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研究生:陳漢珍
研究生(外文):Han-Jan Chen
論文名稱:可積體化表面聲波帶拒濾波器之研製
論文名稱(外文):An Integrable Surface Acoustic Wave Notch Filter
指導教授:洪茂峰洪茂峰引用關係王永和王永和引用關係
指導教授(外文):Mau-Phon HoungYeong-Her Wang
學位類別:碩士
校院名稱:國立成功大學
系所名稱:微電子工程研究所碩博士班
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:86
中文關鍵詞:帶拒濾波器表面聲波交叉電極轉換器傳輸延遲線
外文關鍵詞:Surface Acoustic WaveNotch FilterDelay LineInterdigital Transducer
相關次數:
  • 被引用被引用:6
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  • 下載下載:117
  • 收藏至我的研究室書目清單書目收藏:0
有鑑於傳統的帶拒濾波器(Notch Filter)不易積體化且功率消耗大,所以本論文之目的,則是以表面聲波為基礎來製作一表面聲波帶拒濾波器(Surface Acoustic Wave Notch Filter)。雖然過去已有些研究討論,但在其結構上往往需外加集總元件電阻R、電容C、電感L,而使元件結構呈現複雜化及不易於積體化。所以我們提出了一種簡單平面型的結構來實現表面聲波帶拒濾波器,使其具有較小尺寸和較輕重量的特性且易於積體化。吾人利用表面聲波的原理,設計交叉指狀電極轉換(Interdigital Transducer,IDT)與傳輸延遲線(Delay Line)耦合的電路結構,使其達成帶拒濾波器之特性。
以本文為例,則是以此結構採取指叉電極寬度為8μm,以半導體中的微影、曝光及蒸著(Evaporation)的製程技術,製作於128˚ rotated YX-cut Lithium Niobate(鈮酸鋰,LiNbO3)壓電材料基板上,其所呈現的中心頻率為 113.4 MHz 且3dB頻寬約為400 KHz(BW=0.36%)、插入損失(S21)約為 -10.583 dB 的帶拒濾波效果。
經由軟體Microwave Office模擬與製程結果比較發現,隨著IDTs之重疊長度、對數及傳輸延遲的改變,可調變濾波器之插入損失及頻寬,可應用於阻絕其它訊號的干擾。除此之外,更解決了傳統RLC濾波器之不易積體化、消耗功率等問題;且符合通訊元件低成本、製作容易、體積小的需求。
Although Surface Acoustic Wave Notch Filter was investigated in the past, the structures of these devices often needed the extra lumped-element : resistance R、capacitance C and inductance L so that the devices are complex and integrated hardly. From this, we offer a simple planar structure of the SAW notch filters that have smaller size and can be fabricated easily. It has several advantages such as easy-integrated; smaller size and no power dissipation. We adopt the interdigital transducers and delay line to fabricate the SAW notch filter. In this paper, we use an interdigital transducer finger width 8 mm with conventional photolithography process; lift-off technique; piezoelectric materials to fabricate on the 128° rotated YX-cut Lithium Niobate (LiNbO3). Finally, we get the frequency responses of the SAW notch filter: the center frequency 113.4 MHz; the 3dB bandwidth 0.36 %; the insertion loss S21= –10.583 dB.
中文摘要
英文摘要
目錄
圖表目錄
目錄

第一章 緒論
1-1 研究背景……………………..…………………………………...1-1
1-2 研究動機……………………..…………………………………...1-2
附圖….…………………………………………………………...1-5
第二章 原理
2-1 表面聲波
2-1-1 基本理論……………………………….....………..…………2-1
2-1-2 特性因數………………………………………….……….2-2
2-2 表面聲波帶拒濾波器
2-2-1 基本原理…………………………………………..………2-7
2-2-2 等效電路…………………………………………….…….2-8
2-2-3 等效電路之分析…………………………………………2-12
2-2-4 元件模擬………………………………………..………..2-15
2-3 RLC帶拒濾波器………………………………………..……….2-16
表與附圖……………………………………………...…………2-18
第三章 實驗過程
3-1光罩及基板選擇…………………………………………………...3-1
3-2元件製程……………………………………………………….…..3-1
3-3元件之量測…………………………………….…………………..3-4
附圖………………………………………………………………...3-5
第四章 結果與討論
4-1 製程結果……………………………………………………...…..4-1
4-2 製程結果與模擬之討論分析…………………………….………4-1
4-3 表面聲波元件之二次效應…………………….…………………4-7
附圖………………………………………………………………4-9
第五章 結論
參考文獻
參考文獻

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