跳到主要內容

臺灣博碩士論文加值系統

(44.197.230.180) 您好!臺灣時間:2022/08/20 10:03
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

我願授權國圖
: 
twitterline
研究生:謝宗甫
研究生(外文):Tsung-Fu Hsieh
論文名稱:三維微光學開關設計與分析之研究
論文名稱(外文):A Study on the Design and Analysis of 3-Dimensional Micro-Optical Switch
指導教授:蔡穎堅
指導教授(外文):Ying-Chien Tsai
學位類別:碩士
校院名稱:國立中山大學
系所名稱:機械與機電工程學系研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:116
中文關鍵詞:微機電光學開關
外文關鍵詞:MEMSOptical Switch
相關次數:
  • 被引用被引用:0
  • 點閱點閱:238
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:1

二維微光學開關已被廣泛的應用於現今的光通訊領域。然而由於微機電系統中面型微加工技術的製程技術限制,使得現今二維微光學開關僅能傳遞訊號於二維的平面上。
本研究藉由已發展的二維微光學開關架構及基本原理、光學轉換矩陣、致動器的應用等,加以平面及空間機構設計概念,設計出一種具有雙自由度的三維微光學開關機構。異於二維微光學開關傳遞方向的單一選擇性,其具有垂直及水平訊號的傳遞功能,能連結上下兩矽基底所舖設光纖的訊號傳遞。希望藉此三維微光學開關的功能,能增加輸入與輸出光纖間訊號傳遞的選擇可能性。


Presently, the two-dimensional optical switch is widely applied in the field of the optics communication. Due to the restrictions of the Surface Micro-Machining in MEMS (Micro Electric-Mechanical System), the traditional optical switch can only deliver the signal of fibers in a two-dimensional plane.
The common frameworks and principles of two-dimensional optical switch, array of optical switches and micro-actuators are developed. Take the advantage of developed technologies and the concept of the spatial mechanisms, a three-dimensional optical switch possessing two degree of freedoms is designed in this study. Different from the single selectivity of the signal transmission delivered by the two-dimensional optical switch, the three-dimensional optical switch designed in this study possesses two main functions of signal transmission in vertical and horizontal directions. By means of function of these two transmission directions, the signal of fibers of two different silicon substrates can be easily connected. It is believed that, the possibility and the selectivity of the signal transmission of fibers are increased.


摘要I
AbstractII
目錄III
圖目錄V
表目錄VIII
符號說明IX
第一章 前言1
1-1研究動機及目的1
1-2文獻回顧2
1-2-1微光學開關機構2
1-2-2驅動源10
第二章 面型微加工技術及製程簡介14
2-1薄膜沉積技術14
2-2微影技術15
2-3蝕刻技術17
2-3-1濕式蝕刻(Wet Etching)18
2-3-2乾式蝕刻(Dry Etching)19
2-4擴散、離子佈植與熱製程20
2-4-1擴散(Difussion)20
2-4-2離子佈植(Ion Implantation)21
2-4-3熱製程(Thermal Process)21
2-5犧牲層(Sacrificial Layer)技術22
2-6面型微加工製程24
2-7面型微加工技術之限制25
第三章 三維微光學開關機構設計與理論分析28
3-1三維微光學開關機構功能分析28
3-1-1水平方向訊號傳遞功能32
3-1-2垂直方向訊號傳遞功能33
3-2線性致動器之應用與模擬34
3-2-1線性致動器之應用理論分析及尺寸設計34
3-2-2梳式致動器之模擬38
3-3微鏡片旋轉基座機構設計與製程概念46
3-3-1轉軸式與旋轉式微光學開關之設計原理與製程概念46
3-3-2三維微光學開關旋轉基座之設計原理與製程概念49
3-4接頭機構設計52
3-4-1相對於旋轉基座,微鏡片有平行於X-Y平面的旋轉向量53
3-4-2相對於矽基底,旋轉基座具垂直於X-Y平面的旋轉向量54
3-4-3三維微光學開關接頭設計與製程概念設計56
3-5支撐樑機構設計59
3-6三維光學轉換矩陣系統功能分析63
第四章 三維微光學開關之製程設計66
第五章 結論及建議88
參考文獻90
附錄梳式致動器相關理論94


1.Brennen, R. A., Lim, M. G., Pisano, A. P., and Chou, A. T., 1990, “Large Displacement Linear Actuator,” Technical Digest IEEE Solid-State Sensors and Actuators, pp 135-139.2.Chen, R. T., Nguyen, H., and Wu, M. C., 1999, “A Low Voltage Micromachined Optical Switch by Stress-Induced Bending,” Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Jan 17-21, Orlando, FL, USA, pp.424-428.3.Cho, Y. H., Pisano, A. P., and Howe, R. T., 1994, “Viscous Damping Model for Laterally Oscillation Microstructures,” Journal of Microelectromechanical System, vol. 3, No. 2, pp 81-86.4.Danceman, M. J., Tien, N. C., Solgaard, O., Piasno, A. P., Lau, K. Y., and Muller, R. S., 1996, “Linear Microvibromotor for Positioning Optical Components,” Journal of Microelectromechanical System, Vol. 5, No. 3, pp.159-165.5.Hirano, T., Furuhata, T., Gabriel, K. J., and Fujita, H., 1991, “Operation of Sub-micron Gap Electrostatic Comb-drive Actuators,” Proceedings of MEMS, pp 873-876.6.Juan, W. H., and Pang, S. W., 1997, “Batch-Micromachind, High Aspect Ratio Si Mirror Arrays for Optical Switching Applications,” International Conference on Solid-State Sensors and Actuators, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators, Part 1 (of 2), Jun 16-19, Vol. 1, Chicago, IL, USA, pp.93-96.7.Kiang, M. H., Francis, D. A., Solgaard, O., Lau, K. Y., and Muller, R. S., 1997, “Actuated Polysilicon Micromirrors for Raster-Scanning Displays,” International Conference on Solid-State Sensors and Actuators, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators, Part 1 (of 2), Jun 16-19, Vol. 1, Chicago, IL, USA, pp.323-326.8.Koester, A. D., Introduction to Micro-Electro-Mechanical Systems and the Multi-users MEMS Processes (MUMPs), Case Western Reserve University — MCNC, MEMS-MUMPS Short Course, August 8-10, 1993.9.Lee, S. S., Motamedi, E., and Wu, M. C., 1997, “Surface-Micromachined Free-Space Fiber Optic Switches With Integrated Microactuators for Optical Fiber Communication Systems,” International Conference on Solid-State Sensors and Actuators, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators, Part 1 (of 2), Jun 16-19, Vol. 1, Chicago, IL, USA, pp.85-88.10.Lee, S. S., Huang, L. S., Kim, C. J., and Wu, M. C., 1999, “Free-Space Fiber-Optic Switched Based on MEMS Vertical Torsion Mirrors,” Journal of Lightwave Technology, Vol. 17, No. 1, pp.7-13.11.Lin, L. Y., Shen, J. L., Lee, S. S., Su, G. D., and Wu, M. C., 1997, “Microactuated Micro-XYZ Stages for Free-Space Micro-Optical Bench,” Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, Jan 26-30, Nagoya, Japan, pp.43-48.12.Lin, L. Y., and Goldstein, E. L., 1999a, “MEMS for Free-Space Optical Switching,” Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS Proceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99), Nov 8-11, Vol. 2, San Francisco, CA, USA, pp.483-484.13.Lin, L. Y., Goldstein, E. L., Lunardi, L. M., and Tkach, R. W., 1999b, “Free-Space Micromachined Optical Switches for Optical Networking,” IEEE Journal of Selected Topics in Quantum Electronics, Vol. 5, No. 1, pp.4-9.14.Lin, L. Y., Goldstein, E. L., Lunardi, L. M., and Tkach, R. W., 1999c, “Micromachined Optical-Switching Technologies for WDM Networks,” LEOS Summer Topical Meeting Proceedings of the 1999 IEEE/LEOS Summer Topical Meeting on Nanostructures and Quantum Dots, July 26-27, San Diego, CA, USA, pp.57-58.15.Miller, R. A., Tai, Y. C., Xu, G., Bartha, J., and Lin, F., 1997, “An Electromagnetic MEMS 2 x 2 Fiber Optic Bypass Switch,” International Conference on Solid-State Sensors and Actuators, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators, Part 1 (of 2), June 16-19, Vol. 1, Chicago, IL, USA, pp 89-92.16.Petersen, K. E., 1980, “Silicon Torsional Scanning Mirror,” IBM Journal of R&D, Vol.24, pp 63117.Tang, W. C., Nguyen, T. H., Howe, R. T., 1989a, “Laterally Driven Polysilicon Resonant Microstructures,” IEEE Proceedings of An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots., pp 53-59. 18.Tang, W. C., Nguyen, T. H., Howe, R. T., 1989b, “Laterally Driven Polysilicon Resonant Microstructures,” Proceedings of Microelectromechanical System, pp 187-193.19.Tien, N. C., Solgaard, O., Kiang, M. H., Daneman, M. J., Lau, K. Y., and Muller, R. S., 1995, “Surface-Micromachined Mirrors for Laser-Beam Positioning,” International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Part 2 (of 2), June 25-29, Vol. 2, Stockholm, Sweden, IEEE Piscataway NJ ,USA, pp 352-355.20.Toshiyoshi, H., and Fujita, H., 1996, “Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix,” Journal of Microelectromechanical System, Vol. 5, No. 4, pp.231-237.21.Toshiyoshi, H., Miyauchi, D., and Fujita, H., 1998, “Micromechanical Fiber Optic Switches Based on Electromagnetic Torsion Mirrors,” LEOS Summer Topical Meeting Proceedings of the 1998 IEEE/LEOS Summer Topical Meeting, July 20-24, Monterey, CA, USA, pp.23-24.22.Yasseen, A. A., Mitchell, J. N., Klemic, J. F., Smith, D. A., and Mehregany, M., 1999, “A Rotary Electrostatic Micromotor 1 x 8 Optical Switch,” IEEE Journal of Selected Topics in Quantum Electronics, Vol. 5, No. 1, pp.26-32.23.Zhang, X., and Tang, W. C., 1994, “Viscous Air Damping in Laterally Driven Microresonators,” Ford Microelectronics, Inc., Berkeley, pp.199-204.24.吳東權, 1997,微機電系統之技術現況與發展,工業技術研究院機械工業研究所,新竹。25.曾繁根,2000,微系統設計,國立清華大學工程與系統科學系,新竹。26.楊賢敏,2000,微光纖鏡片及力學分析,碩士論文,國立成功大學工程科學研究所,台南。27.謝宸碩,2001,微型致動器之設計製作及其在光學及微爪之應用,碩士論文,國立成功大學工程科學研究所,台南。

QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top