跳到主要內容

臺灣博碩士論文加值系統

(44.200.175.255) 您好!臺灣時間:2022/08/11 14:26
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

我願授權國圖
: 
twitterline
研究生:余礎宇
論文名稱:Czochralski長晶爐流場之數值模擬分析
指導教授:許文震許文震引用關係
學位類別:碩士
校院名稱:國立清華大學
系所名稱:動力機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:76
中文關鍵詞:長晶爐淨化筒碳污染
外文關鍵詞:Czochralskipurge tube
相關次數:
  • 被引用被引用:3
  • 點閱點閱:447
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
  Czochralski長晶法過程中,污染物會經由流體載送擴散掉入長晶熔液中,影響晶體中摻雜物的濃度、破壞晶體結構,造成晶圓成品品質不良。
  本文採用數值方法模擬長晶爐流場的分佈情形,研究長晶爐幾何形狀對流場的影響,試著改變長晶爐淨化筒(purge tube)的設計,希望能減少回流區的產生,有效將污染物排出。結果顯示改良後的淨化筒能有效減少回流區,而C型淨化筒效果又比B型淨化筒好。

摘要 i
誌謝 ii
目錄 iii
圖表目錄 v
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.3 Czochralski長晶爐簡介 4
1.3.1 長晶的原理 4
1.3.2 長晶技術 8
1.3.3 矽 12
1.3.4 總結 15
第二章 數學模式 24
2.1 問題描述與基本假設 24
2.2 邊界條件和物理性質 25
第三章 數值分析 26
3.1 網格建立 26
3.2 數值解法 27
第四章 結果與討論 41
4.1 溫度分佈 42
4.2 上層長晶室 43
4.3 有無淨化筒之比較 45
4.4 A、B、C三型淨化筒之比較 46
第五章 結論 73
參考文獻 76

1. Utech, H. P. and Flemings, M. C. (1966), Elimination of Solute Banding in Indium Antimonide Crystals by Growth in a Magnetic Field, Journal of Applied Physics, Vol. 37, pp. 2021-2024.
2. LaBelle, H. E. (1971), Growth of Controlled Profile Crystals from the Melt: Part I - Sapphire Filaments, Materials Research Bulletin, Vol. 6, pp.571-580.
3. LaBelle, H. E. (1971), Growth of Controlled Profile Crystals from the Melt: Part II — Edge-Defined, Film-Fed Growth (EFG), Materials Research Bulletin, Vol. 6, pp.581-590.
4. Keck, P. H. and Golay, M. J. E. (1953), Crystallization of Silicon from a Floating Liquid Zone, The Physical Review, Vol. 89, pp. 1297.
5. Gomperz, E. (1921), Untersuchungen an Einkristalldrahten, Zeitschrift fur physik, Vol. 8, pp. 184.
6. Mark, H., Polanyi M. and Schmid, E. (1922), Vorgange bei der Dehnung von Zinkkristallen, Vol. 12, pp. 58-77.
7. Teal, G. K. and Little, J. B. (1950), Growth of Germanium Single Crystals, The Physical Review, Vol. 78, pp. 647.
8. Teal, G. K. and Buehler, E. (1952), Growth of Silicon Single Crystals and of Single Crystal Silicon p-n Junctions, The Physical Review, Vol. 87, pp. 190.
9. Dash, W. C. (1958), Silicon Crystals Free of Dislocations, Journal of Applied Physics, Vol. 29, pp. 736.
10. Ziegler, G. (1961), Zur Bildung, Zeitschrift fur naturforschung, Vol. 16a, pp. 219.
11. Teal, G. K. (1976), Single Crystals of Germanium and Silicon — Basic to the Transistor and Integrated Circuit, IEEE Transaction Electron Devices, Vol. ED-23, pp. 621-639.
12. Series, R. W. and Barraclough, K. G. (1982), Carbon Contamination during Growth of Czochralski Silicon , Journal of Crystal Growth, Vol. 60, pp. 212-218.
13. Series, R. W. and Barraclough, K. G. (1983), Control of Carbon in Czochralski Silicon Crystals, Journal of Crystal Growth, Vol. 63, pp. 219-221.
14. Scarlete, M. (1992), Mechanism of Carbon and Oxygen Incorporation in Silicon Single Crystals Grown by the Czochralski(Cz) Technique, Journal of electrochemical society, Vol. 139, pp. 1207-1212.
15. Huang, X. (1994), Evaporation Rates of Oxides from Undoped and Sb-Doped Si Melts under Atmospheres of Pure Ne, Ar, and Kr, Japanese Journal of Applied Physics, Vol. 33, pp. 3808-3812.
16. Williams, G. and Reusser, R. E. (1983), Heat Transfer in Silicon Czochralski Crystal Growth, Journal of Crystal Growth, Vol. 64, pp. 448-460.
17. Machida, N. (1998), The effects of argon gas flow rate and furnace pressure on oxygen concentration in Czochralski-grown silicon crystals, Journal of Crystal Growth, Vol. 186, pp. 362-368.
18. Bornside, D. E. and Brown, R. A. (1995), The Effects of Gas-Phase Convection on Carbon Contamination of Czochralski-Grown Silicon, Journal of Electrochemical Society, Vol. 142, pp. 2790-2804.
19. Hurle, D. T. J. and Cockayne, B. (1993), Handbook of Crystal Growth, North Holland, Bristol, Vol. 2a, Chapter 3, pp. 99-211.
20. Chesswas, M., Cockayne, B., Hurle, D. T. J., Jakeman, E. and Mullin, J. B.(1971), Mass and Heat Transfer in Pressure-Pulling Systems, Journal of crystal Growth, Vol. 11, pp.225-232.

QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top