跳到主要內容

臺灣博碩士論文加值系統

(3.229.117.123) 您好!臺灣時間:2022/08/12 18:10
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

: 
twitterline
研究生:陳益德
研究生(外文):Chen Yi-de
論文名稱:音圈馬達在主動式避震平台上之應用
論文名稱(外文):The application of voice coil motors for the active vibration table
指導教授:傅群超
學位類別:碩士
校院名稱:國立海洋大學
系所名稱:機械與輪機工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:44
中文關鍵詞:音圈馬達主動式避震凹口濾波器適應性前饋控制擾動觀察器
外文關鍵詞:voice coil motoractive vibrationnotch filteradaptive feedforward controldisturbance observer
相關次數:
  • 被引用被引用:9
  • 點閱點閱:488
  • 評分評分:
  • 下載下載:152
  • 收藏至我的研究室書目清單書目收藏:5
摘要
近年來不論國內或國外IC相關產業都呈現快速成長的趨勢,由於IC是屬於高科技、高精密之製造業,其生產機械對震動非常敏感。因此如何將精密之製造或量測設備與地板的輕微震動隔離便成為非常重要的問題。而避震裝置可分為被動式與主動式:雖然被動式避震器結構最簡單,價格也最便宜,但由於被動式避震器對於低頻震動的抑制能力比較差,其應用範圍因此受到限制;而主動式避震器由於具有較大的隔震頻寬,且其特性又可依外在環境的變化做適當的調整,因此構造雖然較複雜,成本也較高,但仍廣為精密機械所採用。
雖然線性馬達應用於主動避震器有上述許多優點,但因為相關研究剛起步,且關鍵技術大多掌握在美日等國家。所以本計畫擬自行開發一套線性馬達主動避震器,除希望藉此培訓熟悉控制與機電整合的高科技人才,並希望此項技術能在國內紮根,進而發展出屬於自己的線性致動器線性馬達的工業。
Abstract
The industry relative to ICs, either inside or outside my country, has a higher growth rate than the others. Since IC industry is high tech and high precision manufacturing, their production machines, it is very important to attenuate micro-vibrations caused by various sources. Vibration isolators can be divided into passive types and active types. Although passive vibration isolators have the advantages of simple structures and low cost. However, the applications of passive vibration isolators are limited due to weak performance under low frequency vibrations. On the contrary, active vibration isolators can work well under low frequency vibrations, and their characteristics can also be appropriately tuned dependent on the environments. Hence, active vibration isolators have been extensively used to solve vibration problems in the spite of higher cost and complexity.
Although, linear actuators have the above advantages, only the countries such as Japan and USA know the most key techniques and their products are very expensive. This proposal is aimed at developing a linear actuator.
中文摘要................................................... I
英文摘要................................................... II
目錄.......................................................III
圖索引..................................................... V
表索引.....................................................VII
第一章 序論................................................ 1
1.1 前言............................................... 1
1.2 研究背景及目的..................................... 2
1.3 文章架構........................................... 2
第二章系統架構與分析....................................... 4
2.1 系統架構........................................... 5
2.2 音圈馬達........................................... 6
2.2.1 音圈馬達的原理................................. 7
2.2.2 音圈馬達的作動方式............................. 8
2.3 系統動態分析....................................... 9
2.4 系統判別........................................... 12
第三章 設計控制器及模擬.................................... 15
3.1 控制器設計......................................... 15
3.1.1 凹口濾波器..................................... 16
3.1.2 適應性前饋控制器............................... 19
3.1.3 擾動觀察器..................................... 23
3.2 模擬結果........................................... 27
第四章 實驗結果與討論...................................... 30
4.1 輸出電壓與位移量的關係............................. 30
4.2 凹口濾波器的實驗參數............................... 31
4.3 適應性前饋控制器的實驗參數......................... 32
4.4 實驗結果........................................... 32
4.5 結果與討論......................................... 35
4.6 問題與解決方法..................................... 38
第五章 結論與展望.......................................... 41
5.1 結論............................................... 41
5.2 展望............................................... 41
參考文獻................................................... 43
[1]Lin, C. E., and Wang, J. Y., “An active suspension of linear oscillatory actuator using eddy current sensor”, IEEE Instrumentation and Measurement Technology Conference, pp. 1072-1077, 1997.
[2]Kelly, H. -P., “Linear drives,” The Industrial Robot, vol. 20, no.6, pp. 8-11, 1993.
[3]O. Masamitsu, O. Toyomi and W. Mitsuhito, “High speed and high accuracy XY-stage for electronic assembly”, Electronic Manufacturing Technology Symposium, pp. 104-107, 1998.
[4]A. Babinski and T.C. Tsao, “Acceleration feedback design for voice coil actuated direct drive”, American Control Conference, vol. 5, pp. 3713-3717, 1999.
[5]J. A. Wagner, “Access time minimization of a moving coil actuator with volumetric, magnetic and current constraints”, Industry Applications Society Annual Meeting, 1992, Conference Record of the 1992 IEEE, vol. 1,pp. 148-155.
[8]G. M. L. Gladwell, “Vibration control of active structures”, Solid Mechanics and its applications, vol. 50, pp. 65-66, 1997.
[9]H. S. Na and Y. Park, “An adaptive feedforward controller for rejection of periodic disturbances”, Journal of Sound and Vibration, 201(4), pp. 427-435, 1997.
[10]T. Mizuno, M. Moriya and K. Araki, “Robust disturbance cancellation in an active dynamic vibration absorber system”, Control Engineering Practice, vol. 3, No. 6, pp. 773-781,1995.
[11]Karl J. Astrom and Bjorn Wittenmark, “Adaptive Control”, Addison-Wesley Series in Electrical Engineering: Control Engineering, 2nd edition, pp. 41-55, 1995.
[12]Chi-Tsong Chen, “Linear System Theory and Design”, Oxford University Press, 3rd edition, pp 247-251, 1999.
[13]S. Barnett, “Polynomials and Linear Control Systems”, Marcel Dekker, New York, ch.3, 1983.
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top