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研究生:施志宏
研究生(外文):Zhi-Hong Shi
論文名稱:鍍膜溫度感測元對薄膜熱傳導的影響
論文名稱(外文):The Influence of Deposited Thermal Sensor on Heat Conduction in a Thin Film
指導教授:林振德林振德引用關係
指導教授(外文):Jenn-Der Lin
學位類別:碩士
校院名稱:國立交通大學
系所名稱:機械工程系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:61
中文關鍵詞:溫度感測元薄膜鍍膜熱傳導
外文關鍵詞:Thermal SensorThin FilmDepositedHeat Conduction
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本文針對溫度感測元對於量測薄膜熱傳導係數的影響進行理論的研究,研究內容主要包括兩部份,其一在聲子熱傳遞過程中考慮薄膜與溫度感測元間之界面(相當於加上一熱阻的效應)時,求出此時感測元的溫度分布及熱傳量進而算出此熱阻,其二為探討界面聲子傳熱熱阻對薄膜熱傳的影響。對於聲子熱傳遞過程中薄膜與溫度感測元間之熱阻,因為材料為介電材質,此時會藉由固體分子熱運動的形式,將聲子視為晶格彈性波的量子模態,我們採用Majumdar推導的聲子輻射傳遞方程式配合聲子在界面的反射與散射條件,然後利用輻射熱傳中P3近似法來計算聲子在薄膜與感測元結構內的熱傳遞現象以及薄膜與感測元間的溫度分布,進而求出熱阻,探討不同感測元的材質以及尺寸對量測結果的影響。

This paper purposes to theoretically investigate the microsensor effect on the measurement of thermal conductivity of dielectric thin films. The main focus is on two subjects. One is the calculation of thermal boundary resistance between thin film and the microsensor. The other is the effect of this resistance on the measurements of thermal conductivity of a thin film. Phonon interface scattering is considered, including specular scattering and reflection. The equation of phonon radiative transfer in association with the P3 approximation technique is used to simulate the heat transport and temperature distributions in the thin film/sensor system are obtained. After the temperature distribution is deduced, the thermal boundary resistance between thin film and sensor is readily obtained. The results of this resistance are introduced and both sensor material and sensor size effects on the measurement of thermal conductivity are discussed in details.

目錄
中文摘要 i
英文摘要 ii
目錄 iii
圖目錄 iv
符號說明 viii
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.3 研究目的 6
第二章 物理與數學模式 8
2.1 基本假設與物理模式 8
2.2 統御方程式及邊界條件 9
第三章 數值分析方法 12
第四章 結果與討論 17
4.1 熱邊界熱阻受到各種參數變化下的狀態 17
4.2 在實際元件中熱邊界熱阻受到各種參數變化的狀態 18
4.3 熱邊界熱阻在熱源及感測元厚度乘積固定時的狀態 21
4.4 熱邊界熱阻在不同感測元厚度時的狀態 21
4.5 評估感測元對感測元待測物之間溫差的影響 22
第五章 結論 24
參考文獻 25
表格 28
圖表 29

參考文獻
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