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研究生:郭聰榮
研究生(外文):Tsung-Jung Kuo
論文名稱:光子晶體形狀的控制及製作
論文名稱(外文):Patterning Artificial Defects onto Macroporous Structure
指導教授:陳家俊陳家俊引用關係
指導教授(外文):Chia-Chun Chen
學位類別:碩士
校院名稱:國立臺灣師範大學
系所名稱:化學研究所
學門:自然科學學門
學類:化學學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:44
中文關鍵詞:光子晶體
外文關鍵詞:photonic
相關次數:
  • 被引用被引用:2
  • 點閱點閱:186
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我們利用重力沉澱的方法,讓直徑0.5微米的二氧化矽粒子在氧化銦錫導電玻璃上以自組裝的方式,形成排列整齊的最密堆積結構。經過有系統的研究電流強度、沉澱時間、電解質濃度、溶劑和溫度等條件後,可以用電鍍的方式,在排列整齊的二氧化矽粒子基板上電鍍出硒化鋅、硒化鎘、碲化鎘和砷化鎵四種不同的半導體薄膜。然後蝕刻掉二氧化矽,就可以得到三維的半導體孔洞結構,此結構的三維週期排列、結構的完整性和光學性質都很優異。
藉著在氧化銦錫導電玻璃上用光微影蝕刻的方法設計出缺陷,然後利用重力沉澱的方式在蝕刻過的玻璃上形成蛋白石結構。再使用電化學沉澱的方法電鍍不同的半導體,電鍍完後用氫氟酸蝕刻二氧化矽粒子,就可以在多孔洞結構中形成微米通道。此通道的寬度和深度約在2到4微米之間而且是直角形狀。
We prepare close packed colloidal arrays of 0.5 mm silica assembled on an indium tin oxide (ITO) substrate surface using sedimentation. Through systematic studies on current density, deposition time, concentrations of electrolytes, solvents and temperatures etc., we are able to fabricate the films of four different semiconductors, ZnSe, CdSe, CdTe, GaAs, onto the silica arrays by electrochemical depositions. Following by removal of silica, 3D macroporous structures made from those semiconductors are built, and the structure exhibit excellent 3D periodicity, uniformity and also optical properties.
Following by the pattern of artificial defects onto ITO substrate, we fabricate microchannels that have been created artificially using lithography method. After sedimentation silica arrays assembled on ITO substrate, it can be used as a template for the electrochemical depositions of various semiconductors. The microchannels inside a macroporous structure were fabricated after the template was immersed in HF solution. The microchannels have a width and depth of 2~4 mm and a rectangularity.
總目錄…………………………………………………………………Ⅰ
中文摘要………………………………………………………………Ⅲ
英文摘要………………………………………………………………Ⅳ
第一章 緒論…………………………………………………………1
1-1 光子晶體的發展…………………………………………………1
1-2 光子晶體簡介……………………………………………………2
1-2-1 一維光子晶體………………………………………………2
1-2-2 二維光子晶體………………………………………………5
1-2-3 三維光子晶體………………………………………………6
1-3 半導體光子晶體結構…………………………………………10
1-4 光子晶體波導…………………………………………………11
第二章 實驗…………………………………………………………14
2-1 研究動機與目的………………………………………………14
2-2 形成蛋白石結構………………………………………………15
2-2-1 二氧化矽粒子的合成………………………………………15
2-2-2 重力沉澱形成蛋白石結構…………………………………17
2-3 製作高排列性孔洞結構………………………………………19
2-4 製作光子晶體波導……………………………………………22
2-4-1 微影蝕刻……………………………………………………23
2-4-2 波導的製作…………………………………………………27
第三章 結果與論…………………………………………………28
3-1 電化學沉澱的條件與影響……………………………………28
3-2 反蛋白石結構穿透光譜的量測………………………………33
3-3 光子晶體波導的製備…………………………………………35
第四章 結論…………………………………………………………40
未來展望………………………………………………………………41
參考文獻………………………………………………………………42
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