本文研究方向為勞倫茲力驅動之擴散微幫浦之研發，利用流體在擴散器元件流動的特性，加以勞倫茲力驅動，其係將微幫浦之振動薄膜置於一永久磁場中，當薄膜背面的導線導通適當的電流，則會在垂直於薄膜的方向上，產生電磁作用力，以驅動薄膜變形，進而提供液體能量。其中，若控制微幫浦中導線兩端電流的開關頻率，則可控制薄膜的變形頻率，另外，若控制導線的電流強度，則會使得薄膜所承受的電磁力改變，進而改變薄膜的變形量，藉以改變微幫浦之流量。製程為結合體微細加工技術和以SU-8厚光阻作為微幫浦之振動薄膜之整合製程。
此微幫浦在設計方面，結合了流體力學、文獻和有限元素法分析的結果，以決定微幫浦尺寸。在製作方面，是以上、下晶片接合而成，上晶片包含薄膜與電流導線，下晶片包含腔室、擴散器元件和入出口。

The main purpose of this article is to study a kind of micropump driven by Lorentz force. The pumps’ chambers are connected from one to ten in series to study it performance, each chamber with two flow rectifying diffuser elements, one at the inlet and one at the outlet. Each chamber has an oscillating diaphragm, and a conducting wire on it’s back. When the pump is placed in a magnetic field, the current flowing through the conducting wire will produce a force normal to the diaphragm. The vibrating diaphragm produces an oscillating chamber volume, with the two diffuser elements, creates a one-way fluid flow.
In order to determine the size of this diffuser pump, it combines fluid mechanics, literature, and the FEM analysis. In the procedure, this pump was bonded by two wafers. Upper wafer contains oscillating diaphragm and conducting wire. Lower wafer contains chambers, diffuser elements, inlet, and outlet.

第一章 緒論 1
1.1前言 1
1.2文獻回顧 2
1.2.1靜電式微幫浦 3
1.2.2磁力式微幫浦 4
1.2.3雙金屬式微幫浦 4
1.2.4記憶合金式微幫浦 5
1.2.5氣動式微幫浦 6
1.2.6熱氣動式微幫浦 6
1.2.7壓電式微幫浦 7
1.2.7.1壓電式止回閥微幫浦 7
1.2.7.2壓電式動態被動閥微幫浦 8
1.2.7.3壓電無閥式擴散微幫浦 9
1.3本文目的與內容簡介 9
第二章 擴散器原理 11
2.1前言 11
2.2擴散器原理 11
2.3擴散器流向性估計 14
第三章 擴散式微幫浦 17
3.1微幫浦 17
3.2擴散幫浦慨論 18
3.3驅動方式 20
3.4勞倫茲力驅動之擴散微幫浦 22
第四章 有限元素法 24
4.1有限元素模型建立 24
4.2分析說明 26
4.3分析結果 28
4.4 微幫浦流量估計 30
第五章 擴散微幫浦之製造 31
5.1 SU-8厚光阻製程 31
5.2微幫浦之結構尺寸 33
5.3微幫浦製程 34
5.3.1上晶片製程 34
5.3.2下晶片製程 37
第六章 結論與建議 39
文獻參考 41

[1] P. Gravesen, J. Brandebjerg, and O. sondergard Jensen,
“ Microfluidics — a review, ” Journal of Micromechics and
Microengineering, vol. 3, 1993, pp.168-182
[2] B. Bustgens, W. Bacher, W. Menz, W. K. Schomburg, “Micropump
Manufactured by Thermoplastic Molding, ” Micro Electro Mechanical Systems, 1994, MEMS ''94, Proceedings, IEEE Workshop on , 1994, p.p. 18 —21
[3] R. Zengerle, A. Richter, H. Sandmaier, “A micro membrane pump
with electrostatic actuation, ” Micro Electro Mechanical Systems,
1992, p.p. 19-24
[4] R. Zengerle, S. Kluge, M. Richter, A. Richter, “A Bidirectional Silicon Micropump, ” IEEE 8th International Workshop on Micro Electro
Mechanical Systems (MEMS’95), 1995, p.p. 19-24
[5] C. H. Ahn and M. G. Allen, “Fluid micropumps based on rotary
magnetic actuators, ” IEEE 8th International Workshop on Micro
Electro Mechanical Systems (MEMS’95), 1995, p.p. 408-412
[6] Melvin Khoo and Chang Liu, “A novel micromachined magnetic
membrane microfluid pump, ” Proceeding of the 22nd Annual EMBS
International Conference, 2000, p.p. 2394-2397
[7] J. Zou, X. Y. Ye, Z. Y. Zhou, and Y. Yang, “A novel thermally-actuated
silicon micropump, ” International Symposium on Micromechatronal
Human Science, 1997, p.p. 231-234
[8] William L. Benard, Harold Kahn, Arthur H. Heuer, and Michael A.
Huff, “Thin-film shape-memory alloy actuated micropumps, ” Journal
of Microelectromechanical System, vol. 7, NO. 2, 1998, p.p.245-251
[9] W. L. Benard, H. Kahn, A. H. Heuer, and M. A. Huff, “A titanium
-nickel shape-memory alloy actuated micropump, ” Transducers ’97,
International Conference on Solid-State Sensors and Actuators, 1997,
p.p. 361-364
[10] Dong Xu, Li Wang, Guifu Ding, Yong Zhou, Aibing Yu, Bingchu Cai, “Characteristics and fabrication of NiTiSi diaphragm micropump, ”
Sensors and Actuators, A93, 2001, p.p. 87-92
[11] R. Rapp, P. Bley, W. Menz, W. K. Schomburg, “Micropump
fabricated with LIGA process, ” Micro Electro Mechanical Systems,
1993, MEMS ''93, Proceedings An Investigation of Micro Structures,
Sensors, Actuators, Machines and Systems. IEEE. , 1993, p.p. 123
[12] Elli Meng, Xuan-Qi Wang, Howen Mak, and Yu-Chong Tai, “A
check-valved silicone diaphragm pump, ” Micro Electro Mechanical
Systems, 2000. MEMS 2000. The Thirteenth Annual International
Conference on , 2000, p.p. 62-67
[13] F. C. M. Van De Pol, H. T. G. Van Lintel, M. Elwenspoek, and J. H. J. Fluitman, “A Thermopneumatic Micropump Based on Micro-
engineering Techniques, ” Sensors and Actuators, A21-23, 1990,
p.p.198-202
[14] James A. Folta, Norman F. Raley, Edmund W. Hee, “Design,
fabrication and testing of a miniature peristaltic membrane pump, ”
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical
Digest., IEEE , 1992, p.p. 186 -189
[15] W. K. Schomburg, R. Ahrens, W. Bacher, S. Engemann, P. Krehl, J. Martin, “Long-term performance analysis of thermo-pneumatic
micropump actuators, ” Transducers ’97, International Conference
on Solid-State Sensors and Actuators, 1997, p.p. 365-368
[16] Michael Koch, Nick Harris, Alan G. R. Evans, Neil M. White and
Arthur Brunnschweler, “A novel micromachined pump based on
thick-film piezoelectric actuation, ” Transducers ’97, International
Conferenceon Solid-State Sensors and Actuators, 1997, p.p. 353-356
[17] R. Linnemann, P. Woias, C.-D. Senfft, and J. A. Ditterich, “A self-
priming and bubble-tolerant piezoelectric silicon micropump for
liquids and gases, ” Micro Electro Mechanical Systems, 1998.
MEMS 98. Proceedings., The Eleventh Annual International
Workshop on , 1998, p.p. 532-537
[18] Sebastian Bohm, Wouter Olthuis, Piet Bergveld, “A plastic
micropump constructed with conventional techniques and
materials, ” Sensors and Actuators, A77, 1999, p.p. 223-228
[19] Torsten Gerlach, Matthias Schuenemann and Helmut Wurms, “A
new micropump principle of the reciprocating type using pyramidic
micro flowchannels as passive valves, ” J. Micromech. Microeng.
vol. 5, 1995, p.p. 199-201
[20] Torsten Gerlach, Helmut Wurms, “Working principle and
performance of the dynamic micropump, ” Sensors and Actuators,
A50, 1995, p.p. 135-140
[21] M. Koch, A. G. R. Evans, and A.Brunnschweiler, “The dynamic
micropump driven with a screen printed PZT actuator, ” J.
Micromech. Microeng. vol. 8, 1998, p.p. 119-122
[22] Erik Stemme, Goran Stemme, “A valveless diffuser/nozzle-based
fluid pump, ” Sensors and Actuators, A39, 1993, p.p. 159-167
[23] Anders Olsson, Erik Stemme, Goran Stemme, “A valve-less planar
fluid pump with two pump chambers, ” Sensors and Actuators,
A46-47, 1995, p.p. 549-556
[24] Anders Olsson, Goran Stemme, Erik Stemme, “Diffuser-element
design investigation for valve-less pumps, ” Sensors and Actuators,
A57, 1996, p.p. 137-143
[25] Anders Olsson, Peter Enoksson, Goran Stemme, Erik Stemme, “A
valve-less planar pump isotropically etched in silicon, ”J.
Micromech. Microeng. vol.6, 1996, p.p. 87-91
[26] Anders Olsson, Peter Enoksson, Goran Stemme, Erik Stemme,
“Micromachined flat-walled valveless diffuser pumps, ” J.
Micromech. Microeng., vol.6, NO. 2, 1997, p.p.161-166
[27] F. M. White, Fluid Mechanics. New York：McGraw-Hill, p.p.
332-369
[28] Shuchi Shoji, and Masayoshi Esashi, “Microflow devices and
system, ” J. Micromech. Microeng. 4, 1994, p.p. 157-171
[29] Anders Olsson, Goran Stemme, Erik Stemme, “Numerical and
experimental studies of flat-walled diffuer elements for valve-less
micropump ” Sensors and Actuators, A84, 2000, p.p. 165-175