臺灣博碩士論文加值系統

本論文採用新穎設計技術研究發展完成靈巧的微光學開關，在機構設計方面，反射鏡面是設計在由四根懸臂樑所支撐的薄膜平台上，並可藉由電磁力驅動產生垂直作動；在製程方面，以準分子雷射加工懸吊薄膜之圖案，可增進元件結構設計的多樣性；在光纖傳輸方面，是以凸角補償蝕刻技術在V型槽內建構小凸塊，再由黃光製程批次製作可精確定位的微球透鏡，改善光纖傳輸的耦合損失；在微致動器設計方面，首先以Ni/Fe金合包裹整個平面線圈，以有效的集中磁通量改善電磁出力不足之問題，並利用濺鍍及低溫回火技術沈積Fe/Pt厚膜永磁材料增加致動器的靈巧性。爾後由可定義圖層之感光性高分子材料作為晶片接合之介質層，以晶片對準與低溫接合技術完成垂直作動式之微光學開關。當以低能量雷射光束直接導入微光學開關中，在其反射端所測得的光能量強度有96.1%約是-0.25dB的損失，在通過端所測得的光能量至少有99%的強度以上；若先把雷射光束聚焦於光纖內，在反射輸出端仍有不錯的光能量強度，而在通過端所測得的光能量強度為70%，約為-1.55dB的損耗，對於薄膜彈性機構的工作頻率為1.8kHz，其工作次數為2´106次。

An innovative technology such as high power micro-electromagnetic actuator has been involved in this dissertation to fabricate a micro-optical switch. Precise substrate etching technique is also applied to form functional mesa in the silicon-based v-groove to enhance the fiber to optical switch coupling efficiency. On the other hand, micro-ball lens is developed through lithography method with precise alignment and configuration. It improves the coupling performance significantly. As to the design of microactuator, close loop of soft magnet, Ni/Fe 80/20, is used to concentrate the magnetic flux to compensate the shortage of the microactuator’s output force. Furthermore, hard magnet is sputtered with less than 300°C on the suspension diaphragm to reach the two-way actuation function, i.e., repulsive and attractive force that will increase the mobility of the microactuator. Patternable bonding technique with low bonding temperature and without electro field disturbance uses photosensitive polymer to define proper bonding pad to finish multi-substrate optical switch. Then, laser beam with low power density is coupled into the optical switch, 96.1% beam power is reflected with loss less than -0.25dB. If the laser beam is focused before coupling into fiber, the transmittance of laser beam through the micro ball lens is about 70 % with loss less than —1.55dB. The final test results show that switch frequency is larger than 1.8KHz; more thane 2´106 working cycle is found.

目 錄
中文摘要．．．．．．．．．．．．．．．．．．．．．．．．．．i
英文摘要．．．．．．．．．．．．．．．．．．．．．．．．．．ii
誌謝．．．．．．．．．．．．．．．．．．．．．．．．．．．．iii
目錄．．．．．．．．．．．．．．．．．．．．．．．．．．．．iv
圖目錄．．．．．．．．．．．．．．．．．．．．．．．．．．．vi
表目錄．．．．．．．．．．．．．．．．．．．．．．．．．．．xi
第一章 前言
1-1 背景．．．．．．．．．．．．．．．．．．．．．．．．．．1-1
1-2 研究動機與目的．．．．．．．．．．．．．．．．．．．．．1-5
1-3 研究概要．．．．．．．．．．．．．．．．．．．．．．．．1-6
第二章 文獻回顧
2-1 開關機械結構．．．．．．．．．．．．．．．．．．．．．．2-1
2-2 驅動源種類．．．．．．．．．．．．．．．．．．．．．．．2-6
2-3 鏡片結構．．．．．．．．．．．．．．．．．．．．．．．．2-11
第三章 結構設計
3-1 上板設計．．．．．．．．．．．．．．．．．．．．．．．．3-3
3-2 致動元件．．．．．．．．．．．．．．．．．．．．．．．．3-9
3-2-1 封閉磁路設計．．．．．．．．．．．．．．．．．．．．．3-10
3-2-2 垂直場材料特性．．．．．．．．．．．．．．．．．．．．3-14
3-2-3 平面線圈設計分析與模擬．．．．．．．．．．．．．．．．3-17
3-3 光纖耦合結構設計．．．．．．．．．．．．．．．．．．．．3-25
3-3-1 光纖耦合分析．．．．．．．．．．．．．．．．．．．．．3-25
3-3-2 V型槽內光纖定位裝置之設計．．．．．．．．．．．．．．3-34
3-4 晶片結合．．．．．．．．．．．．．．．．．．．．．．．．3-38
第四章 製程設計
4-1 上板製程
4-1-1 聚亞醯胺薄膜材料．．．．．．．．．．．．．．．．．．．4-2
4-1-2 懸吊薄膜的製作．．．．．．．．．．．．．．．．．．．．4-3
4-1-3 準分子雷射加工．．．．．．．．．．．．．．．．．．．．4-11
4-1-4 SU-8厚膜光阻．．．．．．．．．．．．．．．．．．．．．4-15
4-1-5 微反射鏡面製作．．．．．．．．．．．．．．．．．．．．4-18
4-2 下板製程
4-2-1 光纖定位平台製作．．．．．．．．．．．．．．．．．．．4-22
4-2-2 微球透鏡的製作技術．．．．．．．．．．．．．．．．．．4-23
4-2-3 平面線圈的製作．．．．．．．．．．．．．．．．．．．．4-29
4-3 晶片接合技術研究．．．．．．．．．．．．．．．．．．．．4-33
第五章 元件性能量測
5-1 即時量測系統．．．．．．．．．．．．．．．．．．．．．．5-1
5-1-1 訊號擷取與處理．．．．．．．．．．．．．．．．．．．．5-2
5-1-2 量測平台之建構．．．．．．．．．．．．．．．．．．．．5-4
5-2 磁場強度量測．．．．．．．．．．．．．．．．．．．．．．5-8
5-3 薄膜位移量測．．．．．．．．．．．．．．．．．．．．．．5-9
5-4 光學訊號量測．．．．．．．．．．．．．．．．．．．．．．5-13
第六章 結論與建議
6-1 結論．．．．．．．．．．．．．．．．．．．．．．．．．．6-1
6-2 建議．．．．．．．．．．．．．．．．．．．．．．．．．．6-2
參考文獻．．．．．．．．．．．．．．．．．．．．．．．．．參-1
作者介紹．．．．．．．．．．．．．．．．．．．．．．．．．作-1
附錄．．．．．．．．．．．．．．．．．．．．．．．．．．．附-1

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