臺灣博碩士論文加值系統

摘要
近年來隨著微機電系統(MEMS, Micro Electro Mechanical System)技術之蓬勃發漲，使得微小，高反應速度之流體元件得以研製，然而常使用微流體元件之冷卻系統循環、生醫檢測、藥物輸送、總體分析系統（uTAS）、燃料電池等裝置中，往往主宰成功與否之元件，便是微流體元件之部分，其中更以微液體輸送為之關鍵。
本研究計畫即針對微液滴衝擊式冷卻系統之液體回收部份，做設計與製作之研發，希望研發出一種被動式、自發性的液體回收裝置，好在製程簡單、整合性高、重複使用性高的考量下，充分與微液滴衝擊式冷卻器组裝配合，以達到一個結合衝擊流(impinging cooling)與相變化 (phase-change) 且能將液體回收再用的散熱裝置，以實際應用於市面上。

目 錄
摘要 I
誌謝 II
目錄 III
圖目錄 V
表目錄 XI
第一章 緒論 1
1-1研究動機與目的 1
1-2章節概述 5
1-3文獻回顧 6
第二章 原理分析與模擬 19
2-1毛細作用 19
2-2親水性與非親水性 20
2-3流動之理論推導 22
2-4流動之模擬 23
第三章 製程設計與規劃 36
3-1元件設計 36
3-1.1雙層微流道結構之設計 36
3-1.2微液體流動迴路裝置之設計 39
3-2製程流程 42
3-2.1雙層微流道結構之製程 42
3-2.2微液體流動迴路裝置之製程 45
3-3 SU-8光阻之材料特性 48
3-4保護蓋之製作 49
3-5表面親水化之處理 51
3-6實驗拍攝裝置 52
第四章 實驗成果與討論 54
4-1表面親水處理問題 54
4-2水平漸縮流道與雙層流道拍攝結果與討論 60
4-3迴路流道拍攝結果與討論 73
4-4蒸氣凝結於流道之拍攝結果與討論 83
第五章 結論與未來研究方向 85
5-1結論 85
5-2未來研究方向 85
參考文獻 87

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