我們對SU-8厚膜光阻進行特性檢測，藉由對製程條件的瞭解，使得我們可以做出具有垂直側壁的結構；並對化學增幅型光阻K30G做感光特性檢測，得到K30G的感光特性參數。藉由對於SU-8操作上的經驗，製作了SU-8波導，並成功地量測到場型。最後，利用多模干涉理論提出一種新的三維積體光學架構。

We characterize thick film photoresist SU-8, and based on the study on fabrication process, we obtain some structures with vertical sidewalls. Besides, we characterize the photosensitivity of the chemical amplified resist K30G and obtain its Dill’s parameters. Based on the experience of processing SU-8, we fabricate a SU-8 waveguide and successfully measure its spatial intensity distribution. Finally, we propose a new three-dimensional integrated optics scheme by employing multimode interference theory.

Chapter1 Introduction
1.1Background
1.2 Outline
Chapter2 Characterization of Photoresist SU-8
2.1 Introduction
2.2 Basic properties of SU-8
2.3 Processing of SU-8
2.4 Theoretical background
2.5 Experimental results
Chapter3 Design, Fabrication and Measurement of Optical
Waveguide
3.1 Introduction
3.2 Numerical calculation
3.3 Fabrication of polymer waveguide
3.4 Measurement of spatial intensity distribution of the
waveguides
Chapter4 Simulation of Three Dimensional Integrated Optics
4.1 Background
4.2 Multimode interference theory
4.3 Preliminary simulation results and possible fabrication
steps
Chapter5 Conclusion and Future Works
5.1 Conclusion
5.2 Future works
References

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