本文主要目的在發展一套高精度、低成本的自動聚焦探頭系統。以市售的光碟機(DVD-ROM)內之光學讀取頭(Pickup head)為光路基礎，利用光碟機聚焦控制的原理，當待測物反射面不在讀取頭物鏡的聚焦面時，經由感測器所得到的失焦訊號，帶動物鏡重回聚焦平面而完成自動聚焦控制。再經由音圈馬達驅動電壓的強度，可讀取工件表面量測點的位置高低，進而得到工件表面的輪廓。
由於音圈馬達具有遲滯現象，本文針對此遲滯現象加以研究，並利用模型軟體補償及加裝位置感測器兩種方式加以補償，來降低磁滯誤差。此探頭系統具有1.4mm的量測範圍，標準差達0.18μm，並有40nm的解析度。

The aim of this thesis is to develop a high-precision, low-cost laser auto-focus optical probe system. Taking from the pickup head of a DVD player, we use the focusing control principle. When the distance of object-lens to workpiece is not focal distance, the focus error signal (FES) detected by the photodetector will actuate the voice coil motor (VCM). The distance of object-lens to workpiece will keep the focal distance. By means of the feedback signal of the FES, the auto-focus control can be completed. Because there is a linear relationship of 1.4mm between the VCM input voltage and displacement of the object lens, we can make the measurement of surface profile by detecting the VCM input voltage as the object lens always follows the surface of object.
The main defect of VCM is hysteresis. We research the hysteresis loop of VCM and using the Preisach Model and a built-in feedback sensor to decrease the hysteresis error. Our system accuracy could achieve to 0.18µm in the measuring range about 200µm with the resolution of 40nm. The total measuring range is 1.4mm.

第一章 緒論 1
1-1 研究緣起與目的 1
1-2 相關論文回顧 2
1-2-1 控制器設計 2
1-2-2 磁滯現象 3
1-2-3 非接觸式量測探頭 3
1-3 研究方法與內容概要 6
第二章 量測原理與關鍵元件介紹 8
2-1 DVD讀取頭簡介 8
2-1-1 讀取頭關鍵元件介紹 8
2-2 DVD讀取頭光學原理 16
2-2-1 光學聚焦方式探討 16
2-2-2 S曲線的量測架設 18
2-3 雷射探頭系統量測原理 19
2-3-1 DVD讀取頭運作原理 19
2-3-2 自動聚焦與量測原理 21
2-3-3 音圈馬達驅動電壓量測與架設 23
2-4 控制模組 24
2-4-1 數位訊號處理器簡介 24
2-4-2 DSP TMS320C32簡介 26
第三章 DVD探頭自動聚焦控制 29
3-1 系統辨識 29
3-2 自動聚焦控制器設計 33
3-2-1 PID控制器 33
3-2-2 PID參數調整 36
3-2-2-1 前言 36
3-2-2-2 積分平方誤差法(ISE) 37
3-2-3 控制器模擬結果 41
3-2-4 PID控制器實作 43
第四章 系統特性 45
4-1 音圈馬達驅動電壓之性質 45
4-1-1 雷射輸出功率之影響 45
4-1-2 工件表面反射率的影響 46
4-2 自動聚焦探頭的重複性分析 49
第五章 系統磁滯現象研究 52
5-1 磁滯現象 52
5-1-1 磁滯簡介 52
5-1-2 系統磁滯現象分析 56
5-2 系統磁滯補償 59
5-2-1 磁滯模型概述 59
5-2-2 Preisach Model簡介 61
5-2-3 系統磁滯模型補償 66
5-3 位移量測系統研製 71
5-3-1 前言 71
5-3-2 位移量測系統量測原理 72
5-3-3 位移量測系統性能實驗 74
第六章 實驗結果與分析 77
6-1 雷射探頭量測系統架設 77
6-2 表面量測 78
6-2-1 塊規高度量測 78
6-2-2 Si Wafer表面量測 79
6-2-3 微機電試片量測 80
6-2-4 壓電陶瓷致動器位移量測 84
6-2-5 五元硬幣表面量測 86
6-2-6 小齒輪實體量測 87
6-3 雷射探頭量測系統程式畫面研製 89
第七章 討論與結論 90
7-1 討論 90
7-2 結論 91
參考文獻 93
附錄 A 97

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