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研究生:蘭舜煒
研究生(外文):Lan Shun-wei
論文名稱:某半導體廠周界異味來源及控制研究
論文名稱(外文):A Study of the Sources and Control of the Odor of a Semiconductor Factory
指導教授:蔡春進蔡春進引用關係
學位類別:碩士
校院名稱:國立交通大學
系所名稱:環境工程所
學門:工程學門
學類:環境工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:115
中文關鍵詞:洗滌塔無機酸鹼異味
外文關鍵詞:packed tower scrubberacidodor
相關次數:
  • 被引用被引用:8
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  • 收藏至我的研究室書目清單書目收藏:2
本研究探討某半導體有限公司周界異味來源。本研究利用多孔金屬固氣分離器進行該半導體廠區周界與洗滌塔進、出口端無機酸鹼氣體及微粒的採樣,並進行化學分析以探討周界的異味來源,並評估洗滌塔的處理效率及提出降低異味的可行性改善方法。研究結果顯示A廠房周界空氣中酸鹼氣體以HF及NH3為主,酸鹼微粒則以F-、NO3-及SO42-為主。A廠房周界中總 F-濃度有高於本國“固定污染源空氣污染物排放標準”中周界濃度標準的情形。此外,A廠房周界中酸鹼微粒濃度明顯高於B廠房。因此,推測異味為A廠房中洗滌塔所排放。所以本研究進一歩針對A廠房中酸排洗滌塔及周界進行持續性的監測,以了解洗滌塔進、出口端廢氣的酸鹼氣體及微粒組成與濃度,並與周界中酸鹼氣體及微粒濃度做比較,探討異味主要為何種物種所造成。A廠房酸排洗滌塔進口端酸性氣體以 HF、HCl及HNO3為主,洗滌塔出口端酸性氣體以HF為主,平均排放濃度為276.59 ppb。此外,由採樣分析結果可知,A廠房酸排洗滌塔出口端酸鹼微粒濃度明顯高於進口端的濃度,洗滌塔出口端酸鹼微粒主要為F-、Cl-、NO3-及SO42-,其中以NO3-的排放濃度最高,其平均排放濃度為1352.22 µg/Nm3。洗滌塔循環水的分析結果中也是以F-、Cl-、NO3-及SO42-為主,其中NO3-的濃度甚至有高達2665.29 ppm的情形出現。在洗滌塔出口端的採樣的過程中曾發現水氣在採樣管中有累積的情形,顯示有洗滌水液滴被氣流被帶出的情形。比較A廠房周界、酸排P002洗滌塔進、出口端廢氣及洗滌水中酸鹼物種組成與濃度,可推測A廠房周界異味主要為高濃度的酸性液滴經由酸排放口逸散到廠房周界所造成。
The purpose of the study is to find out the source of the odor in ambient air around some semiconductor factory. Porous metal denuders were used to sample the acid and base gas and aerosol at the inlet and outlet of the acid gas packed tower scrubber to find the composition of waste gas and to assess the treatment efficiency of the scrubber. We used porous metal denuders to sample the ambient air around the factory and found the composition of the ambient air. It shows that HF, NH3, F-, NO3- and SO42- are the main acid and base gas and aerosol species in ambient air around A-building in the factory. The total concentration of F- is higher than standard concentration from the “Emission Standard of Fixed Air Pollutant Source.” Besides, the acid and base gas and particle concentrations in ambient air of A-building is higher than those of B-building. So we presumed that the source of the odor is from the stacks in A-building and proceeded continuous monitors in A-building to realize the composition and concentration in ambient air around A-building and at the inlet and outlet of the scrubber in A-building. We compared the composition of the ambient air and the waste gas at the inlet and outlet of the scrubber to find the source of the odor. The study shows that the main acid gas at the inlet of the scrubber is HF, HCl and HNO3 and the main acid gas at the outlet is HF whose average emission concentration is 276.59 ppb. Besides, it also shows that he main acid particle at the outlet of the scrubber is F-, Cl-, NO3- and SO42- whose concentration is often higher than that at the inlet of the scrubbers. The average emission concentration of NO3- is 1352.22 µg/Nm3. It was found that F-, Cl-, NO3- and SO42- are the main anion in the circulating water of the scrubbers and the concentraion of NO3- is even high to 2665.29 ppm. In sampling process at the outlet of the scrubber, we found that water vapor is accumulated in the sampling tube. According to those mentioned above, we can infer the source of the odor is acid liquid particle which was emitted with gas flow from the stack.
第一章 前 言 1
1.1 計畫背景 1
1.2 研究目的… … ……………………………………………….2
第二章 文獻回顧 3
2.1採樣分析方法 …………………………………………………3
2.2填充式洗滌塔相關 … …………………………………………4
第三章 研究方法 11
3.1 採樣地點介紹 11
3.2 研究項目 11
3.3 無機酸鹼氣體及微粒化學成分採樣方法 11
3.3.1 採樣準備工作 12
3.3.2 採樣步驟 14
3.3.3 萃取步驟 14
3.3.4 樣品的分析 14
3.3.5 分析程序的品保品管 14
3.4.1 採樣準備工作 16
3.4 二氧化矽(SiO2)微粒採樣及分析方法 ……………………16
3.4.2 採樣步驟………………………………...………………17
3.4.3 樣品脫附 18
3.4.4分析之品保/品管……………………………………… ..18
第四章 結果討論 19
4.1 臭味來源 19
4.2 洗滌塔處理概況及建議改善方法 20
4.3 洗滌塔效率的預測…………………………………………….21
第五章 結論 24
第六章 參考文獻 26
1. Ferm, M.;“A Na2CO3 coated denuder and filter for Determination of 23 Gaseous HNO3 and Particulate NO3- in the Atmosphere ”, Atmo. Environ., 20, 1193-1211,1986.
2. Koutrakis, P., Sioutas, C., Ferguson, S. T., Wolfson, J. M., Mulk, J. D., and Burton, R. M.;“Development and Evaluation of a Glass Honeycmob Denuder/Filter Pack System to Collect Atmospheric Gases and Particles ”, Environ. Sci. Technol., 27, 2497-2501.
3. Sioutas, C., P. K. Wang, S. T. Ferguson and P. Koutrakis; “Laboratory and field evaluation of an improved glass honeycomb denuder/filter pak sampler ”, Atmos. Environ., 30, 885-895.
4. Tsai, C. J., C. H. Huang, S. H. Wang, and T. S. Shin; “Design and tssting of a personal porous-metal denuder ”, Aerosol Sci. Technol., 2000.
5. McGraw-Hill; “Perry''s chemical engineers'' handbook”, 6th ed; New York, 1984;Section 14.
6. Clayton P. Kerr; “A Method for Prediciting the Performance of Packed Columns Operating with a Reactive Scrubbering Liquid that Control Gaseous Air Pollutants”, Air & Waste Mange. Assoc., 52, 396-399.
7. Simon Piche, Ion Iliuta, Bernard P. A. Grandjean, Faical Larachi; “A unified approach to the hydraulics and mass transfer in the randomly packed towers”, Chemical Engineering Science, 56, 6003-6013, 2001.
8. E. L. Cussler; “Diffusion:mass transfer in fluid system”, 2th ed.
9. Shulman et al, Am. Inst. Chem. Eng. J., 1, 253, 1951.
10. Onda et al, Am. Inst. Chem. Eng. J., 5, 235, 1959.
11. John H. Seinfeld, Spyros N. Pandis; “Atmospheric chemistry and physics”, 1998.
12. Clair N. Sawyer, Perry L. McCarty, Gene F. Parkin; “Chemistry for environmental engineering”, 4th ed.
13. Weast, Robert C. ed.; “ CRC handbook of chemistry and physics”, 1987.
14. John A. Dean; “Lange''s handbook of chemistr”, 14th ed., 1992.
15. 張俊彥編; “積體電路製程及設備技術手冊”, 初版, 台北, 中華民國產業科技發展協會, 89-99, 1997。
16. 新竹市環保局;“新竹科學園區空氣品質管理及污染源稽查管制計畫”, 1999.
17. 行政院環境保護署,固定污染源空氣污染物排放標準,1999。
18. 行政院環境保護署,半導體製造業空氣污染物管制及排放標準,1999。
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