跳到主要內容

臺灣博碩士論文加值系統

(44.200.175.255) 您好!臺灣時間:2022/08/11 14:34
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

我願授權國圖
: 
twitterline
研究生:洪瑞炫
研究生(外文):Kevin Hong
論文名稱:溼式清洗機台不延遲作業排程
論文名稱(外文):No-wait operation scheduling for wet bench machines
指導教授:許棟樑許棟樑引用關係
指導教授(外文):Dongliang Sheu
學位類別:碩士
校院名稱:國立清華大學
系所名稱:工業工程與工程管理學系
學門:工程學門
學類:工業工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:65
中文關鍵詞:溼式清洗機台不延遲排程流程生產機器手臂搬運
外文關鍵詞:wet benchno-wait scheduleflow shoprobot transportation
相關次數:
  • 被引用被引用:6
  • 點閱點閱:288
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:1
在半導體業的製程中溼式清洗機台(Wet Bench)應用範圍廣,然而由於製程之化學特性,產品一旦開始加工即需連續完成各藥槽之製程不能有任何等待,此特性造成批次(batch)下料的複雜性。本論文將Wet Bench機台視為general flow shop排程問題,分二階段優化機台的下料及排程問題。本研究的第1部分藉由研究機台實際運作特性以找出加工時批次間的等待時間,優化機台下料的參數。比較本研究和合作公司實際機台資料後發現,利用本研究的演算法結果設定機台參數將可提升產能。本研究第2部分比較Bertolissi和Christopher的Tabu演算法,並延用第1 部分的成果以找出適合應用於Wet Bench 上的排程方法。實證分析發現,Bertolissi的演算法在計算時間上表現較佳;Christopher的Tabu在排程解品質上表現較佳,兩種方法的選用應視排程的需求而定。
關鍵字:溼式清洗機台、不延遲排程、流程生產、機器手臂搬運
Wet bench etchers have wide applications in semiconductor fabrications, duc to process chemical characteristics, each batch must be processed without any waiting between adjacent chemical processes. This “no-wait” characteristics created complexity in the dispatch time of each batch to the wet bench. Considering wet bench processing as a general flow shop dispatching problem, the research solve the problem in two stages.The first stage has time-slot-set insertion algorithm to optimize the between-lot holding time for maximun machine throughput. The testing results show that substantial improvement over collaborative plant’s current situation. The second stage compares the efficiency between modified Bertollisi algorithm and Christopher’s Tabu search for the ordering of product batches. Bertollisi algorithm has efficiency in computing time and Tabu search has efficiency in quality of scheduling solution The selection of metholds is depend on scheduling demand.
Keyword:wet bench, no-wait schedule, flow shop, robot transportation
目錄
第1章 緒論 1
1.1 研究背景與動機 1
1.2 問題敘述 1
1.3 研究目的 2
第2章 文獻探討 3
2.1 清洗設備介紹 3
2.2 生產系統型態 8
2.3 No-Wait Problem 10
2.4 塔布搜尋法 14
2.5 Bertolissi algorithm 16
第3章 研究方法 20
3.1 研究對象與範圍 20
3.2 研究假設 21
3.3 研究流程 21
3.4 理論分析 23
3.4.1 問題模式化 23
3.4.2 跳槽加工 26
3.4.3 Robot動作研究 28
3.5 No-Wait問題求解 33
3.5.1 數學模式 33
3.5.2 延遲時間 37
3.5.3 修正 Bertolissi演算法39
3.5.4 Tabu Search 44
3.6 排程效率之比較 45
第4章 實證分析 46
4.1 延遲時間的改善 46
4.2 排程方法的比較 51
4.2.1 範例描述 51
4.2.2 六個藥槽的溼式清洗機台排程效率之比較 54
4.2.3 十二個藥槽的溼式清洗機台排程效率之比較 58
第5章 結論 63
第6章 參考文獻 64
1 潘扶民,”積體電路濕式製程系統”, 電子月刊第三卷第四期,1997年4月,pp64-68。
2 陳宏銘,”溼式化學清洗技術與設備研究動向”,電子月刊第五卷第四期, 1999年4月,pp84-90。
3 廖麗滿, “塔布搜尋法求解排程問題之研究”, 國立台灣科技大學博士論文, 2000。
4 Agnetis, A., “part sequencing in three-machine no-wait robotic cells”, operations research letters(v27,2000), pp185-192.
5 Agnetis, A., “Scheduling no-wait robotic cells with two and three machine”, European J. Oper. Res. (v123,2000), pp303-314.
6 Bertolissi, E., “Heuristic algorithm for scheduling in the no-wait flowshop“, Journal of Materials Processing Technology(v107,2000), pp459-465.
7 Christopher, D. Geiger, Karl G. Kempf and Reha Uzsoy, “A Tabu Search Approach to Scheduling an Automated Wet Etch Station”, Journal of Manufacturing System, (v16,1997), pp103-117.
8 Glover, F., “Tabu search-part I”, ORSA Journal on Computing ,(1,1989), pp190-206
9 Hall, N.G. and C. Sriskandarajah, “A Survey of Machine Scheduling Problems with Blocking and No-Wait in Process”, Operations Research(v44, 1996), pp510-525.
10 Kamoun, H. and C. Sriskandarajah, “The Complexity of Scheduling Jobs in Repetitive Manufacturing Systems”, European Journal of Operational Research (v70, 1993), pp350-364.
11 McCormick, S.T., M.L. Pincdo, S. Shenker, and B. Wolf, “Sequencing in an Assembly Line with Blocking to Minimize Cycle Time”, Operations Research (v37, 1989), pp925-935.
12 Nawaz, M., E.E. Enscore, and I. Ham, “A Heuristic Algorithm for the m-machine, n-Job Flow Shop Sequencing Problem”, Omega(v11,1983), pp91-95.
13 Papadimitriou, C.H. and P.C. Kanellakis, “Flowshop Scheduling with Limited Temporary Storage”, Journal of the Association for Computing Machinery(v27,1980), pp533-549.
14 Pekny, J.F. and D.L. Miller, “Exact Solution of the No-Wait Flowshop Scheduling Problem with a Comparison to Heuristic Methods”, Computers and Chemical Engineering(v15,1991), pp741-748.
15 Phillips, L.W. and P.S. Unger, “Mathematical Programming Solution of a Hoist Scheduling Program”, AIIE Transactions(v8, n2, 1976), pp219-225.
16 Rajendran, C., “A No-Wait Flowshop Scheduling Heuristic to Minimize Makespan”, Journal of the Operational Research Socity (v45,1994), pp472-478.
17 Reddi, S.S. and C.V. Rammamoorthy, “On the Flowshop Sequencing Problem with No Wait in Process”, Operational Research Quarterly (v23,1972), pp323-331.
18 Rock, H., “The Three-Machine No-Wait Flow Shop Problem is NP-Complete”, Journal of the Association for Computing Machinery (v31,1984),pp336-345.
19 Wismer, D.A., “Solution of the Flowshop Scheduling Problem with No Intermediate Queues”, Operations Research (v20,1972), pp689-697.
20 Woodruff, D.L. and Zemel E., “Hashing Vectors for Tabu Search”, Annals of Operations Research, (v41,1993), pp123-137.
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top