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研究生:李沛宸
研究生(外文):Pei-chen Lee
論文名稱:1*2之大角度偏折波導分光器
論文名稱(外文):1*2 Y-branch waveguide power splitters with large angle bends
指導教授:朱安國
指導教授(外文):A. K. Chou
學位類別:碩士
校院名稱:國立中山大學
系所名稱:光電工程研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:52
中文關鍵詞:高分子平面光波導波導分光器
外文關鍵詞:polymerpower splittersburiedoptical waveguidePLC
相關次數:
  • 被引用被引用:10
  • 點閱點閱:165
  • 評分評分:
  • 下載下載:22
  • 收藏至我的研究室書目清單書目收藏:0
本論文首次做出利用埋藏式波導及micro-prism波導結構組成的Y-branch光學分光器。此132分光器結構組成包含:擴張光傳播的區域、傳統Y-branch分光區、以及含有兩個micro-prisms bends之大角度偏折波導。
在132分光器的製程上,首先必須利用PECVD於Si基板上成長一層約10μm厚的二氧化矽(SiO2),而元件的導光區域是在SiO2批覆層上蝕刻出槽溝,並且填入導光高分子材料(BCB polymer),最後在做完回蝕製程時,可更進一步在我們的元件上塗鋪薄薄的一層高分子材料(SOG),以便來平坦表面。在量測上,我們將針對1.3μm的波長作量測,量得波導的傳輸損耗0.47dB/cm;而量測得132分光器最小之功率傳輸效率為3.7dB。在論文中,也將討論利用BPM軟體所模擬結果。
A Y-branch optical power splitter based on the buried waveguide and the micro-prism waveguide bends is presented. The 132 splitter consists of a beam expanding region, a conventional Y-branch region, and two micro prisms providing large angle waveguide bends of device.
The 132 splitter are fabricated by first depositing a 10-μm-thick PECVD oxide (SiO2) on Si s ubstrates. The guiding core of the device was fabricated by etching trenches in SiO2 cladding, and filled with Benzocyclobutene (BCB) polymer. After etch-back process, the thin layer of spin on glass (SOG) is used to further planarized the surface of the device. The propagation loss of the waveguide is 0.47dB/cm at λ=1.3μm. The normalized power transmission efficiency of the 132 splitter as large as 3.7dB was obtained. Simulation results based on beam propagation method (BPM) of the splitter is also presented.
第一章簡介 1
第二章理論模擬與應用 6
2-1. 埋藏式高分子波導之結構分析 6
2-2. Micro-prism偏折結構之分析與討論 11
2-3. 應用偏折於132 Y-branch分光器之分析 17
第三章波導製作 23
3-1. 埋藏式高分子BCB波導之製程流程 23
3-2. 製程結果與討論 31
第四章波導量測結果與分析 35
4-1. 波導的量測 35
4-2. 量測結果 37
第五章結果與討論 4
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