臺灣博碩士論文加值系統

十二吋晶圓廠可以說是我國各大半導體廠所積極發展與規劃的重點。由於十二吋廠中裝載十二吋晶圓的FOUP（Front Opening Unified Pod）之重量和體積較八吋廠增加甚多，因此，在人為搬運的負擔上相對的增加，而對於搬運的安全性亦相對的降低。所以也使得自動化物料處理系統(Automated Material Handling System，AMHS) 之於十二吋廠的重要性較八吋廠更為重要；所以，AMHS的效能對半導體廠整體產能而言，具有舉足輕重的影響。因此，本研究將針對常用來搬運晶圓的OHS（Overhead Hoist Shuttle）及OHT（Overhead Hoist Transport）系統，以模糊理論（Fuzzy Theorem）為核心開發一智慧型派車器，提供多重決策支援系統並搭配本研究所建構之八種派車法則來達到同時兼具提高效能以及製造策略之目的。另一方面本研究採用美國Brooks Automation公司所發展的AutoMod模擬軟體，建構Interbay 以及Intrabay系統模型以執行本研究所開發的智慧型派車器。同時針對模擬的結果進行討論、驗證與修正，以提高半導體製造系統之效能。最後，本研究以一晶圓區，12條Intrabay以及72機台之半導體針對不同產品的路由（Route）、產品混合及派車法則進行討論，由模擬之結果顯示，本論文所提出多重任務導向派車器達成所設定之目的及效能。

The 300 mm fab is an important investment aim of the semiconductor manufacturers. However, due to the weight of the front opening unified pod （FOUP）which carries 300 mm wafers is weighted than the 200 mm one. It is not convenient for the frequently manual carrying and lifting. In addition, it also reduces the wafer transport safety. Therefore, the automated wafer transport system of the 300 mm fab intrabay is more important than that of the 200 mm fab, and it yields significant effects on the fab efficiency. In this thesis, the dispatchers of the fab transport systems of the overhead hoist vehicle (OHV) and the overhead hoist transport (OHT) are discussed. Especially, the proposed OHT/ OHV controller is developed as a multi-mission oriented dispatcher. Such a multi-mission oriented vehicle dispatcher is developed in terms of the fuzzy logic. The inference of the fuzzy model depends on the performance statistics of the fab, and it results in the dynamic switching of the proposed eight dispatching rules. The dynamic switching of the dispatching rules aims to achieve the transport efficiency and the manufacturing strategies as well. On the other hand, this work constructs the interbay/ intrabay transport and production models and the multi-mission oriented dispatcher using the AutoMod simulation software. The deadlock detection, resolution, and blockage avoidance are all discussed in the proposed models. Practically, the fab model with 6 functional areas, 12 intrabays and 72 process tools is modeled and simulated. Finally, the performance of the production and transport systems is evaluated and discussed based on different product routes, product mixes, dispatching rules and vehicle numbers. The results show that the multi-mission oriented dispatcher achieves the desired purpose and efficiency.

摘要…………………………………………………………………………….…i
Abstract…………………………………………………………………………..ii
目錄……………………………………………………………………………..iii
圖目錄…………………………………………………………………………...vi
表錄…..…………………………………………………………………….……ix
第一章 緒論……………………………………………………………………..1
1.1 研究動機與目的……………………………………………………….1
1.2 文獻回顧……………………………………………………………….2
1.2.1 十二吋晶圓廠自動化物料搬運系統……………………………..2
1.2.2 自動化物料搬運系統模擬………………………………………..5
1.2.3 派車法則…………………………………………………………..6
1.2.4 效能評估方法……………………………………………………..8
1.3 論文架構………………………………………………………….…..10
第二章 十二吋晶圓廠自動化物料處理系統…………………………………12
2.1 自動化物料搬運系統之佈置與規劃………………………………...13
2.1.1 Interbay系統……………………………………………………...15
2.1.2 Intrabay系統……………………………………….……………..15
2.2 自動化倉儲系統……………………………………….……………..15
2.3 自動化物料搬運車與載具…………………………………………...16
2.3.1 搬運車系統………………………………………………………16
2.3.2 晶圓載具………………………………………………...……….20
第三章 模糊理論與派車法則設計……………………………………………22
3.1 模糊理論…………………………………………………………….22
3.1.1 模糊集合（Fuzzy Set）…………………………………………22
3.1.2 歸屬函數（Membership Function；MF）…………………….23
3.1.3 模糊推論（Fuzzy Inference）….………………………………25
3.1.4 模糊控制系統…………………………………………………..26
3.2 模糊派車法則設計………………………………………………….27
3.2.1 模糊控制架構…………………………………………………..27
3.2.2 模糊控制系統設計……………………………………………..28
第四章 研究方法與實作………………………………………………………35
4.1 AutoMod簡介..……………………………………………………….35
4.2AutoMod在本研究中之應用…….…………………………………..36
4.3控制邏輯之實現..…………………………………………………….38
4.3.1 Intrabay控制邏輯……………….………………………………..38
4.3.1.1 控制邏輯在AutoMod中之實現...……………………………...39
4.3.1.2 派車法則之控制邏輯……………………………...……..43
4.3.2 Interbay控制邏輯………………………………………………..49
4.3.3 模糊理論在Interbay系統中的控制邏輯………………………50
4.4晶圓廠模型建構..…………………………………………………….51
4.4.1Intrabay系統建構..……………………………………………….51
4.4.2十二吋晶圓廠建構…..…………………………………………..53
第五章 結果分析………………………………………………………………55
5.1 Intrabay系統分析..……………………………………………………55
5.1.1 Intrabay系統條件設定…………………………………………...55
5.1.2 模擬結果…………………………………………………………57
5.1.2.1最長等待 LOT 優先法則…………………………………..57
5.1.2.2最近 LOT 優先法則………………………………………..62
5.1.2.3最高權限 LOT 優先法則…………………………………..63
5.1.2.4最早繳期 LOT 優先法則…………………………………..64
5.1.2.5隨機法則…………………………………….……………….65
5.1.2.6修正最近 LOT 優先派車法則 …….....….………….……..66
5.1.2.7最早進 Fab LOT 優先派車法則………...………………....67
5.1.2.8加權參數式最近 LOT 優先派車法則….………………….68
5.1.2.9多重任務導向模糊派車法則………….….…………………69
5.1.3 Intrabay系統效能分析與討論…………………………………...74
5.2 Fab模擬結果………………………………………………………….76
第六章 結論與未來研究方向…………………………………………………78
6.1 結論…………………………………………………………….……..78
6.2 未來研究方向………………………………………………….……..78
參考文獻………………………………………………………………………..79
附錄A：Distributed Modeling and Simulation of 300 mm Fab Intrabay Automation System Using Distributed Agent Oriented PetriNets

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