臺灣博碩士論文加值系統

半導體廠因其設備昂貴生產流程複雜，派工是否有效率對機台之使用效率及整體生產效率及機台使用率影響至大。派工法則雖然眾多，但一般多基於優化產量、週期時間、機台使用率、瓶頸機台使用率或最低成本考量，然而從企業整體的角度觀之，影響最終結果之主要因素如達交率、利潤、和顧客關係之考量卻顯少有人將之列入派工法則之優化項目，而在考量達交率優化的派工法則，以使用過站值(Turn Ratio)來粗估晶圓批次在工廠中的平均過站速率。以概略判定派工之優先順序。然而晶圓廠中不同製程的過站速率相差甚大，快慢差異可能數十倍(小時至天)，以過站值來作流速之計算控制，以為派工法則之依據，無法精密控制晶圓批次之流動速率。
本研究擬從顧客導向的角度來考量派工之優化。以優化達交率，建立以加權過站值為主軸，優化達交率為目的之派工法則，以權重來模式化處理不同製程過站速率之差異，以精密控制達交率，本研究以eM-Plant模擬軟體建立半導體廠雛形系統(prototype system) 與習用之派工方式比較其績效優劣。實驗結果顯示本研究之派工法則在達交率及產量方面均優於FIFO、GFIFO、CR、EDD及純過站值方法。

Because of the manufacturing process complexity in semiconductor manufacturing, dispatching has been an important factor to the overall fab productivity and equipment effectiveness. Although there are numerous dispatching methodologies, almost all of them are designed from the production perspective. A great majority of them are based on the optimization of production, cycle time, equipment utilization, bottleneck machines, etc. However, from the business perspective, what counts at the end is the customer side of the story — not the internal manufacturing perspectives. The customer-driven factors such as order hit rate, profit, and customer relationship — for long-term business — are rarely considered in designing the dispatching rules. The very few researches which consider target hit rate used turn ratio to estimate the lot progress in the fab in order to control the lot processing speed. However, pure turn ratio failed to consider the great differences in the actual time needed to progress over various manufacturing stages. Using turn ratio to control the lot progress cannot accurately control the speed of the lot progress.
This research attempts to optimize the dispatching integrating customer-driven perspectives — namely target hit rate. This research uses actual process time as the weight to control the target hit rate in order to more accurately control the actual lot progress. This dispatching method was compared to FIFO、GFIFO、CR、EDD、T.R and showed better hit-rate and production result compared to all the other ones.

摘要 I
Abstract II
致謝詞 III
目錄 IV
圖目錄 VII
表目錄 VIII
第一章 緒論 1
1.1 研究動機與背景 1
1.2 研究目的 2
1.3 研究範圍與限制 2
1.4 研究方法與進行步驟 3
第二章 文獻探討 5
2.1半導體製程簡介 5
2.2 派工法則探討 7
2.3生產週期時間訂定與控制 12
2.4 績效指標 13
2.5 Duncan多重全距檢定手法 16
2.6 模型建構與模擬 17
2.6.1 模擬的定義 17
2.6.2 模擬的角色 17
2.6 eM-Plant模擬軟體簡介 18
第三章 研究方法 20
3.1 問題描述 20
3.2 名詞定義 20
3.3 符號定義 21
3.4 派工模式構建 23
3.4.1 過站值之意義、計算方法及其使用 24
3.4.2加權過站值及各優先權下加權過站值求算 24
3.4.3 設定批次上機生產之優先權 26
3.4.4 本法則特點說明 31
3.5 集批加工(batch)之考量 31
3.6 派工法則步驟重整 31
3.7 派工法則簡單計算實例 33
3.7.1非集批機台派工 34
3.7.2 集批機台派工 37
第四章、實例驗證 39
4.1 模式構建大綱 39
4.2 模擬輸入資料說明 39
4.3 實驗設計 40
4.3.1 產品組合 40
4.3.2 決定預熱時間 41
4.3.3 初始加權過站速率取得 41
4.3.4 實驗因子選擇 41
4.3.5 批次交期設定 42
4.4 模擬實驗及分析 43
4.4.1 製程時間差異對時間加權影響 44
4.4.4 派工法則比較 47
4.5 各派工法則之特色及總結 53
第五章 結論及未來研究方向 55
5.1 結論 55
5.2 未來研究方向 56
參考文獻 57
附錄A：Intel Five-Machine Six Step Mini-Fab Description 59
附錄B：模擬實驗製程加工資訊 64
附錄C：產品即時出貨之控管方法 67
附錄D：模擬環境建立 73

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