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研究生:梁聖昌
研究生(外文):Liang Sheng Chang
論文名稱:勞倫茲力驅動之擴散幫浦
指導教授:周元昉
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:機械工程學研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
中文關鍵詞:微幫浦擴散器勞倫茲力
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本文研究方向為勞倫茲力驅動之擴散微幫浦之研發,利用流體在擴散器元件流動的特性,加以勞倫茲力驅動,其係將微幫浦之振動薄膜置於一永久磁場中,當薄膜背面的導線導通適當的電流,則會在垂直於薄膜的方向上,產生電磁作用力,以驅動薄膜變形,進而提供液體能量。其中,若控制微幫浦中導線兩端電流的開關頻率,則可控制薄膜的變形頻率,另外,若控制導線的電流強度,則會使得薄膜所承受的電磁力改變,進而改變薄膜的變形量,藉以改變微幫浦之流量。製程為結合體微細加工技術和以SU-8厚光阻作為微幫浦之振動薄膜之整合製程。
此微幫浦在設計方面,結合了流體力學、文獻和有限元素法分析的結果,以決定微幫浦尺寸。在製作方面,是以上、下晶片接合而成,上晶片包含薄膜與電流導線,下晶片包含腔室、擴散器元件和入出口。
The main purpose of this article is to study a kind of micropump driven by Lorentz force. The pumps’ chambers are connected from one to ten in series to study it performance, each chamber with two flow rectifying diffuser elements, one at the inlet and one at the outlet. Each chamber has an oscillating diaphragm, and a conducting wire on it’s back. When the pump is placed in a magnetic field, the current flowing through the conducting wire will produce a force normal to the diaphragm. The vibrating diaphragm produces an oscillating chamber volume, with the two diffuser elements, creates a one-way fluid flow.
In order to determine the size of this diffuser pump, it combines fluid mechanics, literature, and the FEM analysis. In the procedure, this pump was bonded by two wafers. Upper wafer contains oscillating diaphragm and conducting wire. Lower wafer contains chambers, diffuser elements, inlet, and outlet.
第一章 緒論 1
1.1前言 1
1.2文獻回顧 2
1.2.1靜電式微幫浦 3
1.2.2磁力式微幫浦 4
1.2.3雙金屬式微幫浦 4
1.2.4記憶合金式微幫浦 5
1.2.5氣動式微幫浦 6
1.2.6熱氣動式微幫浦 6
1.2.7壓電式微幫浦 7
1.2.7.1壓電式止回閥微幫浦 7
1.2.7.2壓電式動態被動閥微幫浦 8
1.2.7.3壓電無閥式擴散微幫浦 9
1.3本文目的與內容簡介 9
第二章 擴散器原理 11
2.1前言 11
2.2擴散器原理 11
2.3擴散器流向性估計 14
第三章 擴散式微幫浦 17
3.1微幫浦 17
3.2擴散幫浦慨論 18
3.3驅動方式 20
3.4勞倫茲力驅動之擴散微幫浦 22
第四章 有限元素法 24
4.1有限元素模型建立 24
4.2分析說明 26
4.3分析結果 28
4.4 微幫浦流量估計 30
第五章 擴散微幫浦之製造 31
5.1 SU-8厚光阻製程 31
5.2微幫浦之結構尺寸 33
5.3微幫浦製程 34
5.3.1上晶片製程 34
5.3.2下晶片製程 37
第六章 結論與建議 39
文獻參考 41
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