臺灣博碩士論文加值系統

本論文首次做出利用埋藏式波導及micro-prism波導結構組成的Y-branch光學分光器。此132分光器結構組成包含：擴張光傳播的區域、傳統Y-branch分光區、以及含有兩個micro-prisms bends之大角度偏折波導。
在132分光器的製程上，首先必須利用PECVD於Si基板上成長一層約10μm厚的二氧化矽(SiO2)，而元件的導光區域是在SiO2批覆層上蝕刻出槽溝，並且填入導光高分子材料(BCB polymer)，最後在做完回蝕製程時，可更進一步在我們的元件上塗鋪薄薄的一層高分子材料(SOG)，以便來平坦表面。在量測上，我們將針對1.3μm的波長作量測，量得波導的傳輸損耗0.47dB/cm；而量測得132分光器最小之功率傳輸效率為3.7dB。在論文中，也將討論利用BPM軟體所模擬結果。

A Y-branch optical power splitter based on the buried waveguide and the micro-prism waveguide bends is presented. The 132 splitter consists of a beam expanding region, a conventional Y-branch region, and two micro prisms providing large angle waveguide bends of device.
The 132 splitter are fabricated by first depositing a 10-μm-thick PECVD oxide (SiO2) on Si s ubstrates. The guiding core of the device was fabricated by etching trenches in SiO2 cladding, and filled with Benzocyclobutene (BCB) polymer. After etch-back process, the thin layer of spin on glass (SOG) is used to further planarized the surface of the device. The propagation loss of the waveguide is 0.47dB/cm at λ=1.3μm. The normalized power transmission efficiency of the 132 splitter as large as 3.7dB was obtained. Simulation results based on beam propagation method (BPM) of the splitter is also presented.

第一章簡介 1
第二章理論模擬與應用 6
2-1. 埋藏式高分子波導之結構分析 6
2-2. Micro-prism偏折結構之分析與討論 11
2-3. 應用偏折於132 Y-branch分光器之分析 17
第三章波導製作 23
3-1. 埋藏式高分子BCB波導之製程流程 23
3-2. 製程結果與討論 31
第四章波導量測結果與分析 35
4-1. 波導的量測 35
4-2. 量測結果 37
第五章結果與討論 4

1.Casey F. Kane and Robert R. Krchnavek, “Benzocyclobutene Optical Waveguides,” IEEE Photonics Technology Letters, Vol.7, No.5, pp.535-537, 1995.
2.R.J. Shul, C.T. Sullivan and G.B. McClellan, “Anisotropic ECR Etching of Benzocyclobutene,” Electronics Letters, Vol.31, No.22, pp. 1919-1921, 1995.
3.S. Suzuki, T. kitoh, Y. Yamaha, Y. Hibino, K. Moriwaki and M. Yanagisawa, “Integrated Optic Y-branching Waveguides with An Asymmetric Branching Ratio,” Electronics Letters, Vol.32, No.8, pp.735-736, 1996.
4.A. Klekamp, P. Kersten, and W. Rehm, “An Improve Single-Mode Y-Branch Design for Cascaded 1:2 Splitters,” Journal of Lightwave Technology, Vol. 14, No. 12, pp.2684-2686, 1996.
5.Han-Bin Lin, Yih-Bin Lin, and Way-Seen Wang, “Analysis of Abrupt Waveguide Bend with Low-Index Microprism,” IEEE Journal of Quantum Electronics, Vol. 34, No. 12, pp.2291-2297, 1998.
6.Ruei-Chang Lu, Yu-Pin Liao, Han-Bin Lin, and Way-Seen Wang, “Design and Fabrication of Wide-Angle Abrupt Bends on Lithium Niobate,” IEEE Journal of Selected Topics in Quantum Electronics, Vol. 2, No. 2, pp.215-219, 1996.
7.Koichi Hirayama, and Masanori Koshiba, “A New Low-Loss Structure of Abrupt Bends in Dielectric Waveguides,” Journal of Lightwave Technology, Vol. 10, No. 5, pp.563-568, 1992.
8.Jawdat Y. Asous and Sahbudin Shaari, “New Design of Variable X-coupler Optical Waveguide Passive Device,” ICSE ’98 Proceeding, pp.204-206, 1998, Bangi, Malaysia.
9.H. TAKAHASHI, Y. OHMORI, M. KAWACHI, “Design and Fabrication of Silica-Based Integrated-Optic 13128 Power Splitter,” Electronics Letters, Vol. 27, No. 23, pp.2131-2133, 1991.
10.H.P. Chan, S.Y. Cheng and P.S. Chung, “Low Loss Wide-Angle Symmetric Y-Branch Waveguide,” Electronics Letters, Vol.32, No.7, pp.652-654, 1996.
11.M.N. Khan, B.I. Miller, E.C. Burrows and C.A. Burrus, “Integrated High-Speed 134 Digital Y-Branch Switch Array with Passive Taper Fanouts for Fiber Interconnection,” Electronics Letters, Vol. 35, No. 6, pp.484-485, 1999.
12.S.-H. JUNG, N.-C. KIM, “Novel Design of Wide-Angle Single Mode Symmetric Y-Junctions,” Electronics Letters, Vol. 24, No. 18, pp.1184-1185, 1998.
13.G. A. BOGERT, Y. C. CHEN, “Low-Loss Y-Branch Power Drivers,” Electronics Letters, Vol.25, No. 25, pp.1712-1714, 1989.
14.Fang-Yee Shen, Jian-Yang Lin, Jung-Chieh Su, “Design and simulation of Single-Mode Optical Power Splitters on Silicon Substrates,” Optics and Photonics Taiwan ’01 Proceeding Ⅰ, pp.502-504, 2001.
15.Yu-li Hsueh, Ming-chuan Yang, and Hung-chun Chang, “Three-Dimensional Noniterative Full- Vectorial Beam Propagation Method Based on the Alternating Direction Implicit Method,” Journal of Lightwave Technology, Vol. 17, No. 11, pp.2389-2397, 1999
16.Han-Bin Lin, Rei-Shin Cheng, and Way-Seen Wang, “Wide-Angle Low-Loss Single-Mode Symmetric Y-Junctions,” IEEE Photonics Technology Letters, Vol. 6, No. 7, pp.825-827, 1994.
17.許志宏，“建構在矽基板上之新型埋藏式複合高分子波導，” 國立中山大學光電工程研究所碩士論文，2001。
18.黃亦德，“應用佛列斯涅折射原理建構偏折之埋藏式高分子複合波導，” 國立中山大學光電工程研究所碩士論文，2001。
19.莊淑雯，“建構在玻璃上埋藏式高分子波導，” 國立中山大學光電工程研究所碩士論文，2000。