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研究生:蕭文裕
論文名稱:製作高分子光波導之研究
論文名稱(外文):A study on fabrication of polymer optical waveguides
指導教授:王 倫
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:光電工程學研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:英文
論文頁數:61
中文關鍵詞:SU-8光阻感光特性波導三維積體光學多模干涉理論
外文關鍵詞:SU-8resist photosensitivitywaveguidesthree-dimensional integrated opticsmultimode interference theory
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我們對SU-8厚膜光阻進行特性檢測,藉由對製程條件的瞭解,使得我們可以做出具有垂直側壁的結構;並對化學增幅型光阻K30G做感光特性檢測,得到K30G的感光特性參數。藉由對於SU-8操作上的經驗,製作了SU-8波導,並成功地量測到場型。最後,利用多模干涉理論提出一種新的三維積體光學架構。

We characterize thick film photoresist SU-8, and based on the study on fabrication process, we obtain some structures with vertical sidewalls. Besides, we characterize the photosensitivity of the chemical amplified resist K30G and obtain its Dill’s parameters. Based on the experience of processing SU-8, we fabricate a SU-8 waveguide and successfully measure its spatial intensity distribution. Finally, we propose a new three-dimensional integrated optics scheme by employing multimode interference theory.

Chapter1 Introduction
1.1Background
1.2 Outline
Chapter2 Characterization of Photoresist SU-8
2.1 Introduction
2.2 Basic properties of SU-8
2.3 Processing of SU-8
2.4 Theoretical background
2.5 Experimental results
Chapter3 Design, Fabrication and Measurement of Optical
Waveguide
3.1 Introduction
3.2 Numerical calculation
3.3 Fabrication of polymer waveguide
3.4 Measurement of spatial intensity distribution of the
waveguides
Chapter4 Simulation of Three Dimensional Integrated Optics
4.1 Background
4.2 Multimode interference theory
4.3 Preliminary simulation results and possible fabrication
steps
Chapter5 Conclusion and Future Works
5.1 Conclusion
5.2 Future works
References

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