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研究生:吳怡聰
研究生(外文):I-Tsung Wu
論文名稱:含鈦無氫類鑽碳膜磨潤性質與乾車削特性之研究
論文名稱(外文):Study of tribological properties and dry turning performances of the titanium hydrogen-free diamond-like carbon coatings
指導教授:蘇演良
指導教授(外文):Yean-Liang Su
學位類別:碩士
校院名稱:國立成功大學
系所名稱:機械工程學系碩博士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:88
中文關鍵詞:無氫類鑽碳膜乾車削特性磨潤性質
外文關鍵詞:hydrogen-free diamond-like carbon coatingsturning performancestribological properties
相關次數:
  • 被引用被引用:9
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  • 下載下載:55
  • 收藏至我的研究室書目清單書目收藏:0
本實驗利用中頻雙極式磁控與非平衡磁控濺鍍混合系統,濺鍍固體碳靶及鈦靶,被覆含鈦無氫類鑽碳膜。主要目的為研究含鈦無氫類鑽碳膜的磨潤性質與被覆車刀之乾車削性能。
實驗中鍍膜被覆共分為二階段:第一階段,主要目的為探討基板偏壓對鍍膜的影響;第二階段,改變金屬鈦靶的電流大小,得到不同鈦金屬含量的鍍膜,探討不同鈦含量對鍍膜磨潤性質的影響。最後進行實地乾車削試驗,以瞭解含鈦無氫類鑽碳膜被覆車刀之乾車削性。
由第一階段鍍膜被覆得知:鍍膜硬度會隨著基板偏壓升高而增大;但鍍膜附著性有隨偏壓上昇而下降的趨勢。經SRV磨耗試驗證實基板偏壓為-55V時,鍍膜有最高的抗磨耗性。
經第二階段鍍膜被覆我們得到含鈦量0∼51%的無氫碳膜。隨著含鈦量的增加,鍍膜的結構可分為三類:鈦含量在20a%內時,鍍膜以非晶態類鑽碳膜為主;當鈦含量介在28~35a%之間時,鍍膜內混合了鈦和碳化鈦的的結晶,且還有部分非晶態碳結構的存在;當鈦含量在40a%以上時,鍍膜內的結構以碳化鈦結晶為主
經由實驗得知:添加鈦金屬有助於無氫類鑽碳鍍膜與底材間的附著性,且當鈦金屬含量在3~20a%之間,鍍膜擁有較低的摩擦係數與較高的抗磨耗性;經由SRV磨耗試驗,證實含鈦無氫類鑽碳膜確實擁有比傳統的含氫類鑽碳膜還優越的磨潤性質。在乾車削試驗中,以含鈦量20a%被覆車刀表現最佳,其刀腹磨耗量約只有未被覆車刀的1/5,顯示被覆適當的無氫含鈦類鑽碳膜,的確有助於提升車刀的刀具壽命。
The main purpose of this study is to research the tribological properties and turning performance of titanium hydrogen-free amorphous carbon coatings prepared by sputtering graphite and titanium targets with a medium frequency Twin magnetron sputtering and unbalanced magnetron sputtering hybrid system.
It contains two stages of research in the study. We focus the influence of substrate bias on the properties of coatings in first stage. We change the current of titanium target to get various titanium quantities of coatings in second stage. Finally, a dry turning of coated inserts will be undergone to understand the turning performance of titanium hydrogen-free amorphous carbon coatings.
Through the research of the first stage we know that the hardness of the coatings increase and the adhesion of the coatings decrease with the substrate bias. After SRV tribological test we verify that the coating prepared under the minus 55 bias has highest wear resistance.
We got coatings with titanium content range from zero to fifty-one atomic percent in second stage. With increasing the content of titanium, the structure of the coating can be divided into three different types. When the titanium is within twenty atomic percent, the coating is the amorphous diamond-like carbon coatings. When the titanium is between twenty-eight and thirty-five, the structure of the coating is mixed with titanium, titanium carbide crystals and some of the amorphous carbon. When the titanium is above forty atomic percent, the property of the coating is dominated by titanium carbide crystals.
Through the study we can know that adding titanium contributes to the adhesion of the coatings and the coatings have the lower friction coefficient and higher wear resistance when the titanium is between three and twenty atomic percent.
We demonstrate that the hydrogen-free titanium diamond-like carbon coatings do have more advantages in tribological properties than conventional hydrogenated diamond-like carbon coatings. The twenty atomic percentage of titanium diamond-like carbon coating which flank wear is just about one-fifth of the uncoated insert that shows coated appropriate hydrogen-free diamond-like carbon coating truly help increase the tool life.
總目錄
中文摘要………………………………………………………………..Ⅰ
英文摘要………………………………………………………………..Ⅱ
總目錄…………………………………………………………………..Ⅲ
表目錄…………………………………………………………………..Ⅵ
圖目錄…………………………………………………………………..Ⅶ
第一章 緒論……………………………………………………………..1
1-1前言………………………………………………………………..1
1-2 研究動機…………………………………………...……………..2
第二章 文獻回顧………………………………………………………..3
2-1 類鑽碳膜的被覆技術分類……………………………………….3
2-2 類鑽碳膜的分類………………………………………………….4
2-2-1含氫類鑽碳膜………………………………………………...4
2-2-2無氫類碳膜………………………………………………….. 6
2-3鍍膜的殘留應力…………………………………………………..7
2-4 增進類鑽碳膜性質的方法……………………………………….7
2-4-1被覆金屬中介層……………………………………………...8
2-4-2添加金屬於鍍膜內…………………………………………...8
2-4-3適當熱處理…………………………………………………...9
2-4-4漸進被覆……………………………………………………..9
2-4-5離子轟擊法………………………………………………….10
第三章 實驗內容…………………………………………..…………..11
3-1 實驗目的………………………………………………………...11
3-2實驗簡介………………………………………………………...11
3-3濺鍍系統………………………………………………………...11
3-4 鍍膜規劃………………………………………………………...12
3-5實驗內容………………………………………………………...12
3-5-1輝光放電分光儀…………………………………………….12
3-5-2 X光繞射分析儀……………………………………………12
3-5-3拉曼光譜分析……………………………………………….13
3-5-4 附著性測試………………………………………………...13
3-5-5熱處理試驗…………………………………………………14
3-5-6 SRV磨耗試驗………………………………………………14
3-5-7乾車削試驗…………………………………………………14
第四章 結果與討論……………………………………………………15
4-1第一階段鍍膜基本性質…………………………………………15
4-1-1偏壓對膜厚、成分的影響…………………………………15
4-1-2偏壓對微硬度的影響……………………………………….15
4-1-3偏壓對附著性的影響………………………………………16
4-2 第一階段鍍膜SRV試驗………………………………………..17
4-3 第二階段鍍膜基本性質………………………………………...18
4-3-1 鈦靶電流與鍍膜含鈦量和膜厚關係……………………..18
4-3-2 鍍膜結晶構造、拉曼分析…………………………………19
4-3-3 鍍膜構造與微硬度之關係………………………………...20
4-3-4 附著性……………………………………………………...21
4-4熱處理對鍍膜的影響……………………………………………22
4-5 第二階段鍍膜SRV磨耗試驗………………………………..23
4-6 鍍膜的磨潤特性………………………………………………...25
4-7 鍍膜被覆車刀乾車削試驗……………………………………..26
4-8 PCB微孔鑽削試驗………………………………………………27
第五章 結論……………………………………………………………28
5-1結論………………………………………………………………28
5-2實驗心得………………………………………………………...30
5-3未來展望…………………………………………………………30
第六章 參考文獻………………………………………………………31


表目錄

表4-1 第一階段鍍膜硬度試驗結果表………………………………..41
表4-2 第一階段鍍膜壓痕刮痕試驗結果表…………………………..41
表4-3 第一階段鍍膜刮痕試驗結果表………………………………..41
表4-4 拉曼光譜經高斯峰值分佈函數拆解結果表…………………..42
表4-5 第二階段壓痕與刮痕試驗結果表……………………………..42
表4-6 第二階段鍍膜硬度試驗結果表………………………………..43


圖目錄

圖3-1 第一階段鍍膜被覆流程圖……………………………………..44
圖3-2 第二階段鍍膜被覆流程圖……………………………………..45
圖3-3 中頻雙極式磁控與非平衡磁控濺鍍混合系統………………..46
圖3-4 鍍膜規劃示意圖…..…………………………………………..46
圖3-5 壓痕等級示意圖……………………………………………..…47
圖3-6 刮痕試驗機示意圖……………………………………………..47
圖3-7 車削阻力量測示意圖………………………………………..…48
圖3-8 刀腹磨耗量測示意圖………………………………………….48
圖4-1 第一階段鍍膜膜厚與GDS分析各鍍膜鈦含量關係圖……….49
圖4-2 第一階段鍍膜SEM橫斷面剖面圖………………………..….49
圖4-3 第一階段鍍膜硬度比較圖…………………………………..…50
圖4-4 第一階段SRV試驗中碳鋼圓柱100N線乾磨比較圖………..50
圖4-5 第一階段SRV試驗中碳鋼圓柱100N線乾磨磨痕圖………..51
圖4-6 第一階段SRV試驗磷青銅100N線乾磨比較圖……………..52
圖4-7第一階段SRV試驗磷青銅100N線乾磨磨痕圖………………52
圖4-8第一階段SRV試驗磷青銅100N線乾磨磨Mapping圖…….…53
圖4-9 第一階段SRV試驗鉻鋼球10N點乾磨比較圖………………54
圖4-10 第一階段SRV試驗鉻鋼球10N點乾磨磨痕圖………………54
圖4-11 第二階段鍍膜鈦金屬含量與膜厚關係圖…………………....55
圖4-12 第二階段鍍膜D peak、G peak 強度和I(d)/I(g)比值圖……55
圖4-13 第二階段鍍膜鈦金屬含量與硬度關係圖……………………56
圖4-14 第二階段刮痕試驗刮痕終點橫截面比較圖………...……….56
圖4-15 第二階段鍍膜熱處理前後硬度比較圖………………………57
圖4-16 SRV磨耗試驗中碳鋼圓柱10N磨耗深度與鈦含量關係圖…57
圖4-17 SRV試驗高速鋼底材中碳鋼圓柱10N磨痕圖…………….…58
圖4-18 SRV試驗高速鋼底材中碳鋼圓柱10N磨痕圖平均摩擦係數與磨耗壽命圖……………………………………………………………58
圖4-19 SRV試驗高速鋼底材中碳鋼圓柱10N磨痕圖平均摩擦係數與磨耗壽命圖……………………………………………………….….…59
圖4-20 SRV磨耗試驗中碳鋼圓柱100N磨耗深度與鈦含量關係圖..59
圖4-21 SRV試驗高速鋼底材中碳鋼圓柱100N磨痕圖……………...60
圖4-22 SRV試驗高速鋼底材中碳鋼圓柱100N平均摩擦係數與磨耗壽命圖…………………………………………………………………..60
圖4-23 SRV試驗高速鋼底材中碳鋼圓柱100N平均摩擦係數與磨耗壽命圖…………………………………………………………………..61
圖4-24 T1鍍膜經10分鐘SRV磨耗試驗後中碳鋼圓柱上轉移層與EDS分析圖……………………………………………………………..61
圖4-25 T2鍍膜經10分鐘SRV磨耗試驗後中碳鋼圓柱上轉移層與EDS分析圖………………………………………………………...…..62
圖4-26 乾車削試驗第一道次刀腹磨耗與切削力比較圖…………...62
圖4-27 乾車削試驗刀腹磨耗比較圖………………………………....63
圖4-28 T3鍍膜兩道次刀腹磨耗SEM圖…………………………….63
圖4-29 T5鍍膜第一道次刀頂面SEM圖…………………………….64
圖4-30 雙層印刷電路板微孔鑽削試驗刀腹磨耗比較圖…………....64
圖4-31 雙層印刷電路板微孔鑽削試驗刀角磨耗比較圖……………65
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