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研究生:徐舜熙
研究生(外文):Hsu Shun Hsi
論文名稱:以微機電實現之濾波器的基礎觀念,分析實現與應用
論文名稱(外文):Fundamental Concepts , Analysis, and Implementation of MEMS Based Band-pass Filter
指導教授:邱俊誠邱俊誠引用關係
指導教授(外文):Jin Chern Chiou
學位類別:碩士
校院名稱:國立交通大學
系所名稱:電機與控制工程系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:96
中文關鍵詞:微機電濾波器頻率預測法
外文關鍵詞:MEMS filterFrequency prediction method
相關次數:
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本文中探討以微機械製作技術之微機電濾波器的基礎觀念、分析實現與應用。微機電結構的基本特性大都是以有限元素法模擬而得,但是當結構的複雜度增加時,此種研究與分析的方法會需要較多的計算時間與運算資源。本文引入結構動力學理論來分析與探討微機電濾波器的特性,從中並提出一種可以快速預測結構共振頻率的方法。本文中利用等效機械與電路模型來描述微機電濾波器,並利用這兩個等效的模型來研究與討論系統的頻率響應。利用等效模型的方法來研究頻率響應遠比有限元素法中所用的模態測試來的有效率與節省時間。本文中亦對以MUMPs製程實現之微機電濾波器原型進行量測並與模擬結果作比較,相關的細節在本文中有詳細的說明與討論。
Fundamental concepts, analysis and implementations of MEMS based band-pass filter are presented and discussed in this dissertation. Fundamental characteristics of MEMS structures can be obtained via existing finite element simulation software, however computing time and requirements of computing resources grow significantly when the geometries of MEMS devices become complex and tidious. Theories obtained in structure dynamics are used to observe the behaviors of MEMS filter. Assumed mode method is used to predict natural frequencies of MEMS structures that is presented in this dissertation. Equivalent mechanical and circuit model are used to describe the MEMS filter, frequency response of MEMS filter can be obtained with the aids of these two equivalent models. Note that, the proposed design methodology is more efficient than the Harmonic Analysis in finite element methods. Measurements of prototype MEMS filter fabricated by MUMPs process are used to compare with simulated frequency responses.
目 錄
中文摘要……………………………………………………………….…i
英文摘要………………………………………………………………....ii
目錄……………………………………………………………………...iii
圖目錄…………………………………………………………………...vi
表目錄…………………………………………………………………...xi
第一章 緒論 ………………………………………………………..1
1.1 發展背景與研究近況………………………………………1
1.2 研究動機與目的……………………………………………2
1.3 論文架構……………………………………………………3
第二章 製程及設計規範……………………………………………4
2.1 三層多晶矽製程介紹………………………………………4
2.2 設計規範…………………………………………………..12
2.3 設計流程…………………………………………………..14
2.4 製作流程…………………………………………………..15
2.5 總結………………………………………………………..20
第三章 微機電濾波器的結構設計………………………………..21
3.1 微機電濾波器的基礎觀念………………………………..21
3.2 應用結構動力學理論於微機電濾波器…………………..24
3.3 使用一個自由度的一階系統探討微機電濾波器的
結構特性…………………………………………………..27
3.3.1 微機電濾波器對稱型振動的探討…………………...28
3.3.2 微機電濾波器反對稱型振動的探討………………...31
3.3.3 結果與討論…………………………………………...35
3.4 使用兩個自由度的二階系統探討微機電濾波器的
結構特性…………………………………………………..35
3.5 使用連續系統模型探討微機電濾波器的結構特性……..40
3.6 微機電濾波器的第二共振態頻率預測…………………..44
3.7 結論………………………………………………………..46
第四章 微機電濾波器的頻率響應………………………………..47
4.1 使用等效機械模型研究微機電濾波器的頻率響應……..47
4.1.1 微機電濾波器的一階共振態頻率響應……………...48
4.1.2 微機電濾波器的二階共振態頻率響應……………...56
4.1.3 結論…………………………………………………...58
4.2 使用等效RLC電路模型研究微機電濾波器的頻率
響應………………………………………………………..59
4.2.1 使用平行對等關係來描述濾波器共振樑…………...59
4.2.2 使用串聯對等關係來描述濾波器共振樑………...…61
4.2.3 使用串聯對等關係來描述微機電濾波器…………...63
4.2.4 結果與討論…………………………………………...65
4.3 結論………………………………………………………..65
第五章 微機電濾波器的量測與討論……………………………..67
5.1 微機電濾波器的量測結構與量測結果…………………..67
5.2 量測結果與模擬結果差異性的探討……………………..71
5.3 微機電濾波器系統的後續探討…………………………..76
5.3.1 非晶片化放大電路…………………………………...76
5.3.2 晶片化放大電路……………………………………...81
5.4 結論………………………………………………………..85
第六章 結論………………………………………………………..86
6.1 研究結果整理……………………………………………..86
6.2 未來展望與應用…………………………………………..88
參考文獻………………………………………………………………..89
附錄一…………………………………………………………………..92
附錄二…………………………………………………………………..96
參考文獻
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