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研究生:林育正
研究生(外文):LIN YU-CHENG
論文名稱:濾波繞射元件的製作及量測
論文名稱(外文):Fabrication and Measurement of Diffractive Elements for Filtering
指導教授:陸 懋 宏
指導教授(外文):Mao-Hong Lu
學位類別:碩士
校院名稱:國立交通大學
系所名稱:光電工程所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
中文關鍵詞:繞射光學元件濾波繞射元件
外文關鍵詞:diffractive optical elementDiffractive Elements for Filtering
相關次數:
  • 被引用被引用:1
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本論文是以繞射理論為基礎,利用繞射光學元件本身之特殊色散效果來設計濾波繞射元件,使其能達到窄波段濾波與聚焦的功能,以矽做為基片,並以最佳化演算法進行純相位光學繞射元件的設計。
把所設計的元件,分為八階量化,使其可以利用半導體製程技術,去製作濾波繞射元件,並利用ZYGO去檢視其製作品質。
最後把量測所需要利用到的各種不同光源,以實驗室現有的YAG脈衝雷射利用OPO系統,形成不同近紅外波長光源,利用此光源建立的光學系統量測其繞射效率,把光源換作ASE(1520nm~1570nm)以紅外CCD來分析其光學性質。
In this thesis, based on diffraction theory we developed a diffractive optical element (DOE), which combines the functions of a narrow-band filter and a focal lens. This DOE was made on the silicon substrate, which transmits and focuses the light on the axial point with the wavelength bandwidth of 6 nm, centered at the 1.533μm wavelength. This pure phase type diffractive optical element was designed and optimized with an iterative method.
In order to fabricate this DOE with the VLSI semiconductor technique, the surface structure of DOE was quantized by eight levels. The surface profile was measured by ZYGO.
The filtering efficiency and the optical properties of the DOE were measured by two systems. One used optical parameter oscillator (OPO), pumped by a YAG pulsed laser, as near infrared light source (1.2μm-1.8μm), and an energy meter as detector. Another used an ASE (1.52μm-1.57μm) light source and a near infrared CCD camera to analyze the optical properties of the DOE.
目   錄
中文摘要﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒ i
英文摘要﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒.﹒﹒﹒﹒ ii
誌  謝﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒ iii
目  錄﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒  iv
圖 目 錄﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒  vi
表 目 錄﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒﹒ viii
第一章 緒 論 ………………………………………………………1
1.1 引言…………………………………………………………1
1.2 繞射光學元件的發展與特性………………………………1
1.3 關於本論文…………………………………………………4
第二章 基本理論與模擬分析………………………………………5
2.1 基本理論……………………………………………………5
2.1.1 繞射元件的設計與分析………………………………5
2.1.2 純量繞射理論…………………………………………6
2.2 相位恢復演算法原理………………………………………10
2.3 多波長入射時的設計架構…………………………………13
2.4 光學傳播函數………………………………………………19
2.5 繞射效率的探討……………………………………………20
2.6 Si 的折射率分析…………………………………………21
第三章 濾波繞射元件之設計………………………………………23
3.1 設計架構……………………………………………………23
3.2 模擬結果……………………………………………………24
3.2.1 雙波長迭代……………………………………………24
3.2.2 模擬結果………………………………………………25
3.2.3 穩定性分析……………………………………………26
3.2.4 窄帶寬元件模擬結果…………………………………30
3.3 製程元件量化分階結果……………………………………31
第四章 繞射元件的製作……………………………………………34
4.1 引言…………………………………………………………34
4.2 相位分階量化………………………………………………35
4.3 製程光罩的設計……………………………………………40
4.3.1 光罩的設計……………………………………………40
4.3.2 對準鍵的設計…………………………………………42
4.4 元件製作流程………………………………………………45
第五章 元件量測系統………………………………………………50
5.1 量測表面系統………………………………………………50
5.2 量測元件功能系統…………………………………………52
5.3 材料穿透率的量測系統……………………………………57
5.3.1 紫外光/可見光、近紅外分光光譜儀………………57
5.3.2 材料穿透率……………………………………………58
第六章 元件量測結果分析…………………………………………60
6.1 元件表面輪廓的量測………………………………………60
6.2 光學元件特性量測…………………………………………65
第七章 結論…………………………………………………………70
7.1 濾波片的濾波效果…………………………………………70
7.2 結論與展望…………………………………………………73
Reference ……………………………………………………………74
Reference
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