矽晶圓廠長晶製程長期因原物料品質不穩，造成生產排程更換頻繁，以致於增加生產與存貨管理的不確定性，進而成本不斷提高，客訴抱怨也居高不下。近十幾年來陸續有學者提出品質最佳化的方法，然而實際應用於高科技產業且成功的例子並不多見，且大部份牽涉到複雜的數學模式，本研究應用田口式品質工程的方法，建構出一個適用於長晶製程且簡單實用的品質最佳化方法，同時找出最穩健的製程參數組合，可以提升工程人員對工程知識的了解。另外，本研究成果有助於訂定製程最適條件的原物料規格與基準，並能藉此水平展開全面提昇矽晶圓品質。

The quality of the stock in crystal-growth fabrication plants is unstable, which causes the frequent alteration of the manufacturing process that leads to uncertain production and inventory management. Such problems increase cost and result in continual customer complaint. Researchers have proposed qualitative optimization approach in recent years without having realized significant instances of feasibility in high-tech industries. And many such proposals involve sophisticated mathematic formulae. This study adopts the Taguchi Methods, which sets up a practical, simple way to optimize in the crystal-growth manufacturing process and at the same time finds the most consistent parameter combination for fabrication; and hence upgrades the understanding of engineering know-how by the engineers. In addition, the findings of this study is instrumental to the determination of the most appropriate stock specs and criteria for fabrication, the standard of which may also enhance the wafer quality overall.

目 錄
頁 次
中文摘要…………………………………………….…………………..i
英文摘要……………………………………………….………………..ii
誌謝……………………………………………………………………..iii
目錄………………………..……………………………………………iv
圖目錄………………………………….………………………………..v
表目錄……………………………………..……………………………vi
第一章 緒論
1.1 研究動機與目的……………………………………………….1
1.2 研究方法……………………………………………………….1
1.3 論文架構……………………………………………………….2
第二章 田口方法簡介與相關文獻探討
2.1 品質工程……………………………………………………….3
2.2 田口方法……………………………………………………….4
2.2.1品質損失理念…………………………….………………6
2.2.2品質特性….………………………………………………7
2.2.3影響製程或產品績效的因子………….…………………8
2.2.4設計方法…………………………………………………10
2.2.5實驗配置與驗證實驗……………………………………11
2.3 相關文獻探討………………………………..……………….13
第三章 研究方法…………….……………………………………….16
第四章 實例分析
4.1 長晶製程……………………………………………….……..21
4.2 問題描述…………………………………………….………..29
4.3 實驗規劃……………………………………………………...30
4.4 實驗進行………………………………………………….…..34
4.5 資料分析……………………………………….……………..34
4.6 確認實驗……………….……………………………………..39
第五章 結論…………………………….……………………………43
參考文獻………………………….……………………………………44

參考文獻
1. Ames, A.E., Mattucci, N., Macdonald, Szonyi, G. and Hawkins, D.M. (1997), “Quality loss functions for the optimization across multiple response surfaces”, Journal of Quality Technology, Vol.29, No.3, pp.339-46.
2. Artiles, N. (1996), “A pragmatic approach to multi-response problems using loss functioins”, Quality Engineering, Vol.9, No.2, pp.213-20.
3. Del Cstillo, E. and Montgomery, D. C. (1993), “A nonlinear programming solution to the dual Response Problem”, Journal of Quality Technology, Vol.25, No.3, pp.91-204.
4. Khuri, A.J. and Cornell, J.A. (1996), Response Surfaces, 2nd ed., Marcel Dekker, New York, NY.
5. Montgomery, D.C. (1995), Design and Analysis of Experiments, Wiley, New York, NY.
6. Myres, R.H. and Carter, W.H. (1973), “Response surface techniques for dual response systems”, Technometrics, Vol.15, pp.301-17.
7. Myres. R.H. and Montgomery, D.C. (1995), Response Surface Methodology: Process and Product Optimization Using Designed Experiments, Johy Wiley & Sons, New York.
8. Phadke, M.S. (1986), “Design optimization case studies”, AT&T Technical Joural, Vol.65, No.2, 1986, pp.51-84.
9. Phadke, M.S. (1989), Quality Engineering Using Robust Design, Prentice-Hall, Englewood Cliffs, NJ.
10. Phadke, M.S., Kackar, R.N., Speeney, D.V. and Grieco, M.J. (1983), “Off-line quality control integrated circuit fabrication using experimental design”, The Bell System Technical Journal Vol.62, No.5, pp.1273-309.
11. Tai, C.Y., Chen, T.S. and Wu, M.C. (1992), “An enhanced Taguchi method for optimizing SMT processes”, Journal of Electronics Manufacturing, Vol.2, pp.253-75.
12. Tong, L.T. and Su, C.T. (1997), “Optimizing multi-response problems in the Taguchi method by fuzzy multiple attribute decision making”, Quality and Reliability Engineering International, Vol.13, No.1, pp.25-34.
13. Vinning, C.G. and Myers, R.H. (1990), “Combing Taguchi and response surface philosophies: a dual response approach”, Journal of Quality Technology, Vol.22, No.1, pp.38-45.
14. Raghu, N.Kackar “Off-line Quality Control,Parameter Design,and the Taguchi Method”, Journal of Quality Technology, Vol.17, No.4,October 1985, p.182.
15. 王春和(1993)，「田口方法於線外品管多重品質特性製程最佳化之應用研究」，國立交通大學工業工程研究所碩士論文。
16. 詹曉苓(1999)，「田口方法於汽車空氣濾清器製程不良率之改善」，華梵大學工業管理研究所碩士論文。
17. 陳明德(1999)，「運用田口方法解決印刷電路板印刷膜剝落之產品不良率問題」，亞東技術學院工業工程與管理系副教授。
18. 蘇朝墩編，產品穩健設計，中華民國品質學會發行，1997年。
19. 林明獻編著，矽晶圓半導體材料技術，全華科技圖書股份有限公司發行，1999年。