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研究生:張朝欽
研究生(外文):CHANG, CHAO-CHING
論文名稱:聚亞醯胺-無機氧化物混成光學薄膜之製備及其性質研究
論文名稱(外文):Synthesis and Characterization of Polyimide - Inorganic Oxide Hybrid Optical Thin Films
指導教授:陳文章陳文章引用關係
指導教授(外文):CHEN, WEN-CHANG
學位類別:博士
校院名稱:國立臺灣大學
系所名稱:化學工程學研究所
學門:工程學門
學類:化學工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:英文
論文頁數:149
中文關鍵詞:有機-無機混成材料聚亞醯胺-二氧化矽胺基烷基矽烷封端苯均四酸二酐-二氧化鈦混成光學薄膜光波導材料旋轉塗佈光傳損失
外文關鍵詞:organic-inorganic hybrid materialpolyimide-silicaAPrTMS capped PMDA-titaniahybrid optical thin filmwaveguide materialspin coatingoptical loss
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有機-無機混成材料擁有優良的耐熱性質及光學性質,使其在光學元件具重要應用價值。在本研究中以溶膠法結合旋轉塗佈及多段式烘烤製程製備聚亞醯胺-二氧化矽及胺基烷基矽烷封端苯均四酸二酐-二氧化鈦混成光學薄膜,並研究所製備之混成薄膜的結構、型態、耐熱性及光學性質。
在聚亞醯胺-二氧化矽混成薄膜方面,實驗的結果顯示所製備的混成薄膜有高無機含量與均勻的結構,同時具高透光率、可調整的光學性質,以及優良的表面粗糙度。所製備聚亞醯胺-二氧化矽混成薄膜其折射率隨二氧化矽含量增加而呈線性下降趨勢,而阿貝數則上升。混成薄膜的吸收及雙折射性質則低於原聚亞醯胺薄膜。由聚亞醯胺-二氧化矽混成薄膜所製備的平面光波導,在波長1310 nm的光傳損失值在0.5至1.9 dB/cm,亦低於相對的聚亞醯胺薄膜光傳損失。在本研究中同時研究製備聚亞醯胺-二氧化矽混成薄膜所使用的前驅物溶液之旋轉塗佈特性。最終混成薄膜的厚度對於旋轉塗佈之轉速呈現一負值的指數關係,此指數的絕對值隨著二氧化矽含量增加而降低。此結果說明混成薄膜的厚度可由旋轉塗佈之轉速控制。
高折射率胺基烷基矽烷封端苯均四酸二酐-二氧化鈦混成光學薄膜亦在本研究中製備。結果顯示有機及無機相間成功地由共價鍵鍵結,然而反應中所生成並殘存之錯合物會影響所製備混成薄膜的耐熱性及光學性質。混成薄膜的折射率隨二氧化鈦含量增加呈線性上升趨勢,而阿貝數則下降。在本研究中所製備之聚醯亞胺-二氧化矽及聚醯亞胺-二氧化鈦混成光學薄膜具有高度均勻結構、透光性,以及可調整的光學性質,使其具備光學元件,尤其是光波導材料的應用潛力。

Organic-inorganic hybrid materials with good thermal and optical properties are very important for optical applications. In this study, polyimide-silica and APrTMS capped PMDA-titania hybrid optical thin films were successfully prepared by a sol-gel reaction, combined with spin coating and multi-step curing processes. The structures, morphology, thermal and optical properties of the prepared hybrid thin films were studied.
For the case of polyimide-silica thin films, the experimental results showed that the prepared hybrid thin films could contain high inorganic content with homogeneous structures. They have high optical transparence, tunable optical properties, and very small surface planarity. The refractive indices of the prepared polyimide-silica hybrid thin films decreased linearly with increasing the silica content, while the Abbe numbers showed the opposite trend. The absorption and birefringence of the prepared polyimide-silica hybrids were lower than those of their parent polyimides. The optical losses of the planar waveguides prepared from polyimide-silica hybrids were in the range of 0.5 - 1.9 dB/cm at 1310 nm, which was also lower than that those of their parent polyimides. Spin coating of the precursor solutions for preparing polyimide-silica thin films was also studied. The dependence of film thickness on spin speed was a minus exponent of the spin speed, and the exponents were reducing with increasing the silica contents. The results showed that film thickness of a hybrid thin film could be controlled by the spin speed.
High refractive index APrTMS capped PMDA-titania hybrid optical thin films were also successfully prepared. The results suggested that the chemical bonding existed between the organic and inorganic moieties. However, residues of chelating ligands affected their thermal and optical properties. The refractive indices of the prepared hybrid thin films increased linearly to 1.78 with increasing the titania content, while the Abbe numbers showed a reverse trend. The excellent film uniformity, optical transparency, and tunable optical properties provide the potential applications of the polyimide-silica and polyimide-titania hybrid thin films for optical applications.

CHAPTER 1. ADVANCED ORGANIC - INORGANIC HYBRID MATERIALS AND THEIR OPTICAL APPLICATIONS
1.1. Introduction
1.2. Designs and Synthesis of Organic-Inorganic Hybrid Materials
1.2.1. Materials for Preparing Organic-Inorganic Hybrid Materials
1.2.2. Interactions in Organic-Inorganic Hybrid Materials
1.2.3. Preparation Method of Organic-Inorganic Hybrid Materials
1.2.4. Sol-Gel Methods for Preparing Organic-Inorganic Hybrid Materials
1.3. Organic-Inorganic Hybrid Materials for Optical Thin Films and Waveguide Materials
1.3.1. Fundamental Optical Properties for Applications
1.3.2. Organic-Inorganic Hybrid Optical Thin Films
1.3.3. Organic-Inorganic Hybrid Materials for Waveguide Applications
1.3.4. Conclusions
1.4. Scopes of This Thesis
1.5. References
CHAPTER 2. SYNTHESIS AND CHARACTERISTICS OF POLYIMIDE - SILICA HYBRID OPTICAL THIN FILMS
2.1. Introduction
2.2. Preparation of Polyimide-Silica Hybrid Thin Films
2.2.1. Materials for Preparing Polyimide-Silica Hybrid Thin Films
2.2.2. Preparations of Polyimide-Silica Hybrid Thin Films
2.2.3. Characterization of Polyimide-Silica Hybrid Thin Films
2.3. Analysis and Properties of Polyimide-Silica Hybrid Thin Films
2.3.1. FTIR and NIR Spectra Polyimide-Silica Hybrid Thin Films
2.3.2. SEM and AFM Studies of Polyimide-Silica Hybrid Thin Films
2.3.3. Thermal Analysis of Polyimide-Silica Hybrid Materials
2.3.4. Optical Properties of Polyimide-Silica Hybrid Thin Films
2.3.5. Optical Properties of Planar Waveguides Prepared from Polyimide-Silica Hybrid Thin Films
2.4. Conclusions
2.5. References
CHAPTER 3. HIGH REFRACTIVE INDEX THIN FILMS PREPARED FROM AMINOALKOXYSILANE CAPPED PYROMELLITIC DIANHYDRIDE - TITANIA HYBRID MATERIALS
3.1. Introduction
3.2. Preparation of Aminoalkoxysilane Capped Pyromellitic Dianhydride - Titania Hybrid Thin Films
3.2.1. Materials for Preparing Aminoalkoxysilane Capped Pyromellitic Dianhydride - Titania Hybrid Thin Films
3.2.2. Preparations of Aminoalkoxysilane Capped Pyromellitic Dianhydride - Titania Hybrid Thin Films
3.2.3. Characterizations of Aminoalkoxysilane Capped Pyromellitic Dianhydride - Titania Hybrid Thin Films
3.3. Analysis and Properties of Aminoalkoxysilane Capped Pyromellitic Dianhydride - Titania Hybrid Thin Films
3.3.1. Structure and Thermal Analysis of Aminoalkoxysilane Capped Pyromellitic Dianhydride - Titania Hybrid Thin Films
3.3.2. SEM and AFM Studies of Aminoalkoxysilane Capped Pyromellitic Dianhydride - Titania Hybrid Thin Films
3.3.3. Optical Properties of Aminoalkoxysilane Capped Pyromellitic Dianhydride - Titania Hybrid Thin Films
3.4. Conclusions
3.5. References
CHAPTER 4. DEPENDENCE OF FILM THICKNESS ON SPIN COATING SPEEDS OF POLYIMIDE - SILICA HYBRID THIN FILMS
4.1. Introduction
4.2. Experiment of the Dependence of Film Thickness on Spin Coating Speeds of Polyimide-Silica Hybrid Thin Films
4.2.1. Materials for Preparing Polyimide-Silica Hybrid Thin Films
4.2.2. Preparations of Polyimide-Silica Hybrid Thin Films
4.2.3. Characterizations for Study the Dependence of Film Thickness on Spin Speeds of Polyimide-Silica Hybrid Thin Films
4.3. The Dependence of Film Thickness on Spin Coating Speeds for preparing Polyimide-Silica Hybrid Thin Films
4.4. Conclusions
4.5. References
CHAPTER 5. CONCLUSIONS AND FUTURE WORKS

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