臺灣博碩士論文加值系統

本篇論文主要研究週期電場極化反轉之鈮酸鋰與摻雜鎂離子鈮酸鋰之製作。其中包含理論分析、模擬與最佳化參數。藉由我們建立的理論分析與最佳化參數的步驟，我們成功製作週期在4m以上，0.5mm厚的週期電場極化反轉之鈮酸鋰晶片，光學測量顯示4m週期電場極化反轉之鈮酸鋰晶片的轉換效率達2.4％/W/cm，6.5m週期電場極化反轉之鈮酸鋰晶片的轉換效率達1.8∼2％/W/cm。我們也成功製作了0.5mm厚週期大於18m的週期電場極化反轉之鈮酸鋰晶片。對，另外摻雜鎂離子鈮酸鋰之製作，也成功到達週期大於10m的晶片製作。我們也研發出數種新穎的電極結構以進一步改善所製作之週期電場極化反轉之鈮酸鋰晶與摻雜鎂離子鈮酸鋰晶片的品質與非線性頻率轉換效率。其中包括交錯梳子結構已降低在週期電場極化反轉時電場的交互干涉影響；分段式電極結構以最佳化單一次週期電場極化反轉時的面積條件。為了更進一步的再改善週期電場極化反轉時的成核作用，我們也設計了幾種多角電極結構，已增進週期電場極化反轉時的成核密度。另外，我們也改善週期電場極化反轉時所使用的設備夾具，由原先傳統的液態式電極夾具，進展為由電腦控制的固態電極平台，並加裝溫度控制設備，使得在週期電場極化反轉時的控制條件更加穩定，並且有助於週期電場極化反轉摻雜鎂離子鈮酸鋰的製作。

This work concentrates on developing PP-something devices with high fidelity domain controllability for use in the commercial and academic applications that use QPM technology. This study also attempts to provide further insight into the kinetics of domain formation to elucidate a universal model for the fabrication of PPCLN, PP-MgO:CLN, and other advanced materials such as MgO:SLN, SLT, and MgO:SLT among others. The model descried in Chapter 2 is a general discussion of domain evolution kinetics, dominated factors for domain quality and the optimization method for electric field poling of ferroelectric crystals. The characterizing steps and method of optimize each dominated factors in Chapter 5 provide an example for developing poling process of new materials. We provide a general guide for characterizing and fabrication of advance crystals. This includes nucleation optimization, optimization of poling field through compromise among sensitivity of wall velocity to applied field, nucleation rate and switching time. The characteristic of different crystal can be included in the pool of utilizable factors, thus the temperature dependence of conductivity, switching time and
wall velocity; dependence of coercive field and wall velocity on the defect structure. Few advance techniques have been introduced in order to help in pushing down to shorter grating periods, this includes interlace-comb structure, sectional structure and chemical patterning. A compact, liquid electrolyte free and computer controlled poling station were introduced. Through this setup, it is possible to alter the crystal property during poling process, precise control of domain duty cycle, shorten the processing time of lithography patterning (if vacuum is used as insulator instead of
photoresist) and increase wafer utilization. From this research, we successfully fabricated high fidelity,
0.5mm-thick PPCLN with grating periods above 4mm in a reasonable length (e.g. 5cm). The measured conversion efficiencies of 4mm-period and 6.5mm-period PPCLN are 2.4%/W/cm and 1.8~2%/W/cm respectively. A recipe for fabricating 1mm-thick PPCLN was introduced. The available grating periods is above 18mm. Through the optimization process of PPMgO:CLN we obtained a nucleation density of
0.2~1.2 nuclei per micron. From our knowledge it is the first time that an exponential relationship between switching time/current and temperature have been measured, which is similar to the exponential relationship between switching time/current and applied field presented in other articles.
Through this research we successfully fabricated high fidelity, 0.5mm-thick PPMgO:CLN with grating periods above 10mm in a reasonable length.

Abstract
摘要
致謝
Table of content
List of Figures
List of Tables
CHAPTER1.Introduction 1
1.1 Motivation─ need for full-color laser source
1.2 Strategy for developing materials
1.3 Quasi-phase matched second harmonic generation theory
1.3.1 Spatial domain
1.3.2 Fourier transformation
1.3.3 Tuning and tolerance
1.4 Main contribution of this research
1.5 Overview of dissertation
CHAPTER 2. Modeling and characterization of domain inversion process
2.1 Background on domain inversion of ferroelectrics
2.2 Modeling of the electric field poling
2.2.0 Prior work on electric field periodically poled lithium niobate
2.2.1 Domain kinetics during poling process
2.2.2 Further discussion in domain inversion process
2.3 Optimization and the available control parameters in electric field poling
2.3.0 Voltage waveform optimization
2.3.1 Fabrication process
2.3.2 Pattern issue
2.3.3 Contrast improvement
2.3.4 Switching time and peak switching current
2.3.5 Area dependence
CHAPTER 3. Fabrication of the electric field periodicallypoled congruentlithium niobate
3.1 Lithographic process
3.1.1 Fabricating high- fidelity photoresist pattern
3.1.2 Metal electrode and improved lift-off process
3.2 Patterning and fabricating periodic poled LiNbO3 with period less than 7mm with nonlinear performance testing
3.2.1 6.5mm-period PP-CLN
3.2.2 Second-harmonic generation from 1064nm to 532nm
3.2.3 near 4mm-period PP-CLN
3.3 Fabrication of large-aperture (1mm-thickness) PPCLN
3.3.1 Poling in high field region
3.3.2 Poling in low current region
3.3.3 Poling in low field region with low poling current limitation
CHAPTER 4. Novel patterning structure and poling setup for domain inversion process
4.1 Introduction
4.2 Interlaced comb-like structure
4.3 Sectional structure
4.4 Poling station
CHAPTER 5. Periodical poling of 5mol% MgO-doped congruent lithium niobate crystal
5.1 Introduction
5.2 Switching time
5.3 Nucleation
5.3.1 Nucleation at High Temperature (120oC)
5.3.2 Nucleation at Mid Temperature (80oC)
5.3.3 Nucleation at Room Temperature
5.3.4 -Z NiCr
5.4 Optimization of the poling field
CHAPTER 6. Conclusion

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