Diamond Like Carbon, DLC 呈現出一些與鑽石相近的機械性質, 例如它具有極高硬度、低摩擦係數、高化學穩定性……等等，這些相當重要的性質。在機械方面的應用上，如切削工具方面和耐摩耗的機器部件上，這些性質使得 DLC 成為較有吸引力的薄膜。 透過使用 ECR 與磁控管濺射合併,使 DLC摻雜金屬成為一個新穎且奇特的薄膜成長技術。
由 Raman 光譜進行量測，藉以分析改變偏壓和乙炔的流量對沉積在高速鋼上面的a-C:H薄膜之影響, 並且由 Rockwell 方法檢查了硬度。並由此次結果，我們討論並建議較佳的成長機制。
在 Raman 光譜中，通入不同的乙炔流量時, 這個 G line peak的變化和強度比例 (ID/IG )與薄膜硬度相關聯。在 Raman 光譜中，增加偏壓時G line peak會往更高頻率位移而D line peak會往更低的頻率位移。
由此結果，我們可以獲得了高硬度和低摩擦係數DLC薄膜。

DLC film exhibits excellent mechanical properties such extreme hardness and low friction coefficient. These properties make DLC films interesting for industry application on tools and sliding machine parts. By using Electron Cyclotron Resonance, incorporated with metal by magnetron sputtering, a novel hybrid technique for Diamond-like Carbon film is described, which combines magnetron sputtering and Electron Cyclotron Resonance Plasma for deposition of DLC films.
The effect of negative bias voltage and hydrocarbon flow rate on a-C:H films deposited on high speed steel were examined by Raman spectrum, and the hardness were investigated by Rockwell method. As a consequence, growth mechanism of this combined method is suggested. At different hydrocarbon flow rate, the variation of the G line peak and width and integrated intensity ratio (ID/IG) in the Raman spectra correlates well with the film hardness. The Raman spectra shows with increasing negative bias the G peak shift to higher frequency and D peak shift to lower frequency. High hardness and low friction coefficient of diamond-like carbon films have been obtained.

英文摘要…………………………………………...7
中文摘要…………………………………………..8
表目錄……………………………………………..9
圖目錄…………………………………………….10
第一章 緒論……………………………………..12
第二章 實驗裝置………………………………..14
2-1 濺鍍理論……………………………………...14
2-2 磁控濺鍍……………………………………….16
2-3 電子迴旋共振………………………………….17
2-4 實驗設備……………………………………...18
2-5 樣品的準備…………………………………….18
2-5-1 表面清洗…………………………………………..18
2-5-2 成長條件…………………………………….…….19
第三章 量測儀器………………………………..28
3-1拉曼光譜儀……………………………………….28
3-1-1 拉曼光譜學簡介…………………………………..28
3-1-2 散射光種類………………………………………..28
3-1-3 拉曼散射的量子模型與實驗裝置………………..29
3-1-4拉曼散射的古典波動模型……………………….…30
3-2 刮痕實驗（scratch）………………………….…33
3-3 Kalotest…………………………………..…….34
3-4 超動態微小硬度計DUH－200……………….….35
第四章 結果和討論……………………………..45
4-1 成長機制………………………………………..45
4-2 類鑽碳膜之拉曼光譜量測……………………..46
4-3 實驗結果討論………………………………..…47
4-3-1固定偏壓改變乙炔流量…………………………...47
4-3-2 固定乙炔（C2H2）流量改變偏壓………………..48
第五章 結論………..……………………………56
參考文獻………………………………………….61

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