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研究生:鍾易庭
研究生(外文):I-Ting Chung
論文名稱:微波單石積體電路中平面式電感器與場效電晶體之製作
論文名稱(外文):Fabrication of planar inductor and field-effect transistor for MMICs
指導教授:程光蛟
指導教授(外文):Kwong-Kau Tiong
學位類別:碩士
校院名稱:國立海洋大學
系所名稱:電機工程學系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:50
中文關鍵詞:微波積體電路電感場效電晶體
外文關鍵詞:MMICinductorFET
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本文首先探討的是微波單石積體電路中平面式電感的製作,因製程設備的關係,因而想到利用旋轉式塗佈玻璃SOG(Spin-on-glass)來完成空氣橋的方式跨越金屬,來製作出電感。文中並有闡述電感的等效電電路模型參數值、以及如何利用量測出的S參數來求得電感的Q值以及L值。
本文亦有介紹利用光阻的再回流(Reflow)以及SOG來製作出閘極長度小於1μm的場效電晶體,進而增進場效電晶體的高頻性能。

n this thesis,we present the fabrication of planar inductor in the first. Because the limitation of equipment,we use the Spin-on-glass(SOG)to complete the fabrication of Air-bridge which cross the spirals between the central end of the inductor and the metal pad which is placed near the external of the inductor. Then we will expand the equivalent circuit model of a spiral inductor and how to use the measurement of S-parameter to obtain the Q and inductance of a spiral inductor.
In the second,we use the Reflow of photoresist and SOG to fabricate the field-effect transistor with the gate length is smaller then 1μm. By the way, we can improve the high frequency performance of the field-effect transistor.

第一章 導論
第二章 電感的計算與製程
§2-1矩形與圓形之螺旋型電感
§2-2 螺旋型電感之物理等效模型
§2-3 製程
第三章 電感之量測結果與分析
§3-1 電感量測之S參數與Y參數
§3-2 量測的結果與Q值、L值
第四章 場效電晶體
§4-1 理論分析
§4-2 元件製作
§4-3 實驗結果

[1] R. P. Ribas,N. Bennouri,J. M. Karam and B. Courtois“GaAs MEMS Design Using 0.2μm HEMT MMIC Technology”,IEEE Gallium Arsenide Integrated Circuit (GaAs IC) Symposium,Technical Digest,19th Annual,pp127-130,1997
[2] Alexandru Muller et al.,“Passive devices on GaAs substrate for MMICs applications”,IEEE Semiconductor Conference,International ,vol.1,pp185-188,1996.
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[5] MARTIN CAULTON,STANLEY P. KNIGHT and DANIEL A. DALY,“Hybrid Integrated Lumped-Element Microwave Amplifiers”,IEEE TRANS. ON ELECTRON DEVICES,VOL. ED-15,NO.7,JULY 1968.
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[7] C. Patrick. Yue et al.,“A Physical Model for Planar Spiral Inductors on Silicon”,IEDM PROC. pp155-158,1996.
[8] C. Patrick.Yue et al.,“Design strategy of on-chip inductors for highly integrated RF systems”,in Design Automation Conference,PROC. 36th pp982-987,1999.
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[10] John R. Long and Miles A. Copeland,“The Modeling,Charactrrization,and Design of Monolithic Inductor For Silicon RFIC”,Solid-State Circuit,vol. 32,pp357-368,1997.
[11] Min Part,Seonghearn Lee,Hyun Kyu Yu and Kee Soo Nam,“OPTIMIZATION OF HIGH Q CMOS-COMPATIBLE MICROWAVE INDUCTORS USING SILICON CMOS TECHNOLOGY”,IEEE Radio Frequency Integrated Circuits Symposium 1997.
[12] Joachim N. Burghartz et al.,“Spiral Inductors and Transmission Lines in Silicon Technology Using Copper amascene Interconnects and Low-Loss Substrates”IEEE Transactions on Microwave Theory and Techniques,vol. 45,no. 10 ,October 1997.
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[15] 本城 和彥 原著,呂學士 編譯,“微波通訊半導體電路”

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