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研究生:王郁文
研究生(外文):Yu-Wen Wang
論文名稱:具碰撞模式之雙馬達同步運動控制
論文名稱(外文):Synchronized Motion Control with Impact Model for Dual Motors
指導教授:程啟正程啟正引用關係
指導教授(外文):Chi-Cheng Cheng
學位類別:碩士
校院名稱:國立中山大學
系所名稱:機械與機電工程學系研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:110
中文關鍵詞:同步運動控制協同控制真空幫浦馬達控制
外文關鍵詞:Coordinated controlVacuum pumpSynchronized motion controlMotor control
相關次數:
  • 被引用被引用:3
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摘 要
在常見的製造產業領域中,均可查覺到許多場合需要作業動作之彼此協同配合或甚至同步,如空間軌跡加工,多機械手臂的同時作業、真空幫浦等,而其中的真空幫浦則是最值得注意的一個典型範例。真空幫浦為現今半導體製程中不可或缺的裝置設備,其幫浦功能乃藉由兩幫浦轉子的同步運轉而達成。為了使得幫浦轉子能同步運轉,一般都採用惰輪驅動的方式,然而此種設計己逐漸無法滿足隨著製程技術演進對真空系統的嚴格要求。
為徹底對同步運動控制提供適當對策,並突破傳統真空幫浦的設計架構,為無油密封潤滑新一代的幫浦設計較佳的控制方法,本論文將努力著重於雙馬達同步運動控制之應用研究。而在此也將以雙分離馬達之同步控制為第一目標,而考量實際系統中不可避免之不確定性及未知干擾,接著將試著對雙馬達系統之同步運動控制進行探討,並著眼於兩轉子間意外相互接觸碰撞的解決方法。期望發展出有效雙馬達同步運動之控制策略,而能維持長時間的同步運轉,並達到較佳之同步效果。


Abstract
Coordinated or synchronized tasks can always be found in various manufacturing processes, e.g., machining along spatial trajectories, coordinated operations of multi-manipulators, and vacuum pumps, etc. The vacuum pump is a typical device with synchronized motion among those examples. The vacuum pump has played an important role in current semiconductor manufacturing processes. Its pumping feature is achieved by synchronized motion of two mating pump rotors. A common approach to accomplish the synchronized motion is by idle gears. Nevertheless, this design cannot meet serious requirements of vacuum systems demanded by growing manufacturing techniques.
In order to provide a complete and proper control strategy for synchronized motion, and to overthrow traditional architecture of vacuum pumps by raising a better control scheme for new generation oil-less products, the paper focuses on synchronized motion control for dual motors. The first objective of here is to develop a control method for synchronized motion of two separated motors. Both system uncertainties and unknown disturbances occurring in actual implementation need to be carefully considered. An experimental setup will also be established for examinations and verifications. And then synchronized motion control of dual motors including two mating screw rotors then will be investigated. During this period, the emphasis will be on solution finding for unexpected contact collision between two rotors. An effective and efficient control strategy will be developed for synchronized motion control of dual motors. Longer operation time and better synchronization performance for two motors can therefore be anticipated.


目 錄
目 錄…………………………………………………………………..Ⅰ
圖索引…………………………………………………………………..Ⅲ
表索引…………………………………………………………………..Ⅷ
摘 要…………………………………………………………………..Ⅸ
英文摘要………………………………………………………………..Ⅹ
第一章緒論……………………………………………………………1
1-1 動機與目的…………………………………………………...1
1-2 文獻回顧……………………………………………………...5
n同步運動控制器……………………………………….5
n負載轉矩觀測器……………………………………….9
1-3 論文架構…………………………………………………….14
第二章系統動態模式建立…………………………………………..15
2-1 系統建立…………………………………………………….15
2-2 系統數學模式建立………………………………………….16
第三章控制器設計…………………………………………………..20
3-1 個別迴路控制器設計……………………………………….21
3-2 交互耦合控制器設計……………………………………….25
3-3 負載轉矩觀測器設計……………………………………….36
3-4 負載轉矩補償器設計……………………………………….40
第四章雙馬達碰撞模式建立………………………………………..42
4-1 碰撞模式建立……………………………………………….42
4-2 命令輸入軌跡設計………………………………………….50
第五章 控制器參數設定……………………………………………..53
5-1 同步運動控制器參數選定………………………………….53
5-2 負載轉矩控制器參數選定………………………………….61
第六章 系統模擬結果與分析………………………………………..65
6-1 同步運動控制模擬………………………………………….65
6-2 負載轉矩控制模擬………………………………………….73
6-3 雙馬達碰撞模式模擬……………………………………….85
第七章結論…………………………………………………………..97
參考文獻………………………………………………………………100
附錄A 轉子間隙與轉動碰撞相位角之關係……..…..…………….105
附錄B 加上硬體條件模擬控制結果……………………………….107


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