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研究生:張振福
研究生(外文):Jen-Fung Chang
論文名稱:微波化學氣相沉積及磁控濺鍍成長類鑽石之研究
論文名稱(外文):Combined magnetron sputtering and ECR-CVD deposition of diamond-like carbon films
指導教授:楊台發翁恆義
指導教授(外文):Tai-Fa YoungHerng-Yih Ueng
學位類別:博士
校院名稱:國立中山大學
系所名稱:電機工程學系研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:131
中文關鍵詞:類鑽碳膜微波化學氣相沉積磁控濺鍍
外文關鍵詞:Diamond-like CarbonSputteringECR-CVD
相關次數:
  • 被引用被引用:25
  • 點閱點閱:360
  • 評分評分:
  • 下載下載:75
  • 收藏至我的研究室書目清單書目收藏:1
封面
誌謝
中文提要
英文提要
總目錄
第一章 緒論
1-1 緒論
1-2鑽石及石墨的特性
1-3系統回顧
1-4 鑽石及類鑽石的成長方法
1-5 類鑽石的結構及成長機制
1-6濺鍍理論
1-7 磁控濺鍍
1-8微波電子迴旋共振化學氣相沉積法
第二章 材料分析之理論基礎
2-1拉曼光譜儀
2-2 鍍膜性質之檢測
第三章實驗設備與步驟
3-1實驗設備
3-2 實驗流程
3-3 樣品的準備
第四章結果與討論
4-1機械性質
4-2 成長機制
4-3實驗結果討論
第五章DLC膜的應用
5-1 DLC膜在機械方面的應
5-2 DLC膜在相變化材料方面的應用
第六章 結論
參考文獻
附圖目錄
附表目錄
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