臺灣博碩士論文加值系統

　　Czochralski長晶法過程中，污染物會經由流體載送擴散掉入長晶熔液中，影響晶體中摻雜物的濃度、破壞晶體結構，造成晶圓成品品質不良。
　　本文採用數值方法模擬長晶爐流場的分佈情形，研究長晶爐幾何形狀對流場的影響，試著改變長晶爐淨化筒(purge tube)的設計，希望能減少回流區的產生，有效將污染物排出。結果顯示改良後的淨化筒能有效減少回流區，而C型淨化筒效果又比B型淨化筒好。

摘要 i
誌謝 ii
目錄 iii
圖表目錄 v
第一章　緒論 1
1.1　前言 1
1.2　文獻回顧 2
1.3　Czochralski長晶爐簡介 4
1.3.1　長晶的原理 4
1.3.2　長晶技術 8
1.3.3　矽 12
1.3.4　總結 15
第二章　數學模式 24
2.1　問題描述與基本假設 24
2.2　邊界條件和物理性質 25
第三章 數值分析 26
3.1　網格建立 26
3.2　數值解法 27
第四章 結果與討論 41
4.1　溫度分佈 42
4.2　上層長晶室 43
4.3　有無淨化筒之比較 45
4.4　A、B、C三型淨化筒之比較 46
第五章 結論 73
參考文獻 76

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