在精密工程的發展上，微小化與精密化已經成為時勢所趨，在這發展方向的要求下，微米級甚至次微米級的定位系統的需求量與日遽增。而可發展方向有：更高精度、單層結構實現更多自由度等。本文針對前述發展方向進行研究，以多自由度且達到高精度為研究目標。
壓電材料由於具有體積小、反應快、機電轉換效率高與生熱少的優點，所以被大量應用在微定位系統的致動器上。現階段在壓電驅動的定位平台的研究上主要有三個方向，一是利用摩擦滯滑的現象，另一是尺蠖蟲形式的致動方式，最後一種則是採行材料變形的方式。前兩種方式的優點在於可以達到長行程的目的，第三種的方式則是有高定位精度的優點。
本文研製出一並聯式六自由度微動平台，首先找出合適的六自由度並聯式機構並研究其運動學特性，採用撓性鉸鍊，經由精密線放電加工將此機構實體化，然後使用積層式壓電致動器驅動。建立參數化之平台實體化模型與有限元素模型，並模擬平台之靜態與動態特性，在考量整體之體積最小，並同時考慮加工可行性等要求設計出最佳之並聯式六自由度微定位平台。
完成之平台以雷射干涉儀，及個人電腦加以整合，測試其性能，包括靜態與動態性能，運動精度及共振頻率等。

Precision positioning stages were widely used in many systems. This paper focuses on the development of precision positioning stages with high accuracy and achieving multiple degrees of freedom.
Piezoelectric actuators（PZT）are popularly implied in actuators in micro-positioning systems due to it’s advantages of infinitely small, high speed, high electrical mechanical coupling efficiency and little heat generation. In general, three methods are used in development of micro-positioning systems. One is to the use of the stick-slip phenomenon, another is the inchworm type, and the third is the application of material elastic deformation. The first two can achieve long travel range, and the third one can realize high precision.
A parallel 6-dof micro-positioning stage were designed, fabricated, and tested. Firstly a parallel 6-dof mechanism was found and analyzed. Using flexure hinges and wire electric discharge machining to solidify the mechanism. The stage was driven by multilayer PZT. Solid system CAD and finite element analysis CAE were chosen to design and analyze the performance of the stage. Take the simulated results to optimally design the dimensions of the flexibility structures.
Laser interferometer and PC were combined to measure the performance of the system including the static and dynamic characteristics, resonance frequency.

致謝
中文摘要 I
英文摘要 II
目錄 III
圖例目錄 V
表格目錄 VIII
第一章 前言 1-1
1.1 研究背景與動機 1-1
1.2 文獻回顧 1-4
第二章 研究目標 2-1
第三章 系統的設計與分析 3-1
3.1 基本之並聯式機構 3-1
3.2 6-PSS機構之運動學分析 3-5
3.2.1 6-PSS一般形式 3-5
3.2.2 相交一點之6-PSS機構 3-9
3.2.3 互相平行之6-PSS機構 3-15
3.2.4 相交三點之6-PSS機構 3-20
3.3 並聯式機構之微型化與實體化 3-27
3.3.1機構之微型化 3-27
3.3.2機構之實體化 3-29
3.4 微型化機構之有限元素分析 3-34
3.4.1 積層式壓電致動器之有限元素模型的建立與分析 3-34
3.4.2 微型化機構之有限元素模型的建立 3-40
3.4.3 微型化機構之有限元素模型的分析 3-45
第四章 實驗量測與數據分析 4-1
4.1 靜態量測 4-1
4.1.1 靜態量測實驗架設與方法 4-1
4.1.2 靜態量測實驗結果分析 4-7
4.2 動態實驗 4-22
4.2.1 動態量測實驗架設與方法 4-22
4.2.2 動態量測實驗結果分析 4-23
第五章 結論與未來展望 5-1
文獻參考 R-1
附錄A 積層式壓電材料 A-1
A.1 壓電材料的基本性質 A-1
A.2 壓電材料組成律 A-4
A.3 機電轉換係數 A-5
A.4 積層式壓電致動器 A-8
附錄B 平台實體圖 B-1
附錄C 平台之有限元素分析結果 C-1
C.1 無量測塊下之平台位移量分析 C-1
C.2 有量測塊下之平台位移量分析 C-10
C.3 無量測塊下之平台結構振動分析 C-19
C.4 有量測塊下之平台結構振動分析 C-22
作者簡歷

[1] 簡宏彰, ”三自由度超精密微定位平台研究,” 國立台灣大學機械工程學研究所碩士論文,1996.
[2] 曾俊凱, ”三自由度超精密微定位平台之動態分析,” 國立台灣大學機械工程學研究所碩士論文,1997.
[3] 張所鋐, 簡宏彰, 曾俊凱, “三超精密三自由度微細定位機構,” 中華民國專利334888號.
[4] S. H. Chang, C. K. Tseng, and H. C. Chien, “A High Precision Piezodriven XYqZ Micropositioner,” Proceedings, 1998 International Conference of Mechtronics Technology, Hsin-Chu, Taiwan, Nov. 30- Dec. 3, 1998.
[5] S. H. Chang, C. K. Tseng, and H. C. Chien, “An Ultra-precision XYqZ Piezo-micropositioner-Part I: Design and Analysis,” IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control., vol. 46, no. 4, pp. 897-905, Jul. 1999.
[6] S. H. Chang, C. K. Tseng, and H. C. Chien, “An Ultra-precision XYqZ Piezo-micropositioner-Part II: Experiment and Performance,” IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control, vol. 46, no. 4, pp. 897-905, Jul. 1999.
[7] 李振邦, ”奈米級長距離致動機構暨三自由度微定位平台之研製,” 國立台灣大學機械工程學研究所碩士論文,1999.
[8] 張所鋐, 李振邦, 劉霆, 1999, “平面式三自由度微定位平台設計”, 中國機械工程學會第十六屆全國學術研討會論文集, 新竹市, Dec. 3-4, 1999.
[9] 朱怡銘, ”奈米級XYZ三自由度微定位平台,” 國立台灣大學機械工程學研究所碩士論文,2000.
[10] 曾俊耀, ”壓電驅動精微定位機構設計,” 國立台灣大學機械工程學研究所碩士論文,2001.
[11] 張所鋐, 朱怡銘, 曾俊耀, 2001, “平面式三自由度微定位平台設計”, 中國機械工程學會第十八屆全國學術研討會論文集, 台北市, Dec. 7-8, 2001.
[12] 蔡奇陵, ”六自由度超精密奈米定位平台研製,” 國立台灣大學機械工程學研究所碩士論文,2001.
[13] S. H. Chang, C. L. Tsui, and T. L. Wu, “Monolithic Design of a Six Degree-of-freedom Nanometer Resolution Micro-Positioning Stage,” the 3rd international euspen Conference, Eindhoven University of Technology, Eindhoven, The Netherlands, May 26th - may 30th, 2002
[14] D. W. Pohl, “Dynamic Piezoelectric Translation Devices,” Rev. Sci. Instrum., vol. 58, no. 1, Jan., 1987.
[15] P. Niedermann, R. Emch, and P. Descouts, “Simple Piezoelectric Translation Device,” Rev. Sci. Instrum, vol. 59, no. 2, Feb., 1988.
[16] Ch. Renner, Ph. Niedermann, A. D. Kent, and O. Fischer, “A Vertical Piezoelectric Inertial Slider,” Rev. Sci. Instrum., vol. 61, no. 3, March, 1990.
[17] A. R. Smith, S. Gwo, and C. K. Shih, “A New High-Resolution Two-Dimensional Micropositioning Device for Scanning Probe Microscopy Applications,” Rev. Sci. Instrum., vol. 65, no. 10, Oct., 1994.
[18] S. Ya. Tipissev, and A. O. Golubok, “Nanostep Movement and Measurement,” Tribology International, vol. 29, no. 5, 1996.
[19] A. Kanai, M. Miyashita, T. Hatai, and M. Yoshida, ”Friction Characteristics of Linear Plain Bearing Guideway and Motion Controllability of Numerically Controlled Slide,” American Society for Precision Engineering, vol. 1, 1996.
[20] J. -M. Breguet, R. Pe’rez, A. Bergander, C. Schmitt, R. Clavel, and H. Bleuler, “Piezoactuaors for motion control from centimeter to nanometer,” Proceedings of the 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems, Volume 1, Vol.1, pp. 492 —497, 2000
[21] H. J. Mamin, D. W. Abraham, E. Ganz, and J. Clarke, “Two-dimensional, Remote Micropositioner for a Scanning Tunneling Microscope,” Rev. Sci. Instrum., vol. 56 no. 11, Nov., 1985.
[22] V. G. Dudnikov, D. V. Kovalevsky, and A. L. Shabalin, “Simple, High Precision Linear-motor-driven XYq Positioner (Walker),” Rev. Sci. Instrum., vol. 62, no. 10, Oct., 1991.
[23] E. de Haas, W. Barsingerhorn, and J. F. van der Veen, “Piezoelectrically Driven Rotary Stage for Use in Ultrahigh Vacuum,” Rev. Sci. Instrum., vol. 67, no. 5, May, 1996.
[24] Peng Gao, Hong Tan and Zhejun Yuan, “The design and characterization of a piezo-driven ultra-precision stepping positioner, “ Meas. Sci. Technol., vol. 11, no. 2, N15-N19, Feb., 2000.
[25] Pierre Cusin, Takuhiko Sawai, and Satoshi Konishi, “Compact and precise positioner based on the Inchworm principle,” J. Micromech. Microeng. 10 (2000) pp.516-521, 2000.
[26] J. R. Matey, R. S. Crandall, and B. Brycki, “Bimorh-driven X-Y-Z Translation Stage for Scanned Image Microscopy,” Rev. Sci. Instrum., vol. 58, no. 4, April, 1987.
[27] J. Heil, A. Bohm, M. Primke, and P. Wyter, “Versatile Three-dimensional Cryogenic Micropositioning Device,” Rev. Sci. Instrum., vol. 67, no. 1, Jan., 1996.
[28] 張所鋐, 杜本權, “精密直線定位機構含位移放大/縮小裝置,” 中華民國專利335911號.
[29] S. H. Chang, and B. C. Du, “A Piezodriven Precision Linear Mechanism with Large Travel range,” Proceedings, 1997 International Conference on Precision Engineering, Taipei, Taiwan, ROC, Nov. 18-21, 1997.
[30] S. H. Chang, and B. C. Du, "A Precision Piezodriven Micropositioner Mechanism with Large Travel Range," The Review of Scientific Instruments, 69(4), pp. 1785-1791, 1998.
[31] 張所鋐, 李昇憲, “新式高精密長行程步進驅動器,” 中華民國專利328852號.
[32] S. H. Chang, and S. S. Li, “A High Resolution Long Travel Friction Drive Micropositioner with Programmable Step Size,” The Review of Scientific Instruments, vol. 70, no. 6, pp. 950-960, Jul. 1999.
[33] S. H. Chang, and S. S. Li, “A High Resolution Long Travel Friction Drive Micropositioner with Programmable Step Size,” Proceedings, 1998 International Conference of Mechtronics Technology, Hsin-Chu, Taiwan, Nov. 30- Dec. 3, 1998.
[34] S. H. Chang, and S. S. Li, “A Precision Friction Drive: Modeling and Experiment,” Proceedings, Symposium on Nano-metrology in Precision Engineering, Hong Kong, Nov. 24-25, 1998.
[35] S. H. Chang, and S. S. Li, “A Friction Drive Micropositioning Mechanism with Nanometer Resolution,” Bulletin of the College of Engineering, National Taiwan University, no.76, pp. 51-65, June 1999.
[36] 張所鋐, 李昇憲, “晶片步進機,” 1999年10月已通過NSC review, 中華民國發明專利.
[37] S. H. Chang, Y. B. Chen, and H. C. Chen, 1999, “Design and Performance of a Precision Piezo-driven Rotary Micropositioner,“ Proceedings, International Conference on Advanced Manufacturing Technology, Xi’an, China, June 16-18,1999.
[38] 張所鋐, 陳玉彬, 李昇憲, “高精密度旋轉定位平台,” 1999年4月已申請中華民國新型專利.
[39] S. Gonda, T. Kurosawa and Y. Tanimura, “Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology,“ Meas. Sci. Technol., vol. 10, pp. 986-993, 1999.
[40] Ralph C Merkle, “A new family of six degrees of freedom positional devices,” Nanotechnology, vol. 8, pp. 47-52, 1997.
[41] Pernette Eric; Henein Simon, Magnani Ivo, Clavel Reymond, “Design of parallel robots in microrobotics,” Robotica, vol. 15, no. 4, pp. 417-420, July-Aug, 1997.
[42] Peng Gao and Shan-Min Swei, “A six-degree-of-freedom micro-manipulator based on piezoelectric translators,” Nanotechnology, vol. 10, pp. 447-452, 1999.
[43] Ryu Jae W., Lee Sung-Q, Gweon Dae-Gab, Moon Kee S, “Inverse kinematic modeling of a coupled flexure hinge mechanism,” Mechatronics, vol. 9, no. 6, pp. 657-674, 1999.
[44] Arai Tatsuo, Herve Jacques M., Tanikawa Tamio, “Development of 3 DOF micro finger,” Proceedings of the 1996 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS. Part 2 (of 3), pp. 981-987, Osaka Japan, Nov 4-8 1996.
[45] Ohya Yoshiki, Arai Tatsuo, Mae Yasushi, Inoue Kenji, Tanikawa Tamio, “Development of 3-DOF finger module for micro manipulation,” IEEE International Conference on Intelligent Robots and Systems, vol. 2, 1999, 1999 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS''99): Human and Environment Friendly Robots whith High Intelligence and Emotional Quotients, pp. 894-899, Kyongju, South Korea'', Oct 17-Oct 21 1999.
[46] Tanikawa Tamio, Arai Tatsuo, “Development of a micro-manipulation system having a two-fingered micro-hand,” IEEE Transactions on Robotics and Automation, vol. 15, no. 1, pp. 152-162, Feb, 1999.
[47] Tanikawa T, Kawai M, Koyachi N, Arai T, Ide T, Kaneko S, Ohta R, Hirose T, “Force control system for autonomous micro manipulation,” IEEE International Conference on Robotics and Automation (ICRA), pp. 610-615, Seoul, May 21-26 2001.
[48] G. Pritschow, K. —H. Wurst, “Systematic design of hexapods and other parallel link systems,” CIRP Annals - Manufacturing Technology, vol. 46, no. pp. 291-295, Jan, 1997.
[49] Takaaki OIWA, Takeshi OOTAWA, “Six-Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism (2nd Report) -Performance Test-,” J.JSPE, vol. 66, no. 2, pp. 277-281, 2000.