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研究生:朱健誠
研究生(外文):Chien Cheng Chu
論文名稱:高深寬比BELST製程於垂直靜電驅動微掃描面鏡之應用
論文名稱(外文):Applying High Aspect Ratio BELST Process in Vertical Actuated Electrostatic Micro Scanning Mirror
指導教授:方維倫
指導教授(外文):Weileun Fang
學位類別:碩士
校院名稱:國立清華大學
系所名稱:動力機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:97
中文關鍵詞:微機電系統高深寬比製程垂直靜電致動器微掃描面鏡111矽晶片
外文關鍵詞:MEMShigh aspect ratio processvertical comb drive actuatormicro scanning mirror(111) silicon wafer
相關次數:
  • 被引用被引用:2
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  • 下載下載:35
  • 收藏至我的研究室書目清單書目收藏:1
一般而言,微掃描面鏡通常以靜電方式驅動最為常見,其應用極為廣泛。舉例而言,德州儀器公司(Texas Instruments)所發展的DMD,光纖通訊中的switch及shutter ,乃至於應用在眼科手術或光線對準器上,都需要微掃描面鏡其所需要的功能。一般而言,以表面微加工方式製造的此型致動器,因為結構剛性的限制,多會產生一些鏡面不平整或操作時的鏡面變形等問題,雖然經由一些疊層或結構的設計,可減少這些鏡面的問題,但已有愈來愈多的研究者,直接改以體型微加工方式來增加結構的厚度,以有效地增加此型微掃描面鏡的鏡面剛性。
本研究主要是藉由一種高深寬比的BELST(111)矽晶片製程,製造出高剛性大出力大運動量之厚結構微致動器,再利用製程改進來達到厚度局部調整的結構,進而產生致動器與扭轉軸的不同厚度,如此一來,便可以分別降低扭轉剛性及提高垂直梳狀致動器所需的行程量,另外,再加上藉由商用軟體MEMCAD的模擬結果,所製作出具最佳出力的垂直梳狀致動器,就可製作出符合低頻高掃描角度或高頻高光學解析度的垂直靜電驅動微掃描面鏡。由於BELST製程容易、加上位移量大以及光學品質佳等優點,將可應用於光纖通訊、顯示器、投影系統、以及光掃描器等等。

Angular motion plays a crucial role in optical applications such as switching and scanning. The angular motion is available using electrostatic actuation like parallel plate, lateral comb, and vertical comb. Among them the vertical comb actuator (VCA) is regarded as the most promising approach to provide large angular motion. Recently, the High-Aspect-Ratio micromachining (HARM) process have demonstrated their importance of offering even large angular motion as well as extremely stiffness micro-structures. However, these approaches may suffer from alignment and bonding processes.
A HARM process using (111) silicon wafer is proposed in this study to fabricate a vertical comb drive actuator and a micro scanning mirror. Moreover, a large yet stiff mirror and a thin torsional spring are also available through the Extended BELST process within three masks. Thus the optical performance is improved and the driving voltage is reduced. A high-aspect-ratio micro scanner embedded with vertical comb actuator, 500×500mm2 flat mirror, and trimmed torsional springs is successfully fabricated. The static and dynamic performances of micro scanner are also measured.

目錄
摘要 1
致謝 3
目錄 ……………..……………………………………………………………………5
圖目錄 6
表目錄 9
第一章 前言 10
1-1 研究動機 10
1-2 文獻回顧 13
1-3 研究目標 18
第二章 分析與模擬 30
2-1 電極位置關係之模擬 30
2-2 微掃描器之設計 31
2-3 初步模擬結果 34
第三章 實驗規劃 48
3-1 BELST製程 48
3-2 製程步驟 49
3-3 製程改進 51
3-4 製程問題與討論 52
3-5 製程結果 55
第四章 量測 73
4-1 靜態量測 73
4-2 動態量測 74
第五章 未來工作與預定進度 85
第六章 參考文獻 88

[1] M. A. Mignardi, “Digital micromirror array for projection TV,” Solid State Technology, July, 1994, pp. 63-68.
[2] V. Markandey, T. Clatanoff, R. Gove, and K. Ohara, “Motion adaptive deinterlacer for DMD(digital micromirror device)baced digital television,” IEEE Transactions on Consumer Electronics, vol.40, pp. 735-742, 1994.
[3] J. B. Sampesell, “The digital micromirror device and its application to projection displays,” Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators(Transducer ‘93), Yokohama, Japan, June, 1993 , pp. 24-27.
[4] H. Toshiyoshi and H. Fujita, “Electrostatic micro torsion mirrors for an optical switch matrix,” Journal of Microelectromechanical System, vol. 5, pp. 231-237, 1996.
[5] V. A. Aksyuk, F. Pardo, C. A. Bolle, C. R. Giles, and D. J. Bishop, “Lucent Microstar(TM) micromirror array technology for large optical crossconnects,” Proceedings of SPIE, vol. 4178, 2000.
[6] A. S. Dewa, J. W. Orcutt, M. Hudson, D. Krozier, A. Richards, and H. Laor, “Development of a silicon two-axis micromirror for an optical cross-connent,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2000, pp. 93-96.
[7] G. D. J. Su, H. Nguyen, P. Paterson, H. Toshiyoshi, and M. C. Wu, “Surface-micromachined 2D optical scanners with high-performance single-crystalline silicon micromirrors, ” Proc. 2000 Conf. On Lasers and Electro-Optics/Quantum Electronic and Laser Science (CLEO/QELS 2000), San Francisco, CA, May 7—10, 2000.
[8] R. Holzer, I. Shimoyama, and H. Miura, “Lorentz force actuation of flexible thin-film aluminum microstructure,” IEEE International Conference on Intelligent Robots and System, vol. 2, Piscataway, NJ, 1995, pp. 156-161.
[9] E. Obermeier, J. Lin, and V. Schlichting, “Design and fabrication of an electrostatically driven microshutter,” Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators(Transducer ‘93), Yokohama, Japan, June, 1993 , pp. 132-135.
[10] 吳東權, 陳秉中, 周敏傑, 鄭建華, 洪春長, 董月嬌, “微機電系統專題系列之四~微機電系統之應用,” 中國機械工程學會雙月刊, 204期, pp. 69-81.
[11] M. H. Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, “Micromachined polysilicon microscanners for barcode readers,” IEEE Photonics Technology Letters, vol. 8, pp 1707-1709, 1996.
[12] D. Chauvel, N. Haese, P.A. Rolland, D. Collard, and H. Fujita, “A micro-machined microwave antenna integrated with its electrostatic spatial scanning,”, The Tenth Annual International Workshop on Microelectromechanical System , Nagoya, Japan, January, 1997, pp 84-89.
[13] R. A. Buser, N. F. de Rooij, H. Tischhauser, A. Dommann and G. Staufert, “Biaxial scanning mirror activated by bimorph structures for medical applications,” Sensors and Actuators A, vol. 31, pp 29-34, 1992.
[14] N. C. Tien, O. Solgaard, M. -H. Kiang, M. Daneman, K. Y. Lau, and R. S. Muller, “Surface-micromachined mirrors for laser-beam positioning,” Dig. Tech. Papers, 8th Int. Conf. Solid-State Sensors and Actuators (Transducer ’95), Stockholm, Sweden, pp 352-355.
[15] J. Hsieh, W. -J. Chen, and W. Fang, “Toward the Micromachined Vibrating Gyroscope Using (111) Silicon Wafer Process,” SPIE Micromachining and Microfabrication, San Francisco, CA, Oct. 2001, SPIE vol. 4557, pp.40-48.
[16] K. E. Petersen, “Siliocon torsional scanning mirror,” IBM J. Res. Develop., vol.24, pp 631, 1980.
[17] K. E. Petersen, “Siliocon as a mechanical material,” Proceeding of the IEEE, vol. 70, pp 442-444, 1982.
[18] H.Toshiyoshi, H. Fujita, T. Kawai, and T.Ueda, “Piezoelectrically operated actuators by quartz micromachining for optical application,” IEEE Micro Electro Mechanical System Workshop, Fort Lauderdale, FL, 1993, pp 133-138.
[19] J. Buhler, J. Funk, O. Pual, F. P. Steiner and H. Baltes, “Thermally actuated CMOS micromirrors,” Sensors and Actuators A, vol. 46-47, pp 572-575, 1995.
[20] W. Benecke, and W. Riethmuller, “Applications of silicon-microactuators based on bimorph structures,” Proceedings of the IEEE MEMS’89 Workshop, Salt Lake City, UT, Feb. 1989, pp. 116 —120.
[21] J.M. Noworolski, E.H. Klaassen, J.R. Logan, K.E. Petersen, E. Kurt, and N.I. Maluf, “Process for in-plane and out-of plane single-crystal-silicon thermal microactuators,” Sensors and Actuators A, vol. 55, pp. 65-69, 1996.
[22] S. Schweizer, S. Calmes, M. Laudon, and P. Remaud, “Thermal actuated optical microscanner with large angle and low consumption,” Sensors and Actuators A, vol. 76, pp. 470-477, 1999.
[23] 羅炯成, “新型電熱式出平面微致動器之研究,” 國立清華大學動機系碩士論文, 2000.
[24] 陳文誌, “單層薄膜出平面微電熱式致動器,” 國立清華大學動機系碩士論文, 2001.
[25] M. Fischer, M. Nagele, D. Eichner, C. Schollhorn, and R. Strobel, “Integration of surface-micromachined polysilicon mirrors and a standard CMOS process,” Sensors and Actuators A, vol. 52, pp 140-144, 1996.
[26] P. Jaecklin, C. Linder, and N. F. de Rooij, “Line-addressable torsional micromirrors for light modulator arrays,” Sensors and Actuators A, vol. 41-42, pp 324-329, 1994.
[27] J. Buhler, J. Funk, J. G. Korvink, F. P. Steiner, P.M. Sarro, and H. Baltes,”Electrostatic aluminum micromirrors using double-pass matellization,” Journal of Microelectromechanical System, vol.6, pp 126-135, 1997.
[28] P. Jaecklin, C. Linder, J. Brugger, and N. F. de Rooij, “Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum,” Sensors and Actuators A, vol. 43, pp 269-275, 1994.
[29] Fischer, H. Graef, and W. von Munch,“Electrostatically deflectable polysilicon torsional mirrors,” Sensors and Actuators A, vol. 44, pp 83-89, 1994.
[30] C. W. Storment, D. A. Borkhoder, V. Westerlind, J. W. Suh, N. I. Mulef, and G. Kovacs, “Flexible, dry-released process for aluminum electrostatic actuators,” Journal of Microelectromechanical System, vol. 3, pp 290-296, 1994.
[31] W. Chung, J. W. Shin, Y. K. Kin, and B. S. Han, “Design and fabrication of micromirror supportsed by electroplated nickle posts,” Sensors and Actuators A, vol. 54, pp 464-467, 1996.
[32] J. Hsieh and W. Fang, “Fabrication of Micro Torsional Actuator Using Surface Plus Bulk Micromachining Processes,” SPIE Micromachining and Microfabrication Conference, Santa Clara, CA, Sept.1998.
[33] J. Hsieh and W. Fang, “Fabrication and Measurement of an Improved Micro Electrostatic Torsional Actuator,” Transducers’99, Sendai, Japan, June 1999.
[34] J. Hsieh and W. Fang, “A Novel Microelectrostatic Torsional Actuator,” Sensors and Actuators A, Vol. 79, pp. 64-70, 2000.
[35] H.-Y. Lin and W. Fang, “The Rib-Reinforced Micromachined Beam and Its Application,” Journal of Micromechanics and Microengineering, Vol. 10, pp. 93-99, 2000.
[36] H.-Y. Lin and W. Fang, “Torsional Mirror with an Electrostatically Driven Lever-Mechanism,” the IEEE Optical MEMS 2000 , Kauai, Hawaii, 2000, pp. 113-114.
[37] H.-Y. Lin H.-H. Hu, W. Fang, and R.-S. Huang, "High resolution micromachined scanning mirror," International Conference on Solid-State Sensors and Actuators - Transducer'01 / Eurosensors XV, Munich, Germany, June 2001, pp. 1310-1313.
[38] L.Y. Lin, S.S Lee, M.C Wu, and K.S.J. Pister, “Micromachined integrated optics for free-space interconnections,” Jourrnal of Micro Electro Mechanical Systems, pp. 77, 1995.
[39] E.E Hui, R.T. Howe, and M.S Rodgers,” Single-step assembly of complex 3-D microstructures,” The Thirteenth Annual International Conference on Micro Electro Mechanical Systems, Miyazaki, Japan , January, 2000, pp. 602 —607.
[40] M. H. Kiang, O. Solgaard, K. Y. Lau, R. S. Muller, “Electrostatic Combdrive-Actuated Micromirrors for Laser-Beam Scanning and Positioning,” IEEE/ASME J. of Microelectromechanical Sys., Vol. 7, pp. 27-37, 1998.
[41] M. H. Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, "Design and Fabrication of High-Performance Silicon Micromachined Resonant Microscanners for Optical Scanning Applications," Integrated Photonics Research Conference, Boston MA, April, 1996, p.5 .
[42] V. Milanovic, M. Last, and K.S.J. Pister, " Torsional micromirror with lateral actuators," International Conference on Solid-State Sensors and Actuators - Transducer'01 / Eurosensors XV, Munich, Germany, June 2001, pp. 1298-1301.
[43] J.-L.A. Yeh, C.-Y. Hui, and N.C. Tien “Electrostatic model for an asymmetric combdrive, “Journal of Microelectromechanical Systems, vol.9, pp. 126 —135, 2000.
[44] J.-L.A. Yeh, J. Hongrui, and N.C. Tien,”Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator,” Journal of Microelectromechanical Systems, vol. 8, pp. 456 —465, 1999.
[45] J.-M. Kim, Y.-C. Ko, D.-H. Kong, J.-M. Kim, K. B. Lee, and D.-Y. Jeon,“Fabrication of silicon optical scanner for laser display,” the IEEE Optical MEMS 2000 , Kauai, Hawaii, Aug., 2000, pp. 13-14.
[46] R.A. Conant, J.T. Nee, K.Y. Lau, and R.S Muller ,“Dynamic deformation of scanning mirrors,” the IEEE Optical MEMS 2000 , Kauai, Hawaii, Aug., 2000, pp. 49-50.
[47] J.T. Nee, R.A. Conant, M.R. Hart, K.Y. Lau, and R.S Muller ,“Stretched-film micromirrors for improved optical flatness,” the IEEE Optical MEMS 2000 , Kauai, Hawaii, Aug., 2000, pp. 9-10.
[48] E.E Hui, R.T. Howe, and M.S Rodgers,” Single-step assembly of complex 3-D microstructures,” The Thirteenth Annual International Conference on Micro Electro Mechanical Systems, Miyazaki, Japan , January, 2000, pp. 602 —607.
[49] J. L. Wu, M. Nakahata, and S. Kawamura, “A New Head Mounted Display System with Adjustable Disparity for High Depth-Performance,” IEEE International Conference on Systems Man and Cybernetics, Vol 1, 1995.
[50] T. W. Rowley, IEE Colloquium on Real World Visualisation - Virtual World - Virtual Reality, 1991.
[51] M. H. Kiang, D. A. Francis, C. J. Chang-Hasnain, O. Solgaard, K. Y. Lau, and R. S. Muller, “Actuated polysilicon micromirrors for raster-scanning displayers,” Solid State Sensors and Actuators TRANSDUCERS '97, Chicago, IL, June, 1997.
[52] http://www.mvis.com/
[53] J. Hsieh, C. -C. Chu, and W. Fang,, “On the Driving Mechanism Design for Large Amplitude Electrostatic Actuation,” ASME Proceedings of the 2001 International Mechanical Engineering Congress and Exhibition (IMECE), New York, NY, Nov. 2001, IMECE2001/MEMS-23804.
[54] 謝哲偉、朱健誠、陳文誌、方維倫, “高深寬比BELST製程於振動式微陀螺儀之應用”中國機械工程學會第十八屆全國學術研討會, 台北, 九十年十二月.
[55] J. Hsieh, C. -C. Chu, W. -J. Chen, and W. Fang, “Design and Fabrication of (111) SCS Micro Gyroscope”, 第五屆奈米工程及微系統技術研討會, 新竹, 九十年十二月.
[56] E. Bassous, and A.C. Lamberti, “Highly selective KOH-based etchant for boron-doped silicon structures”, J. Microelectronic Engineering, vol.9, pp. 167-170, 1989.
[57] A. Merlos, M. Acero, M. H. Bao, J. Bausells, and J. Esteve, “TMAH/IPA anisotropic etching characteristics”, Sensors and Actuators A, vol.37-38, pp. 737-743, 1993.

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