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研究生:周學良
論文名稱:結合光纖插孔、固態浸沒式透鏡與精密電鍍微孔之光學頭研究
論文名稱(外文):Development of optical head combined with micro aperture, solid immersion lens, and optical fiber socket
指導教授:徐文祥徐文祥引用關係
學位類別:碩士
校院名稱:國立交通大學
系所名稱:機械工程系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:英文
中文關鍵詞:近場光學固態浸沒式透鏡精密電鍍微孔熱回火
外文關鍵詞:near-field opticssolid immersion lenselectroplating aperturethermal reflow
相關次數:
  • 被引用被引用:1
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本論文之研究目的在探討整合性近場光學讀取頭之製程,將光纖插孔、固態浸沒式透鏡與次微米級微孔整合,改善光學讀取頭各元件間的整合製程,利用微影技術將各元件依序疊合加工,毋須個別製作再進行複雜且困難的結合步驟,大大簡化製作流程。
在製造方面,微孔是採用一種改進式的精密電鍍加工,利用電鍍增生原理解決蝕刻加工法之不可回復性,藉由金屬材料的電鍍補償使孔徑進一步的縮小,免於受到光學曝光系統線寬與蝕刻技術的限制。此外,利用熱回火原理使原始定義區之陡峭直立圓孔變形成角錐狀圓孔,然後將底下犧牲層作輕微的側向過蝕,則開孔自然成形,省略蝕刻加工時對時間與蝕刻液嚴格的控管程序,再以上述電鍍加工即可製得次微米級孔徑;微透鏡部分也是利用熱回火原理,將AZP 4620正光阻置於熱板昇溫至略高於其玻璃轉換溫度,此時表面能會趨向最小能量,接觸角因而改變,外形自然形成圓滑曲面,此法比一般蝕刻加工容易製得光滑表面。本論文提出之透鏡直徑範圍在50至110 微米;因熱回火時間增加使材料組成更為緻密,透鏡折射率範圍介於1.63至1.82。光纖插孔則用厚膜光阻SU-8製成,並可增加元件之結構強度。

The research describes the fabrication processes of an integrated optical pick-up head for near field recording that combines a tiny aperture, a smooth microlens, and a insertion socket for optical fiber.
Conventionally, micro apertures and microlenses in optical pick-up head are fabricated separately, and then are assembled together. Here a fabrication process without bonding to combine all the desired components on a single substrate is proposed. The cone-shape aperture is fabricated by reflow and an improved electroplating method. Then a thermal reflow process is used to form the smooth microlens made of AZP 4620 with the refractive index from 1.63 to 1.82. The diameter ranges from 50 μm to 110μm. After that, SU-8 support is fabricated to act as the insertion socket of the optical fiber and to enforce the device strength.

摘要 i
Abstract ii
Acknowledgment iii
Table of Contents iv
List of Figures vi
List of Tables viii
Chapter 1 Introduction 1
1.1 Motivation 1
1.2 Related Literatures 3
1.2.1 Microlens fabrication of SIL/SSIL 3
1.2.2 Scanning Near-field Optical Microscopy (SNOM) 5
1.2.3 Integrated Optical Pick-Up Head 10
1.3 Current approach 11
Chapter 2 Device Design 12
2.1 Basic concepts 12
2.2 The Designs of Individual Parts 14
2.2.1 The Optical Fiberlens 14
2.2.2 The Solid Immersion Lens 15
2.2.3 The Sub-wavelength Aperture 16
Chapter 3 Fabrication 18
3.1 Sub-Micrometer Aperture 18
Chemical formula 21
3.2 Solid Immersion Lens (SIL) 22
3.2.1 Basic Theory of Thermal Reflow 22
3.2.2 Fabrication of Solid Immersion Lens 23
3.3 Supporting 24
Chapter 4 Results and Discuss 26
4.1 L-EDIT Mask Pattern 26
4.2 Study of Thermal Reflow 27
4.2.1 Cone-Shape Aperture Mold 27
4.2.2 Microlens 31
4.3 Sub-micrometer Aperture 36
4.3.1 Aperture Mold 36
4.3.2 Sub-micrometer Aperture 37
4.4 Integration 39
Chapter 5 Conclusion 41
5.1 summary 41
5.2 Discussion 41
5.2.1 Microlens in SU 8 developer 41
5.2.2 Accuracy of Pattern Alignment 42
Reference 43

Fletcher, A.Daniel; Simanovskii,Dmitrii; Palanker,Daniel; Crozier, Kenneth B.; Quate, Calvin F.; Kino, Gorden S.; and Goodson, Kenneth E., “Microfabricated Solid immersion Lens with Metal Aperture.”IEEE, 2000, pp.133-134
Crozier, K.B.; Fletcher, D.A.; Kino, G.S.; Quate, C.F., Optical MEMS, 2000 EEE/LEOS International Conference on, 2000 pp. 131 —132
Issiki, F.; Ito, K.; Etoh, K.; and Hosaka, S., “1.5-Mbit/s direct readout of line-and-space patterns using a scanning near-field optical microscopy probe slider with air-bearing control,” Applied Physics Letters, Vol. 76, No. 7, 14 February 2000, pp.804-806.
Kato, Kenji; Ichihara, Usumu; Kasama, Nobuyuki; Oumi, Manabu; Niwa, Takashi; Mitsuoka, Yasuyuki; and Nakajima, Kunio; “Small-sized Near-Field Optical Head Structure With high throughput”
Kim, Sookyung; Park, Gunsoon; Oh, Hyeong-ryeol; Kim, Jin-Yong; and Kim, Jin-Hong, ”Near-Field Magneto-Optical Recording System using Micro Flying Optical Heads”, Optical Data Storage Topical Meeting 2001,Snata Fe, New Mexico April 2001 pp. 247-249
Lane, Trans; Hsu, Wensyang, “Fabrication of Sub-micron Optical Apertures by An Over-electroplating Method”, International Symposium on Optical Memory (ISOM) 2001, pp. 252-253
Lee, Choon-Sup; Han, Chul-Hi, Optical MEMS, 2000 IEEE/LEOS, pp 87 —88
Lin, 1999林盈熙, “奈米級之資料儲存技術,” 第二屆奈米工程既系統技術研討會, pp.2-31~2-39
Matsumoto, Takuya; and Ohtsu, Motoichi, “Fabrication of a fiber probe with a nanometric protrusion for near-field optical microscopy by a novel technique of three-dimensional nanophotolithography,” Journal of Lightwave Technology, Vol.14, No.10, October 1996, pp. 2224-2230.
Minh, PHAN Ngoc; Ono, Takahito; and ESASHI, Masayoshi, “A novel fabrication method of the tiny aperture tip on silicon cantilever for near field scanning optical microscopy,” Micro Electro Mechanical Systems, 1999. Twelfth IEEE International Conference on 1999, pp. 360-365.
Mizuno, Takeshi; Hitosugi, Taro; Kojima, Naoto; and Watanabe, Kenjiro, “An Optical Flying Head for a Near-Field Recording System”, Optical Data Storage Topical Meeting 2001,Snata Fe, New Mexico April 2001 pp. 268-270
Pilevar, Saeed; Edinger, Klaus; Atia, Walid; Smolynianov, Igor; Davis, Christopher, “Near-field scanning optical microscopy probe fabrication using focused ion beam milling technique,” Lasers and Electro-Optics, 1999. CLEO '99 Summaries of Papers Presented at the Conference on, 1999, pp.68-69.
Tien, Chung-Hao; Lai,Yin-Chieh; D.Milster, Tom; and D.Shieh, Han-Ping, “Design and Fabrication of Fiberlenses for Optical Recording Application”, International Symposium on Optical Memory (ISOM) 2001,pp.230-231
Tsai, 1998 蔡定平, “近場光碟機最近的發展,” 科儀新知, Vol. 19, No. 4, February 1998, pp.28-37
Yee, Youngjoo; Bu, Jong Uk; Cho, Il Joo; Yoon, Euisik; Moon, Su-Dong; Shinill Kang, Optical MEMS, 2000 IEEE/LEOS, 2000, pp. 91 -92

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