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研究生:張駿逸
研究生(外文):Chun Yi Chang
論文名稱:矽晶圓製程之積體天線設計
論文名稱(外文):Design of integrated antennas in silicon process
指導教授:林育德林育德引用關係
指導教授(外文):Yu De Lin
學位類別:碩士
校院名稱:國立交通大學
系所名稱:電信工程系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:29
中文關鍵詞:積體天線
外文關鍵詞:siliconintegrated antennas
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本篇論文使用使用質子佈植矽晶基板設計單極及倒F型天線,此方法可提高矽晶圓的電阻率到達10MΩ-cm,由實作量測結果可看出在頻率40GHz附近均可獲致良好的天線效果。本文另一部份使用金屬隔離矽晶圓基板設計槽型及貼片型天線,模擬結果顯示這兩種天線都可在此基板上獲得好的阻抗匹配及天線效率。

We design monopole and inverted-F antennas on proton-implanted silicon with 1MΩ-cm resistivity. From measured data, we can observe the good antenna quality around 40GHz. On the other part of this paper, we design the slot and patch antennas that are shielding by conductor from silicon substrate. Simulation results indicate that the two antennas have good matching impedances and antenna efficiency.

第一章 簡介
1.1 動機與目的
1.2 章節概述
第二章 基本原理與特性
2.1 天線基本原理
2.2 質子佈植矽晶圓天線之製程與基板特性
第三章 質子佈植矽晶圓法之天線設計
3.1 矽晶圓晶板結構
3.2 天線設計
3.3 量測結果與討論
第四章 金屬隔離矽晶圓法之天線模擬
4.1 矽晶圓基板結構
4.2 天線設計
4.3 模擬結果與討論
第五章 結論
參考文獻

[1] C. Liao, T. H. Huang, C. Y. Lee, D. Tang, S. M. Lan, T. L. Yang, and L. F. Lin, “Method of creating local semi-insulating regions on silicon wafers for device isolation and realization of high-Q inductors,” IEEE Electron Device Letter, vol. 19, pp. 416-462, Dec. 1998.
[2] G. E. Ponchak, A. Margomenos, Linda P. B. Katehi, “Low-loss CPW on low-resistivity Si substrates with a micromachined polyimide interface layer for RFIC interconnects”, IEEE Trans. Microwave Theory Tech., vol. 49, no. 5, pp. 866-870, May 2001.
[3] I. Toyoda, K. Nishikawa, T. Tokumitsu, K.Kamogawa, C.Yamaguchi, M. Hirano, and M. Aikawa, “Three-dimensional masterslice MMIC on Si substrate,” 1997 IEEE Radio Frequency Integrated Circuits Symposium, pp. 113-116, 1997.
[4] W. L. Stutzman and G. A. Thiele, Antenna Theory and Design, Wiley, Sec.2.3.
[5] C. Soras, M. Karaboikis, G. Tsachtsiris, and V. Makios, “Analysis and design of an inverted-F antenna printed on a PCMCIA card for the 2.4GHz ISM band,” IEEE Antennas and Propagation Magazine, vol. 44, pp. 37-44, Feb.2002.
[6] L. S. Lee, C. Liao, C. L. Lee, T. H. Huang, D. D. L. Tang, T. S. Duh, and T. T. Yang, ”Isolation on Si wafers by MeV proton bombardment for RF integrated circuits,” IEEE Transactions on Electron Devices, vol. 48, no. 5, pp. 928-934, May 2001.
[7] K. T. Chan, A. Chin, Y. B. Chen, Y. D. Lin, T. S. Duh, and W. J. Lin, “Integrated antennas on Si, proton-implanted Si and Si-on-quartz,” IEDM Tech. Dig., pp. 40.6.1-40.6.4, 2001.
[8] K. T. Chan, A. Chin, C. M. Kwei, D. T. Shien, and W. J. Lin, “Transmission line noise from standard and proton-implanted Si,” 2001 IEEE MTT-S Digest, vol. 2, pp. 763-766, 2001.
[9] Y. H. Wu, A. Chin, K. H. Shih, C. C. Wu, C. P. Liao, S. C. Pai, and C. C. Chi, ” Fabrication of very high resistivity Si with low loss and cross talk,” IEEE Electron Device Letters, vol. 21, no. 9, pp. 442-444, Sep. 2000.
[10] D. Budimir, “Effective design of filters for multipoint video distribution systems (MVDS),” 1999 4th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Services, vol. 1, pp. 62-63, 1999.
[11] K. Kim, H. Yoon, and K. K. O, “On-chip wireless interconnect with integrated antennas,” IEDM Tech. Dig., pp. 485-488, 2000.
[12] Z. Li and Y. R. Samii, “PBG, PMC and PEC ground planes: a case study of dipole antennas,” IEEE Antennas and Propagation Society International Symposium, vol. 2, pp. 674-677, 2000.
[13] W. L. Stutzman and G. A. Thiele, Antenna Theory and Design, Wiley, Sec.5.8.
[14] B. Stockbroecks and A. Vander Vorst, “Asymptotic Green’s function of a surface magnetic current element on a perfect electric conductor plane covered by a lossy dielectric substrate,” IEEE Transactions on Antennas and Propagation, vol. 47, no. 2, pp. 309-316, Feb. 1999.
[15] M. Qiu, M. Simcoe, and G. V. Eleftheriades, “Radiation efficiency of printed slot antennas backed by a ground reflector,” Antenna and Propagation Society International Symposium, vol. 3, pp. 1612-1615, 2000.
[16] 鍾順時, 微帶天線理論與應用, Sec. 1.5.
[17] C. H. Ho, L. Fan and K. Chang, “Experimental investigations of CPW-slotline transitions for uniplanar microwave integrated circuits,” 1993 IEEE MTT-S Digest, vol. 2, pp. 877-880, 1993.

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