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研究生:吳冬立
研究生(外文):Tung Li Wu
論文名稱:並聯式六自由度奈米級微定位平台研製
論文名稱(外文):Design of a Six Degrees-of-freedom Nanometer Resolution Parallel Micro-Positioning Stage
指導教授:張所鋐
指導教授(外文):S. H. Chang
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:機械工程學研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:90
語文別:中文
論文頁數:110
中文關鍵詞:微定位平台並聯式六自由度機構積層式壓電致動器
外文關鍵詞:precision positioning stageparallel 6-dof mechanismmultilayer piezoelectric actuator
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在精密工程的發展上,微小化與精密化已經成為時勢所趨,在這發展方向的要求下,微米級甚至次微米級的定位系統的需求量與日遽增。而可發展方向有:更高精度、單層結構實現更多自由度等。本文針對前述發展方向進行研究,以多自由度且達到高精度為研究目標。
壓電材料由於具有體積小、反應快、機電轉換效率高與生熱少的優點,所以被大量應用在微定位系統的致動器上。現階段在壓電驅動的定位平台的研究上主要有三個方向,一是利用摩擦滯滑的現象,另一是尺蠖蟲形式的致動方式,最後一種則是採行材料變形的方式。前兩種方式的優點在於可以達到長行程的目的,第三種的方式則是有高定位精度的優點。
本文研製出一並聯式六自由度微動平台,首先找出合適的六自由度並聯式機構並研究其運動學特性,採用撓性鉸鍊,經由精密線放電加工將此機構實體化,然後使用積層式壓電致動器驅動。建立參數化之平台實體化模型與有限元素模型,並模擬平台之靜態與動態特性,在考量整體之體積最小,並同時考慮加工可行性等要求設計出最佳之並聯式六自由度微定位平台。
完成之平台以雷射干涉儀,及個人電腦加以整合,測試其性能,包括靜態與動態性能,運動精度及共振頻率等。
Precision positioning stages were widely used in many systems. This paper focuses on the development of precision positioning stages with high accuracy and achieving multiple degrees of freedom.
Piezoelectric actuators(PZT)are popularly implied in actuators in micro-positioning systems due to it’s advantages of infinitely small, high speed, high electrical mechanical coupling efficiency and little heat generation. In general, three methods are used in development of micro-positioning systems. One is to the use of the stick-slip phenomenon, another is the inchworm type, and the third is the application of material elastic deformation. The first two can achieve long travel range, and the third one can realize high precision.
A parallel 6-dof micro-positioning stage were designed, fabricated, and tested. Firstly a parallel 6-dof mechanism was found and analyzed. Using flexure hinges and wire electric discharge machining to solidify the mechanism. The stage was driven by multilayer PZT. Solid system CAD and finite element analysis CAE were chosen to design and analyze the performance of the stage. Take the simulated results to optimally design the dimensions of the flexibility structures.
Laser interferometer and PC were combined to measure the performance of the system including the static and dynamic characteristics, resonance frequency.
致謝
中文摘要 I
英文摘要 II
目錄 III
圖例目錄 V
表格目錄 VIII
第一章 前言 1-1
1.1 研究背景與動機 1-1
1.2 文獻回顧 1-4
第二章 研究目標 2-1
第三章 系統的設計與分析 3-1
3.1 基本之並聯式機構 3-1
3.2 6-PSS機構之運動學分析 3-5
3.2.1 6-PSS一般形式 3-5
3.2.2 相交一點之6-PSS機構 3-9
3.2.3 互相平行之6-PSS機構 3-15
3.2.4 相交三點之6-PSS機構 3-20
3.3 並聯式機構之微型化與實體化 3-27
3.3.1機構之微型化 3-27
3.3.2機構之實體化 3-29
3.4 微型化機構之有限元素分析 3-34
3.4.1 積層式壓電致動器之有限元素模型的建立與分析 3-34
3.4.2 微型化機構之有限元素模型的建立 3-40
3.4.3 微型化機構之有限元素模型的分析 3-45
第四章 實驗量測與數據分析 4-1
4.1 靜態量測 4-1
4.1.1 靜態量測實驗架設與方法 4-1
4.1.2 靜態量測實驗結果分析 4-7
4.2 動態實驗 4-22
4.2.1 動態量測實驗架設與方法 4-22
4.2.2 動態量測實驗結果分析 4-23
第五章 結論與未來展望 5-1
文獻參考 R-1
附錄A 積層式壓電材料 A-1
A.1 壓電材料的基本性質 A-1
A.2 壓電材料組成律 A-4
A.3 機電轉換係數 A-5
A.4 積層式壓電致動器 A-8
附錄B 平台實體圖 B-1
附錄C 平台之有限元素分析結果 C-1
C.1 無量測塊下之平台位移量分析 C-1
C.2 有量測塊下之平台位移量分析 C-10
C.3 無量測塊下之平台結構振動分析 C-19
C.4 有量測塊下之平台結構振動分析 C-22
作者簡歷
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