( 您好!臺灣時間:2021/02/26 17:51
字體大小: 字級放大   字級縮小   預設字形  


論文名稱(外文):A study on fabrication of polymer optical waveguides
指導教授:王 倫
外文關鍵詞:SU-8resist photosensitivitywaveguidesthree-dimensional integrated opticsmultimode interference theory
  • 被引用被引用:0
  • 點閱點閱:110
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:22
  • 收藏至我的研究室書目清單書目收藏:0

We characterize thick film photoresist SU-8, and based on the study on fabrication process, we obtain some structures with vertical sidewalls. Besides, we characterize the photosensitivity of the chemical amplified resist K30G and obtain its Dill’s parameters. Based on the experience of processing SU-8, we fabricate a SU-8 waveguide and successfully measure its spatial intensity distribution. Finally, we propose a new three-dimensional integrated optics scheme by employing multimode interference theory.

Chapter1 Introduction
1.2 Outline
Chapter2 Characterization of Photoresist SU-8
2.1 Introduction
2.2 Basic properties of SU-8
2.3 Processing of SU-8
2.4 Theoretical background
2.5 Experimental results
Chapter3 Design, Fabrication and Measurement of Optical
3.1 Introduction
3.2 Numerical calculation
3.3 Fabrication of polymer waveguide
3.4 Measurement of spatial intensity distribution of the
Chapter4 Simulation of Three Dimensional Integrated Optics
4.1 Background
4.2 Multimode interference theory
4.3 Preliminary simulation results and possible fabrication
Chapter5 Conclusion and Future Works
5.1 Conclusion
5.2 Future works

[1]. David A. B. Miller, “Rationale and Challenges for Optical Interconnects to Electronic Chips”, Proceedings of the IEEE, Vol. 88, No. 6, pp. 728-749, 2000.
[2]. David A. B. Miller, “Physical reasons for optical interconnection”, International Journal of Optoelectronics, Vol. 11, No. 3, pp. 155-168, 1997.
[3]. http://public.itrs.net/Files/2001ITRS/Interconnect.pdf
[4]. Joseph W. Goodman, Frederick I. Leonberger, Sun-Yuan Kung, and Ravindra A. Athale “Optical Interconnections for VLSI Systems”, Proceedings of the IEEE, Vol. 72, No 7, pp. 850-866, 1984.
[5]. L. J. Camp, R.Sharma, and M. R. Feldman, “Guided-wave and free-space optical interconnects for parallel-processing system: A comparison,” Appl. Opt., Vol. 33, pp.6168-6180, 1994.
[6]. C. Fan, B. Mansoorian, D. A. Vanblekom, M. W. Hansen, V. H. Ozgue, S. C. Esener, and G. C. Marsden, “Digital free-space optical interconnections: A comparison between of transmitter technologies,” Appl. Opt., Vol. 34, No. 17, pp. 3103-3115, 1995.
[7]. T. Nakahara, S. Matsuo, S. Fukushima, and T. Kurokawa, “Performance comparison between multiple-quantum-well modulator-based and vertical-cavity-surface-emitting-laser-based smart pixels,” Appl. Opt., Vol. 35,pp. 860-871, 1996.
[8]. Ray T. Chen, Lei Lin, Chulchae Choi, Yujie J. Liu, Bipin Bihari, L. Wu, Suning Tang, R. Wickman, B. Picor, M. K. Hibs-Brenner, J. Bristow, and Y. S. Liu “Fully Embedded Board-Level Guided-Wave Optoelectronic Interconnects,” Proceedings of the IEEE, Vol. 38, pp. 780-793, 2000.
[9]. L. Vanwassenhove, R. Bockstaele, R. Baets, M. Brunfaut, W. Meeus, J. Van Campenhout, J Hall, H. Melchior, A. Neyer, J. Van Koetsem, R. King, K. Ebeling, and P. Heremans, “Demonstration of 2-D Plastic Optical Fibre based optical interconnect between CMOS IC`s” OFC, 2001.
[10]. Anuradha M. Agarwal, Ling Liao, James S. Foresi, Marcie R. Black, Xiaoman Duan, and L. C. Kimerling, “Low-loss polycrystalline silicon waveguides for silicon photonics,” J. Appl. Phys., Vol. 80, pp. 6120-6123, 1996.
[11]. Ryoko Yoshimura, Makoto Hikita, Satoru Tomaru, and Saburo Imamura “Low-Loss Polymeric Optical Waveguides Fabricated with Deuterated Polyfluoromethacrylate,” J. Lightwave Techno., Vol. 16, No. 6, pp. 1030-1037, 1998.
[12]. Ravi Selvaray, H. T. Lin, and J. F. McDonald, “Integrated Optical Waveguides in Polymide for Wafer Scale Integration,” J. Lightwave Techno., Vol. 6, pp. 1034-1044, 1988.
[13]. L. Eldada, C. Xu, K. Stengel, LShacklette, and J. T. Yardley, “Laser-fabricated low-loss single-mode raised-rib waveguiding devices in polymers,” J. Loghtwave Techno., Vol. 14, pp. 1704-1713, 1996.
[14]. H. Kragl, R. Hohmann, C, Marheine, W. Pott, and G. Pompe, “Low cost monomode, integrated optics polymeric components with passive fiber-chip coupling,” Electron. Lett., Vol33, pp. 2036-2037, 1997.
[15]. Keven K. Lee, Desmond R. Lim, Hsin-Chiao Luan, Anuradha Agarwal, James Foresi, and Lioel C. Kimerling, “Effect on size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model” Appl. Phys. Lett., Vol. 77, pp. 1617-1619, 2000.
[16]. F. P. Payne and J. P. R. Lacey, Opt. Quantum Electron., Vol. 26, pp. 977, 1994.
[17]. S. M. Garner, Sang-Shin Lee, Vadim Chuyanov, Antao Chen, Araz Yacoubian, William H. Steier, and Larry R. Dalton, “Three dimensional Integrated Optics Using Polymers” Journal of Quantum Electronics, Vol. 35, pp. 1146-1155, 1999.
[18]. L. Friedrich, P. Dannberg, C. Wachter, Th. Hennig, A. Brauer, and W. Karthe, “Directional coupler device using a three-dimensional waveguide structure” Optics Commun., Vol. 137, pp. 239-243, 1997.
[19]. Shogo Ura, Ryuji Nishida, Toshiaki Suhara, and Hiroshi Nishihara, “Wavelength-Selective Coupling Among Three Vertically Integrated Optical Waveguides by Grating Couplers” Photonics Technology Letters, Vol. 13, pp.133-135, 2001.
[20]. L. B. Soldano, and E. C. M. Pennings, “Optical Multi-Mode Interference Devices Based on Self-Imaging: Principles and Applications” J. Lightwave Techno. Vol. 13, pp. 615-627, 1995.
[21]. H. Lorenz, M. Laudon, and P. Renaud, “Mechanical Characterization of a New High-Aspect-Ratio Near UV-Photoresist,” Microelectronic Engineering, Vol. 41/42, pp. 371-374, 1998.
[22]. H. Lorenz, M. Despont, M. Fahrni, N. LaBianca, P. Vettiger, and P. Renaud , "SU-8: a low-cost negative resist for MEMS", J. Micromech. Microeng, Vol. 7, pp.121-124, 1997.
[23]. D. N. Sharp, M. Campbell, E. R. Dedman, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Photonic crystals for the visible spectrum by holographic lithography,” Optical and Quantum Electronics, Vol. 34, pp. 3-12, 2002.
[24]. N. LaBianca, and J. Delorme, "High aspect ratio resist for thick film applications", SPIE, Vol. 2438, pp. 846-852, 1995.
[25]. L. Guerin, M. Bossel, M. Demierre, S. Calmes, and P. Renaud, "Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic", in Proc. Transducers 1997, Chicago, pp.1419-1422, 1997.
[26]. Frederick H. Dill, William P. Hornberger, Peter S. Hauge, and Jane M. Shaw, “Characterization of positive photoresist” IEEE Transactions on electron devices, Vol. ED-22, No. 7, pp. 445-452, 1975.
[27]. T. Ohfuji, K. Nakano, K. Maeda, and E. Hasegawa, “Reaction modeling of chemically amplified resists for ArF excimer laser lithography” J. Vac. Sci. Technol. B, Vol. 13, pp. 3022-3025, 1995.
[28]. Kenji Kawano and Tsutomu Kitoh “Introduction to Optical Waveguide Analysis” John Wiley & Sons, Inc., 2001.
[29]. M. Kawachi,” Recent progress in silica-based planar lightwave circuits on silicon” IEE Proc. (Optoelectronics), Vol. 143, pp. 257-262, 1996.
[30]. Y. P. Li and C. H. Henry, “Silica-based optical integrated circuits” IEE Proc. (Optoelectronics), Vol. 143, pp. 263-280, 1996.
[31]. S. Valette et al., Sensors and Actuators A21, 1087 (1990)
[32]. H. Takahashi, K. Okamoto, and Y. Ohmori, “Integrated-optic 1*128 power splitter with multifunnel waveguide” Photon. Technol. Lett., Vol. 5, pp. 58-60, 1993.
[33]. S. M. Garner, Sang-Shin Lee, Vadim Chuyanov, Antao Chen, Araz Yacoubian, William H. Steier, and Larry R. Dalton, “Three Dimensional Integrated Optics Using Polymers” IEEE Journal of Lightwave Technology, Vol. 35, pp. 1146-1155, 1999.
[34]. S. M. Garner, V. Chuyanov, Sang-Shin Lee, A. Chen, William H. Steier, and Larry R. Dalton “Vertically Integrated Waveguide Polarization Splitters Using Polymers” IEEE Photon. Technol. Lett., Vol. 11, pp. 842-844, 1999.
[35]. L. Friedich, P. Dannberg, C. Wachter, Th. Hennig, A. Brauer, and W. Karthe “Directional coupler device using a three dimensional waveguide structure” Optics Commun., Vol. 137, pp. 239-243, 1997.
[36]. C. Waechter, Th. Bauer, M. Cumme, P. Dannberg, W. Elflein, Th. Hennig, U. Streppel, and W. Karthe “Active and Passive Components of 3D Integrated Optics” SPIE, Vol. 3936, pp. 130-139, 2000.
[37]. M. Rajarajan, B. M. A. Rahman, and K. T. V. Grattan “A Rigorous Comparison of the Performance of Directional Couplers with Multimode Inteference Devices” Vol. 17, pp. 243-248, 1999.
[38]. O. Bryngdahl, “Image formation using self-imaging techniques,” J. Opt. Soc. Amer., Vol. 63, pp. 416-419, 1973.
[39]. R. Ulrich, “Image formation by phase coincidences in optical waveguides,” Optics Commun., vol. 13, pp. 259-264, 1975.
[40]. R. Ulrich, and G. Ankele “Self-imaging in homogeneous planar optical waveguides,” Appl. Phys. Lett., Vol. 27, pp.337-339, 1975.
[41]. D. C. Chang and E. F. Kuester, “A Hybrid Method for Paraxial Beam Propagation in Multimode Optical Waveguide,” IEEE Trans. Micro. Theo. and Tech., Vol. 29, pp. 923-933, 1981.
[42]. G. M. Berry, and S. V. Burke, “Analysis of optical rib self-imaging multimode interference waveguide devices using the discrete spectral index method,” Optical and Quantum Electronics, Vol. 27, pp. 921-934, 1995.
[43]. J. M. Heaton, and R. M. Jenkins, “General Matrix Theory of Self-Imaging in Multimode Interference Couplers,” Photonics Technology Letters, Vol.11, pp. 212-214, 1999.
[44]. L. B. Soldano, and E. C. M. Pennings, “Optical Multi-Mode Interference Devices Based on Self-Imaging: Principles and Applications” J. Lightwave Techno. Vol. 13, pp. 615-627, 1995.

第一頁 上一頁 下一頁 最後一頁 top
系統版面圖檔 系統版面圖檔