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研究生:郭家豪
研究生(外文):Jia-Hao Kuo
論文名稱:利用脈衝雷射濺鍍之氧化鋅薄膜的製備與光學特性研究
論文名稱(外文):The Study of Preparation and Optical Properties on ZnO Thin Films by Pulsed Laser deposition
指導教授:謝文峰謝文峰引用關係
指導教授(外文):Wen-Feng Hsieh
學位類別:碩士
校院名稱:國立交通大學
系所名稱:光電工程所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:75
中文關鍵詞:脈衝雷射濺鍍拉曼散射螢光光譜氧化鋅原子力顯微鏡奈米管激子X光繞射
外文關鍵詞:pulsed laser depositionRaman scatteringPhotoluminescence spectraZnOAFMnanorodexcitonXRD
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摘要
我們成功的利用氟化氪准分子脈衝雷射濺鍍在氧化鋁(Al2O3)晶片(0001)上成長出高指向性(002)面的氧化鋅薄膜,且在最佳的成長條件下有最小半高寬值為0.22度。在原子力顯微鏡的分析中,幾乎所有的氧化鋅薄膜都有良好的表面粗慥度。在低溫下的螢光光譜量測中,被中性施主束縛住的激子輻射強度大於其它的光譜;並且當環境溫度增加時,自由激子的輻射強度會漸漸的增加,最後在室溫下其強度為最強;激子和聲子產生交互作用下對激子半高寬變寬產生影響,其內容也被我們所討論。在拉曼散射光譜量測中,我們可以知道在氧化鋅薄膜結構中有過量的鋅原子存在;且分析結果也證明了螢光光譜量測中縱向性光學聲子複製。從室溫穿透光譜量測中,在最佳濺鍍條件下的氧化鋅薄膜的能隙值和氧化鋅靶材的值相似;且氧化鋅薄膜在氧壓一托耳的環境下有最好的薄膜品質,所得到的結果和之前X光繞射分析的結果相同,更能加以印證。最後,我們使用氧化鋅薄膜為模版,用氣-固機制的方式成功的長出六角形的奈米管。

Abstract
We have successfully fabricated highly oriented (002) ZnO film which has a minimum FWHM of 0.22o in the optimum conditions on c-cut sapphire (0001) by pulsed laser deposition using KrF-excimer laser with a wavelength of 248 nm. Almost all of the films showed low surface roughness from AFM measurement. At low temperature PL, the neutral-donor bound exciton emission dominates the spectra, while with increasing temperature, free exciton emissions grow rapidly and finally become the dominant lines. The contribution of the exciton-phonon interaction to the exciton linewidth was studied. The Raman spectra indicated that the presence of excess zinc in the c-oriented ZnO structure and demonstrated LO-phonon replica in the PL spectra. From the transmittance measurement, the bandgap value of the as-deposited ZnO film for the optimum condition was similar to that of 3.37 eV for the ZnO bulk. The ZnO films have the best quality at oxygen pressure of 1 Torr consistent with result of XRD without quantum size effect. Finally, We successfully use of ZnO thin films as a template substrate to grow the hexagonal nanorods of ZnO with a vapor-solid mechanism.

Contents
Abstract (in Chinese)……………………………………………… i
Abstract (in English)………………………………………………. ii
Acknowledgements………………………………………………... iv
Contents……………………………………………………………. v
List of Tables………………………………………………………. viii
List of Figures…………………………………………………….... ix
Chapter 1 Introduction….…….….….…..……..…………..…… 1
1.1 A brief review………………………………………………... 1
1.2 Motivation……………………………….…………………… 1
1.3 Organization of the thesis…………………………………… 4
Chapter 2 Theoretical background……………………………. 7
2.1 Principle of Pulsed Laser Deposition ………………………… 7
2.2 X-ray diffraction ……………..………………………………. 8
2.3 Photoluminescence Characterization………………………… 11
2.4 Raman Characterization……………………………………… 15
Chapter 3 Experimental details…………………………………. 18
3.1 Sample preparations………………………………………….... 18
3.1.1 Target preparation……………………………………… 18
3.1.2 Thin film growth……………………………..……..….. 18
3.2 Determination of Structures, Synthesis and Topology in Films…. 20
3.2.1 X-ray diffraction……………………………………….. 20
3.2.2 Atomic Force Microscopy………………………….….. 20
3.3 Measurements of optical properties …………………………… 21
3.3.1 Raman detection system……………………………….. 21
3.3.2 Photoluminescence detection system……...………..…. 22
3.3.3 Transmittance………………………………………….. 23
3.4 Scanning Electron Microscope system..…………………………. 23
Chapter 4 Results and Discussion……………………………….. 24
4.1 Results of the X-ray diffraction measurement…………………. 24
4.1.1 Growth temperature and other parameter dependent crystallinity of the ZnO films………………….………. 24
4.1.2 Oxygen pressures dependence of crystallinity of ZnO thin film..…………………………………………………… 25
4.1.3 Optimal conditions for growing textured ZnO films….. 26
4.2 Results of AFM………………………………………………... 27
4.2.1 The AFM 2-D and 3-D images for ZnO with different oxygen pressures………………...…………………….. 27
4.3 photoluminescence spectra of ZnO films……………………… 29
4.3.1 photolumimescence spectra of as-grown films………... 29
4.3.2 photoluminescence result of annealed ZnO films..……. 32
4.4 Analysis of the Raman spectra………………………………… 34
4.5 Optical transmittance spectra of textured ZnO thin films……. 34
4.6 The growth of nanorods on sapphire with ZnO buffer layers… 35
Chapter 5 Conclusions and Perspectives………………………... 37
5.1 Conclusions…...……………………………………………….. 37
5.2 Perspectives…………………………..………………………... 38
Reference……………………………………………………….…… 39

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