跳到主要內容

臺灣博碩士論文加值系統

(54.80.249.22) 您好!臺灣時間:2022/01/20 06:17
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

我願授權國圖
: 
twitterline
研究生:廖挺欣
研究生(外文):Tingsin Liao
論文名稱:面型微加工技術製作金屬微致動器
論文名稱(外文):Fabrication of Micro Actuators by Metal-Based Surface Micromachining
指導教授:徐文祥徐文祥引用關係
指導教授(外文):Wensyang Hsu
學位類別:碩士
校院名稱:國立交通大學
系所名稱:機械工程系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:英文
論文頁數:43
中文關鍵詞:面型微加工電鍍金屬致動器垂直梳狀致動器
外文關鍵詞:surface micromachiningelectroplatingmetalactuatorvertical comb drive
相關次數:
  • 被引用被引用:0
  • 點閱點閱:205
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
本研究的目的在於發展一種以金屬材料為基礎的表面微加工技術,此技術結合了微影、犧牲層和電鍍製程。並且利用此技術來實現兩種微型致動器,一為長行程之微致動器,另一為垂直梳狀致動器。
長行程微致動器(LSMD)只佔有小巧的尺寸,經由製作與測試後,在很小的輸入電壓下,即可提供很大的位移。此致動器是由平行配置的串連結構所構成,利用電熱方式驅動,且以鎳電鍍製程製作,尺寸約在2000 µm X 300 µm。實驗結果顯示,在3伏特輸入電壓下,最大位移可以達到202µm,相對的功率消耗約為300mW。動態量測顯示此致動器在110-120 Hz的操作頻率之前仍然可以保持它的最大位移,當頻率高至3.8-4k Hz時,則進入了直流操作模式(DC mode)。最後,此致動器在超過2 x 107次以上的操作後,並無發現任何損壞。
至於垂直梳狀致動器,它是藉由兩個相互交錯的梳狀結構以靜電原理驅動,一個固定在基板表面,另一個則由扭臂懸浮著。與傳統的平行電極板致動器相比,垂直梳狀致動器預期可擁有更大的位移。利用論文中所發展之表面微型加工技術製作此種致動器,不需任何的組裝程序。再者,經由電鍍製程,下固定電極與上懸浮電極之間的間距可輕易做出相同的厚度,因此可以避免對不準狀態。然而,於最後蝕刻起始層時,下梳狀電極遭受蝕刻液攻擊,故無法垂直站立於基板上。

Here, a metal-based surface micromachining technology is developed to realize two micro actuators, long-stretch micro drives and vertical comb drives, which includes lithography, sacrificial layer, and electroplating technique.
Long-stretch micro drives with compact size are fabricated and tested to provide large displacements at low input voltage. The micro drives are electro-thermally driven, and fabricated through Ni electroplating process. The fabricated LSMDs have connected cascaded structures in parallel arrangement. The typical dimension is about 2000 µm x 300 µm in area. Experimental data show that the maximum displacement can reach about 202 µm at 3 volts, and the corresponding power consumption is 300 mW. The dynamic measurement shows that the LSMD can maintain its maximum displacement until 110-120Hz, and reaches the DC mode with frequency up to 3.8-4k Hz. Finally, the LSMD is proven to operate over 2 x 107 times without damage.
The vertical comb drives is electrostatically driven by means of two interdigitated-comb structures, one fixed at the surface of the substrate, the other suspended by torsion beams. It is expected to have larger displacements than that of conventional parallel-plate actuators. Metal-based surface micromachining technology can fabricate VCDs without any assembly process. The gap thickness between upper and lower fingers can be simply made identical by electroplating. Thus the misalignment can be avoided. However, in final removal of seed layer, the lower fingers are attacked by acids, thus cannot stand over the substrate.

Chapter 1 Introduction 1
1.1 Motivation 1
1.2 Related Researches 2
1.2.1 Electroplating 2
1.2.2 Long-Stretch Micro Drive 4
1.2.3 Vertical Comb Drive 6
1.3 Current Approach 6
Chapter 2 Concept and Operation 9
2.1 Operation Principle of LSMD 9
2.2 Operation Principle of Vertical Comb Drive 11
Chapter 3 Fabrication of LSMD 15
3.1 Copper as Sacrificial Layer 15
3.2 Bulk Micromachining 18
3.3 Metal-based Surface Micromachining 20
Chapter 4 Characterization of LSMD 25
4.1 Experimental Setup 25
4.2 Measurement Data 26
Chapter 5 Vertical Comb Drive 32
5.1 Fabrication 32
5.2 Preliminary Results 37
Chapter 6 Conclusion 39
6.1 Summary 39
6.2 Future Work 40
References 41

Ahn, C. H., Kim, Y. J., and Allen, M. G., “A Planar Variable Reluctance Magnetic Micromotor with Fully Integrated Stator and Coils”, Proc. IEEE Conf. on Micro Electro Mechanical Systems 1993 (MEMS '93), An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, pp. 1-6, 1993.
Becker, E. W., Ehrfeld, W., Hagmann, P., Maner, A., and Munchmeyer, D., “Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)”, Microelectronic Engineering, vol. 4, pp. 35-36, 1986.
Capanu, M., Boyd IV, J. G., and Hesketh, P. J., “Design, Fabrication, and Testing of a Bistable Electromagnetically Actuated Microvalve”, J. Microelectromechanical Systems, vol. 9, no. 2, pp. 181-189, June 2000.
Cho, H. J. and Ahn, C. H., “A Novel Bi-directional Magnetic Microactuator Using Electroplated Permanent Magnet Arrays with Vertical Anisotropy”, Proc. IEEE The Thirteenth Annual International Conf on Micro Electro Mechanical Systems 2000 (MEMS 2000), pp. 686-691, 2000.
Cho, H. J. and Ahn, C. H., “A Bidirectional Magnetic Microactuator Using Electroplated Permanent Magnet Arrays”, J. Microelectromechanical Systems, vol. 11, no.1, pp. 78-84, Feb. 2002.
Chu, L. L., Hetrick, J. A., and Gianchandani, Y. B., “Compliant Microtransmissions for Rectilinear Electrothermal Actuators,” The 11th International Conf. on Solid-State Sensors and Actuators 2001 and Eurosensors XV (Transducers '01), Munich, Germany, June 10-14, 2001.
Comtois, J. and Bright, M., “Surface micromachined polysilicon thermal actuator arrays and applications,” Proc. IEEE Seventh Solid State Sensor and Actuator Workshop (Hilton Head ’96), Island, SC, pp. 174-7, June 1996.
Ehrfeld, W., Götz, F., Münchmeyer, D., and Schmidt, D., ”Microfabrication of Sensors and Actuators for Microrobots”, IEEE International Workshop on Intelligent Robots, pp. 3-7, 1988
Engelmann, G., Ehrmann, O., Simon, J., and Reichl, H., “Fabrication of High Depth-to-Width Aspect Ratio Microstructures”, Proc. IEEE Conf. on Micro Electro Mechanical System 1992 (MEMS ’92), An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot, Travemünde (Germany), pp. 93-98, Feb. 4-7, 1992.
Frazier, A. B. and Allen, M. G., “Metallic Microstructures Fabricated Using Photosensitive Polyimide Electroplating Molds”, J. Microelectromechanical Systems, vol. 2, no. 2, pp. 87-94, June 1993.
Guckel, H., Earles, T., Klein, J., Zook, D., and Ohnstein, T., “Electromagnetic Linear Actuators With Inductive Position Sensing For Micro Relay, Micro Valve And Precision Positioning Applications”, The 8th International Conf. on Solid-State Sensors and Actuators 1995 and Eurosensors IX (Transducers '95), Stockholm, Sweden, vol. 1, pp. 324-327, June 25-29, 1995.
Hirano, T., Fan, L.-S., and Gao, J. Q., “Invar MEMS Milliactuator for Hard Disk Drive Application”, Proc. IEEE Tenth Annual International Workshop on Micro Electro Mechanical Systems 1997 (MEMS '97), pp. 378-382, 1997.
Iizuka, T., Oba, T., and Fujita, H., “Electrostatic Micro Actuators with High-Aspect-Ratio Driving Gap for Hard Disk Drive Application”, Proc. 2000 International Symposium on Micromechatronics and Human Science (MHS 2000), pp. 229-236, 2000.
Ikuta, K. and Hirowatari, K., “Real Three Dimensional Micro Fabrication Using Stereo Lithograpy and Metal Molding”, Proc. IEEE Conf. on Micro Electro Mechanical Systems 1993 (MEMS '93), An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, pp. 42-47, 1993.
Jeong, H.-M., Choi, J.-J., Kim, K. Y., Lee, K. B., Jeon, J. U., and Park, Y. E. G., “Milli-Scale Mirror Actuator with Bulk Micromachined Vertical Comb”, Tranducers ‘99, Sendai, pp. 1006-1009, 1999.
Jonsmann, J., Sigmund, O., and Bouwstra, S., “Compliant Electro-Thermal Microactuators”, Proc. Twelfth IEEE International Conf. on Micro Electro Mechanical Systems 1999 (MEMS '99), pp. 588-593, 1999.
Jonsmann, J., Sigmund, O., and Bouwstra, S., “Compliant Thermal Microactuators”, Sensors and Actuators A, vol. 76, pp.463-469, 1999
Judy, J. W., Muller, R. S., and Zappe, H. H., “Magnetic microactuation of Polysilicon Flexure Structures”, J. Microelectromechanical Systems, vol. 4, no. 4, pp. 162-169, Dec. 1995.
Lee, J.-H., Ko, Y.-C., Kong, D.-H., Kim, J.-M., Lee, K.-B., and Jeon, D.-Y., “Design and Fabrication of Scanning Mirror for Laser Display”, Sensors and Actuators A, vol. 96, pp. 223-230, 2002.
Liakopoulos, T. M., Zhang, W., and Ahn, C. H., “Electroplated Thick CoNiMnP Permanent Magnet Arrays for Micromachined Magnetic Device Applications”, Proc. IEEE The Ninth Annual International Workshop on Micro Electro Mechanical Systems 1996 (MEMS '96), An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, pp. 79-84, 1996.
Liu, C. and Yi, Y. W., “Micromachined Magnetic Actuators Using Electroplated Permalloy”, IEEE Transactions on Magnetics, vol. 35, no. 3, pp. 1976-1985, May. 1999.
Massoud-Ansari, S., Mangat, P. S., Klein, J., Guckel, H., “A Multi-Level, LIGA-Like Process for Three Dimensional Actuators”, Proc. IEEE The Ninth Annual International Workshop on Micro Electro Mechanical Systems 1996 (MEMS '96), An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, pp. 285-289, 1996.
Miki, N. and Shimoyama, I., “A Micro-Flight Mechanism with Rotational Wings”, Proc. IEEE The Thirteenth Annual International Conf. on Micro Electro Mechanical Systems 2000 (MEMS 2000), pp.158-163, 2000.
Minami, K., Kawamura, S., and Esashi, M., “Fabrication of Distributed Electrostatic Micro Actuator (DEMA)”, J. Microeletromechanical Systems, vol. 2, no. 3, pp. 121-127, Sep. 1993.
Miyajima, H., Asaoka, N., Arima, M., Minamoto, Y., Murakami, K., Tokuda, K., and Matsumoto, K., “A Durable, Shock-Resistant Electromagnetic Optical Scanner with Polyimide-Based Hinges”, J. Microelectromechanical Systems, vol. 10, no. 3, pp. 418-424, Sep. 2001.
Nakamura, S., Suzuki, K., Fujita, H., Numazawa, T., and Takada, H., “A One-body MEMS Device Composed of Mutually Insulated Metallic Parts”, Proc. IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems 1998 (MEMS '98), pp. 278-283, 1998.
Park, J.-S., Chu, L. L., Siwapornsathain, E., Oliver, A. D., and Gianchandani, Y. B., “Long Throw and Rotary Output Electro-Thermal Actuators Based on Bent-Beam Suspensions”, Proc. IEEE The Thirteenth Annual International Conf. on Micro Electro Mechanical Systems 2000 (MEMS 2000), pp. 680-685, 2000.
Park, J.-S., Chu, L. L., Oliver, A. D., and Gianchandani, Y. B., “Bent-Beam Electrothermal Actuators―PartⅡ: Linear and Rotary Microengines”, J. Microelectromechanical Systems, vol. 10, no. 2, pp. 255-262, June 2001.
Park, J. Y., Kim, G. H., Chung, K. W., and Bu, J. U., “Electroplated RF MEMS Capacitive Switches”, Proc. IEEE The Thirteenth Annual International Conf. on Micro Electro Mechanical Systems 2000 (MEMS 2000), pp. 639-644, 2000.

QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
1. 甯自強(民82b):「建構式教學法」的教學觀─由根本建構主義的觀點來看。國教學報,5,33-41。
2. 劉威德(民82):法蘭德斯教師觀察系統理論與實際應用。高雄師範大學教育文粹,22,28-44。
3. 賴佳賢(民88):營造學習者為中心的合作學習環境。視聽教育雙月刊,41(1),20-29。
4. 楊龍立(民86):建構主義教學的檢討。教育資料與研究,18,1-6。
5. 蔡敏玲(民87):「內」、「外」之間與之外的模糊地帶:再思建構論之爭議。課程與教學季刊,1(3),81-96。
6. 楊巧玲(民89):問題導向教學與合作學習教學策略之理論與實際。課程與教學季刊,3(3),121-136。
7. 陳文霖(民80):溝通在教學上的應用。國教之友,43(2),23-28。
8. 郭至和(民89):合作學習教學法─在國小社會科及鄉土教學活動之運用。教育實習輔導季刊,6,(1),63-73。
9. 曾志華(民84):淺談社會建構論在數學教育上的應用。教師之友,36(5),45-49。
10. 陳淑敏(民83):Vygotsky的心理發展理論和教育。屏東師院學報,7,119-144。
11. 葉榮木、張素惠(民89):從學習的觀點探索現代教學科技與教學改革。教學科技與媒體,49,2-8。
12. 游家政(民87):建構主義取向課程設計的評析。課程與教學季刊,1(3),31-46。
13. 曾慧佳(民87):美國當代社會議題(師資培育、討論教學法、兩難困境等)探討:美國社會科教育學會第77屆年會實錄。國民教育,38(3),42-52。
14. 陳淑娟、劉祥通(民90):國小教師進行數學討論活動困難之探討。教育研究資訊,9,(2),125-146。
15. 連安青(民88):小學數學新課程之實施─一位小學教師的實作與反思。課程與教學季刊,2(1),35-48。