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研究生:張書銘
研究生(外文):Su-Ming Chang
論文名稱:成批機台在等候時間限制下生產控制策略之建立與應用
論文名稱(外文):Study of control policy for batch processing with time constrains
指導教授:阮約翰阮約翰引用關係
指導教授(外文):John Yuan
學位類別:碩士
校院名稱:國立清華大學
系所名稱:工業工程與工程管理學系
學門:工程學門
學類:工業工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:72
中文關鍵詞:成批機台等候時間限制模擬基因驗算法派工
外文關鍵詞:Batch processing machineTime constraintsSimulationGenetic algorithmDispatching
相關次數:
  • 被引用被引用:5
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  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
本研究主要針對在等候時間限制下(即工件未能在此時間內進行加工即需報廢或重工),加工工件非同時抵達成批(batch processing)機台的情況,決定適當的生產控制策略(包含加工時機的判斷與加工工件的選擇)。
成批機台具有可同時處理多批工件的特色,然而,由於其進行一加工批量(one batch)的加工時間與加工批量大小(batch size)獨立,因此,如何決定適當的加工批量大小需權衡等候時間與機台利用率等各項因素。文獻中提到的動態工作分派法則(Dynamic Jab Assignment Heuristic;DJAH)係針對成批機台決定適當的加工時機所提出的控制策略,
本論文所建構的生產控制策略經改良DJAH與考慮等候時間限制對於生產環境的影響提出考量等候時間限制的動態工作分派( Dynamic Job Assignment with waiting Time Constraint;DJATC)以適用於等候時間限制下的成批作業,並藉此以達到降低晶圓批平均流程時間( flowing time )、並減少重加工的次數(提高良率( yield ))的目標。
最後,有鑒於等候時限是由工程師為避免晶圓表面遭受到污染所制定的主觀時間,在此將藉由模擬驗證所建立的系統,應用遺傳演算法尋優的技巧觀察不同等候區的等候時限,其對生產績效有何影響,以進一步提出改善生產績效的建議。
In this study we consider the batch processing machine with limited waiting time constraints (i.e. if the lots don’t start processing during the period), it must be reworked or scrapped, to develop a prior control policy that includes deciding on when to start a process cycle and the priority of lots.
The batch processing machine is capable of processing multiple lots simultaneously as a single batch, and often the maximum batch size (machine capacity) of batch processing is greater then the size of the arriving lots. However, the processing times of each batch are independent of batch size. Choosing start times for process cycles must balance waiting and the utility rate of the batch processing machine. The DJAH is one of strategies by given the availability of information on a few near future arrivals decides on when to schedule a job, but it doesn’t take account of the effect of time constraints.
The first objective of the research is to propose a dispatching rule to accommodate batch processing with time constraints. By improving DJAH and analyzing the impact of time constraints on product environment, a dispatching rule, DJATC, is developed. There is amount of information need to know: future lots arrival time, batch size of future arrival and the number of lots which have been waited, to decide when to start a process cycle and the priority of lots. To demonstrate the effectiveness of the dispatching rule proposed in this research, a simulation model is constructed. The simulation result indicate the DJATC rule can effectively reduced average flowing time and reduced the number of wafer rework.
Finally, since time constraints are installed by engineering to prevent native oxidation or contamination effect on wafer surface. We use the demonstrated simulation model and genetic algorithm to observe various time constraints which is influence on system performance, and give recommendations to improve it.
摘要 I
ABSTRACT II
致謝辭 III
目錄 IV
圖目錄 VI
表目錄 VII
第一章 研究問題說明 1
1.1研究背景 1
1.2 研究問題描述 1
1.3 研究目的及方法 3
1.4 論文架構 4
第二章 成批機台工作分派文獻探討 5
2.1 成批機台加工時機判斷之相關文獻探討 5
2.1.1 最小批量數法( MINIMUM BATCH SIZE RULE;MBS ) 5
2.1.2 前瞻性策略( LOOK-AHEAD STRATEGIES ) 7
2.2 考量等候時間限制下之相關文獻探討 8
第三章 考量等候時間限制的動態工作分派 10
3.1工作分派(加工時機判斷與加工晶圓選擇) 10
3.1.1 前製程 10
3.1.2 後製程 13
3.1.3 後製程動態工作分派法則( DYNAMIC JOB ASSIGNMENT WITH WAITING TIME CONSTRAINT;DJATC ) 15
3.2等候時間限制對系統績效影響分析 29
第四章 模擬驗證 32
4.1 模式建構 32
4.1.1 模擬環境基本資料 32
4.1.2 模擬環境基本假設 32
4.1.3 模式驗證與確認 33
4.2 模擬結果 33
4.2.1 DJATC與MBSX兩法則的比較 33
4.2.2等候時間限制對系統績效影響結果分析 37
第五章 結論與未來研究方向 40
5.1 結論 40
5.2 未來研究方向 41
參考文獻 42
附錄(A) 半導體晶圓製造流程介紹與生產特性分析 44
A.1 半導體晶圓製造流程 44
A.2 半導體晶圓生產特性分析 47
附錄(B) 前瞻性策略文獻探討 50
附錄(C) 產品途程與機台基本資料 63
附錄(D) 模擬模式的建構 64
D.1 DJATC法則 64
D.2 遺傳演算法於系統模擬的應用 68
中文部分:
1. 徐光宏,“晶圓製造廠黃光區派工法則之探討”,國立交通大學工業工程研究所碩士論文,1996。
2. 曾信傑,“應用模糊類神經派工法於晶圓製造廠之研究”國立台北科技大學生產系統工程與管理研究所碩士論文,1999。
3. 蔡啟聰,“晶圓製造廠考慮等候時間限制之派工策略” ,國立交通大學工業工程研究所碩士論文,1995。
英文部分:
4. Akcali, E., Uzsoy, R., Hiscock, D. G., Moser, A. L., Teyner, T. J., “Alternative loading and dispatching policies for furnace operations in semiconductor manufacturing: a comparison by simulation,” Proceedings of the 2000 Winter Simulation Conference, 1428-1435, 2000.
5. Avramids, A.N., Healy, K. J. and Uzsoy, R., “Control of a batch-processing machine : a computational approach,” International Journal of Product Research, 36(11):3167-3181,1998.
6. Deb, R. K., and Serfozo, R. F. “Optional control of batch service queues,” Applied Probability, 5:340-361,1973.
7. Fowler, J. W., Phillips, D. T., and Hong, G. L., “Real-time control of multiproduct bulk service semiconductor manufacturing processes,” IEEE Transactions on Semiconductor Manufacturing, 5(2) : 158-163, 1992.
8. Gen M. and Cheng R., “Genetic Algorithm and Engineering Design”, pp. 1 ~ 30 , 1997.
9. Glassey, C. R., and Weng, W. W., “Dynamic batch heuristic for simultaneous processing,” IEEE Transactions on Semiconductor Manufacturing, 4(2) : 77-82, 1991.
10. Gurnani, H., Anupindi, R., and Akella, R., “Control of batch processing systems in semiconductor wafwe fabrication facilities,” IEEE Transactions on Semiconductor Manufacturing, 5(4):319-328,1992.
11. Scholl, W. and Domaschke, J., “Implementation of modeling and simulation in semiconductor wafer fabrication with time constraints between wet etch and furnace operations,” IEEE Transactions on Semiconductor Manufacturing,13(3):273-277, 2000.
12. Stevenson W.J., “Production/Operations management”,pp.590,1996
13. Robinson, J. K. and Giglio, R., “Capacity planning for Semiconductor wafer fabrication with time constraints between operation,” Proceedings of the 1999 Winter Simulation Conference, 880-887,1999.
14. Robinson, J. K., Fowler, J. W., Bard, J. F. “The use of upstream and downstream information in scheduling semiconductor batch operation,” International Journal of Product Research, 33(7) : 1849-1869, 1995.
15. Rulken, H. J., van Campen, E. J. J., van Herk, J., and Rooda, J.E., “Batch size optimization of a furnace and pre-clean area by using dynamic simulations,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference,439-444,1998.
16. Weng, W. W., and Leachman, R.C, “An improved methodology for real-time production decisions at batch-process work stations,” IEEE Transactions on Semiconductor Manufacturing, 6(3) : 219-225, 1993.
17. van der Zee, D. J., Harten, A., and Schuur, P. C., “Dynamic job assignment heuristics for multi-server batch operations-A cost based approach,” International Journal of Product Research, 35(11) : 3063-3093,1997.
18. van der Zee, D. J., “Look-ahead strategies for controlling batch operations in industry-overview, comparison and exploration,” Proceedings of the 2000 Winter Simulation Conference,1364-1373,2000.
其他:
19 林則孟,系統模擬,滄海書局,台中,2001。
20 劉博文,ULSI 製程技術,文京圖書有限公司,台北縣,2001。
21 網頁資料:台灣應用材料股份有限公司全球資訊網半導體製程簡介
http://www.amt.com.tw/product/product_1.html
22 梁治國教授,交通大學「半導體現場製造管理資訊系統」課程上課講義,2000。
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