peak shift to lower frequency. High hardness and low friction coefficient of diamond-like carbon films have been obtained.
英文摘要…………………………………………...7
中文摘要…………………………………………..8
表目錄……………………………………………..9
圖目錄…………………………………………….10
第一章 緒論……………………………………..12
第二章 實驗裝置………………………………..14
2-1 濺鍍理論……………………………………...14
2-2 磁控濺鍍……………………………………….16
2-3 電子迴旋共振………………………………….17
2-4 實驗設備……………………………………...18
2-5 樣品的準備…………………………………….18
2-5-1 表面清洗…………………………………………..18
2-5-2 成長條件…………………………………….…….19
第三章 量測儀器………………………………..28
3-1拉曼光譜儀……………………………………….28
3-1-1 拉曼光譜學簡介…………………………………..28
3-1-2 散射光種類………………………………………..28
3-1-3 拉曼散射的量子模型與實驗裝置………………..29
3-1-4拉曼散射的古典波動模型……………………….…30
3-2 刮痕實驗(scratch)………………………….…33
3-3 Kalotest…………………………………..…….34
3-4 超動態微小硬度計DUH-200……………….….35
第四章 結果和討論……………………………..45
4-1 成長機制………………………………………..45
4-2 類鑽碳膜之拉曼光譜量測……………………..46
4-3 實驗結果討論………………………………..…47
4-3-1固定偏壓改變乙炔流量…………………………...47
4-3-2 固定乙炔(C2H2)流量改變偏壓………………..48
第五章 結論………..……………………………56
參考文獻………………………………………….61
[1] Sourece:International Resource Development Inc., New Canaan, Conn.
[2] K. Enke, Materials Science Forum, Vol.52&53, 1989, p559
[3] J. A. Woolan, and Coworkers, Materials Science Forum, Vol. 52& 53, 1989, p577
[4] A. Grill and B. Meyerson, in Synthetic Diamond: Emerging CVD Science and Technology, K. E. Spear and J. P. Dismukes, Eds., John Wiley & Sons, Inc., New York, 1994 91.
[5] A. Grill : Surf. Coat. Technol. 507(1997)94.
[6] J. Narayan et al., Appl. Phys. Lett., Vol.53, No. 19, 1988, p.7
[7] R. J. Hill, Physical Vapor Deposition, Temescal.
[8] D. L. Smith, Thin Film Deposition, 19 ch. 9, p.453
[9] M. Madou, Fundamentals of Microfabrication, p.105
[10] Y. C. Chan, X. S. Miao, X. M. He, and S. T. Lee : Journal of Electronics Materials, Vol. 27(1998)p.41.
[11] S.F. Yoon, H. Yang, Rusli, J. Ahn, and Q. Zhang : Journal of Electronics Materials, Vol. 27(1998)p.44.
[12] X. M. He, and S. T. Lee, I. Bello, A. C. Cheung, W. Z. Li, D. S. Chiu, Y. W. Lam, C. S. Lee, L. M. Leung, and X. T. Zhou : J. Mater. Res., No. 4, Vol. 14(1999)p.1617.
[13] A. Smekal, Naturwiss.,Vol. 11, p.873
[14] Z. C. Feng, A. A. Allerman, P. A. Barnes and S. Perkowitz, Appl. Phys. Lett. Vol. 60, p.1848(1992)
[15] J. P. Estrera, P. D. Stevens, R. Glosser, W. M. Duncan, Y. C. Kao,Y. H.Liu and E. A. Beam, Appl. Phys. Lett. Vol.61, p.1927(1992)
[16]G. Lucovsky, M. H. Brodsky, M. F. Chen, R. J. Chicotka and A. T. Ward, Phys. Rev. Vol. B4, p.1945(1971)
[17]Koji Yano and Takashi Katoda, J. Appl. Phys. Vol. 70, p.7036(1991)
[18]D. P. Bour, J. R. Shealy, A. Ksendzov and Fred Pollak, J. Appl. Phys. Vol. 64, p.6456(1988)
[19] F. H. Pollak and H. Shen, in Proceeding of the Society of Photooptical Instrumentation Engineers (SPIE, Bellingham, 1898), Vol. 1037, P 16.
[20] E. E. Mendez, L. L. Chang, G. Landgren, R. Ludeke, L. Esaki and F. H. Pollak, Phys. Rev. Lett., Vol.46, p.1230 (1981).
[21] M. Erman, J. B. Theetan, P. Frijlink, S. Gaillard, F. J. Hia and C. Alibert, J. Appl. Phys., Vol.56, p.3214 (1984).
[22] C. Alibert, S. Gaillard, J. A. Brum, G. Bastard, P. Frijlink and M. Erman, Solid state Commum. Vol.53, p.457 (1985).
[23]K. Capuder, P. E. Norris, H. Shen, Z. Hang and F. H. Pollak, J. Electron. Mater. Vol.19, p.295 (1990).
[24] D. A. Long, Raman Spectroscopy, p.6
[25] D. Tabor, Rev. Phys. Technol. Vol.1(1970)p.145
[26] E. G. Spencer, P. H. Schmidt, D. C. Joy, F. J. Sansalone, Appl. Phys. Lett. Vol.29(1976)p.118
[27] Y. Lifshitz, G. D. Lempert, E. Grossman, Phys. Rev. Lett. 72(1994)p.2753
[28] C. Weissmantel, Thin Solid Films. Vol.92(1993)p.277
[29] W. Moller, Appl. Phy. Lett. Vol.59(1991)p.2391
[30] H. Tasi and D. B. Bogy, J. Vac. Sci. Technol.,Vol.A5, 3287(1987)
[31] D.S. Knight, W.B. White, J. Mater.Res.,Vol.4 p.385(1989)
[32] M. Yoshikawa, G. Katagiri, H.Ishida, A. Ishitani, “Raman spectra of diamondlike amorphous carbon films”J. Appl.Phys.Vol.64(1988)p.6464
[33] W. L.Wang, M. C. Polo, G. Snachez, J.Cifre, J. Esteve, “Internal stress and strain in feavily boron-doped diamondfilms grows by microwave plasma and hot filament chemical vapor deposition”, J. Appl. Phys. Vol.80(1846)
[34] X. Z. Liao, R.J. Zhang, C. S. Lee,S. Tong Lee, Y.W.Lam, “The influence of boron doping on the structure and characteristics of diamond thin films”Diamond relat. Mater,Vol.6(1997)p.521
[35] T. M. Wang, W. J. Wang, B. L. Chen, ”Electrical and optical properties and structure changes of diamondlike carbon films during thermal annealing”, Phy. Rev. B,Vol.50(1994)p.5587
[36] D. Beeman, J. Silverman, R. Lynds, and M. R. Anderson, Phys. Rev.B.Vol.30(1984)p.870
[37] A. Richter, H. J. Schebe, W. Pompe, K. W. Brezwinkam, I. Muhlingm J. Non-cryst. Solids,Vol.88(1986)p.131
[38] N. H. Cho, D. K. Veirs, J. W. Ager III, M. D. Rubin, C. B. Hopper, ”Effects of substrate temperature on chemical structure of amorphous carbon films “, J. Appl. Phys.Vol.71(1992)p.2243
[39] E. A. Burgermeister, C. A. J. Ammerlan,G. Davies, J. Phys.C. Vol.13(1980)p.691
[40] H. J. Steffen, S. Marton, J. W. Rabalais, Phys. Rev. Lett. Vol.68 (1992)p.1726
[41] J. C. Bourgoin, B. Massarini, Phys. Rev. B.Vol.14(1976)p.2690
[42] J. Koike, D. M. Parkin. T. E. Mitchell, Appl. Phys. Lett. Vol.60 (1992)p.1450
[43] H. Dimigen, Surf. Coatings Technol. Vol.49(1991)p.453
[44] F. M. Kimock, B. J. Knapp, Surf. Coatings Technol. Vol.56(1993)p.273
[45] A.Grill, V. Patel, Diamond Rel. Mater. Vol.2(1993)p.1519
[46] A.Grill, Surf. Coatings Technol. Vol.94 (1997)p.507
[47] A. K. Gangopadhyay, P. A. Willermet, W. C. Vassell, M. A.Tamor, Tribol. Int. Vol.18 (1997)p.301
[48] A. K. Gangopadhyay, W. C. Vassell, M. A. Tamor, Tribol. Int. Vol.18(1994)p.454
[49] J. Koskinen, D. Schneider, H. Ronkainen, T. Muukkonen, S.. Varjus,P. Burck, K. Holmberg, H. J. Scheibe, Surf. Coatings Technol.Vol.109(1998)p.385
[50] K. Enke, H. Dimigen, H. Hubsch, Appl. Phys. Lett. Vol.36(1980)p.290
[51] K. Enke, Thin Solid Films, Vol. 80(1981)p.227
[52] J. Robertson, Diamond Rel. Mater. Vol. 2(1993)p.984
[53] J. Robertson, Diamond Rel. Mater. Vol. 3(1994)p.361
[54] J. Robertson, Radiat. Effect,Vol.142(1997)p.63
[55] J. Robertson, in:S.R.PP. Silva, et al(Eds.)Amorphous Carbon: State of the Art, World Scientific, Singapore, p.32(1998
連結至畢業學校之論文網頁點我開啟連結
註: 此連結為研究生畢業學校所提供,不一定有電子全文可供下載,若連結有誤,請點選上方之〝勘誤回報〞功能,我們會盡快修正,謝謝!
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
無相關期刊
 
系統版面圖檔 系統版面圖檔