臺灣博碩士論文加值系統

中文摘要

現今的表面聲波元件已被廣泛地應用在各通訊系統領域中，作為頻率選取與雜訊抑制的濾波器元件。運用表面聲波元件其聲波機制，感測出質量微量變化的特性也備受注意。而表面聲波元件表面上所塗佈之聚合薄膜可作為化學辨識感測器，並廣泛地運用在不同之有機氣體感測。
在本論文中我們利用雙埠表面聲波元件來製作皮爾斯型式的振盪器。其表面聲波元件之中心頻率及插入損耗分別為157MHz和-19.408dB。在製作完後的振盪器其震盪頻率與輸出功率分別為157.040MHz與17.56dBm，而其相位雜訊為-77.79dBc/Hz@100KHz。最後配合商用之混頻元件，完成整合型表面聲波感測器之製作與量測，而其輸出功率為2.38dBm@531KHz。
本論文感測實驗中，在表面聲波振盪器上塗佈聚亞烯胺和纖維醋酸酯薄膜來偵測相對溼度變化。此外，於表面聲波振盪器上塗佈聚乙烯亞胺、乙基纖維素、聚苯乙烯與三氟丙基-甲基聚矽化烷等四種薄膜量測甲酚、水、二氯乙烷、苯與酒精蒸氣其質量所造成之頻率變化。在實驗中所感測出之結果將在本文中作相關的討論。

Abstract

Surface acoustic wave (SAW) devices have been used as filters in modern communication systems. In addition, Quartz SAW device using surface acoustic wave modes have been the most extensively used in mass sensing devices. SAW devices coated with polymer as chemical sensors become popular in the detection of a variety of organic gases.
This thesis presents a Pierce-type oscillator using two-port SAW devices. The center frequency and the insertion loss of SAW device are 157MHz and –19.408dB respectively. The output frequency and power of oscillator using SAW device is 157.040MHz and 17.56dBm respectively, while its phase noise is -77.79dBc/Hz@100KHz. And the resulting power of SAW integration sensor after frequency differentiation is 2.38dBm@531KHz.
SAW ocillators with organic films using polyimide and cellulose acetate detect the variation of the relative humidity. In addition, SAW ocillators coated with the poly(ethylenimine), ethyl cellulose, polystyrene and OV210 films detect variations of frequency for sensing vapors of water, ethanol, benzene, m-cresol and dichloroethane. Results were obtained and discussed with SAW devices for the organic gas detection.

Contents
中文摘要.....................................................................I
Abstract....................................................................II
Acknowledgments.............................................................III
Contents....................................................................IV
Figure captions.............................................................VII
Table captions..............................................................IX

章節摘要
第一章 感測器之導論........................................................XI
第二章 感測系統之製作與量測...............................................XII
第三章 表面聲波溼度感測器................................................XIII
第四章 有機氣體化學感測器.................................................XIV
第五章 結論與未來工作......................................................XV
Chapter 1 Introduction to Sensors.............................................1
1-1 Definition of Sensors.....................................................1
1-2 Operation Principle of Sensors............................................3
1-3 Classifications of Sensors................................................4
1-4 Acoustic Sensors..........................................................5
1-4-1 Fundamentals of Acoustic Wave...........................................6
1-4-2 Piezoelectric Materials.................................................9
1-4-3 Surface Acoustic Wave (SAW)............................................11
1-4-4 Surface Acoustic Wave Sensing..........................................13
1-5 Organization of this Thesis.............................................14
Chapter 2 Device Fabrication and Circuit Design.............................16
2-1 SAW Devices.........................................................16
2-1-1 Design of the SAW Transducers.........................................17
2-1-2 Fabrication of SAW Devices............................................19
2-1-3 SAW Characterization..................................................22
2-1-4 SAW Device Package....................................................26
2-2 SAW Sensing Systems....................................................27
2-2-1 Design of Two-Port Oscillators.........................................27
2-2-2 Mixers Characteristics..............................................30
2-2-3 Sensor System Integration .............................................32
2-2-4 Fabrications and Measurements..........................................33
2-3 Conclusion.............................................................37
Chapter 3 SAW Humidity Sensors..............................................39
3-1 Introduction to Humidity Sensors.......................................39
3-2 Definition of Relative humidity........................................41
3-3 Classification of Humidity Sensors.....................................42
3-3-1 Ceramic Humidity Sensors...............................................42
3-3-2 Capacitance-type Humidity Sensors......................................44
3-3-3 Dew-Point Sensors......................................................46
3-4 SAW Humidity Sensors...................................................48
3-5 Experiments and Results................................................49
3-6 Conclusions............................................................52
Chapter 4 Organic Vapor Chemicals Sensors...................................54
4-1 Introduction to Gas Sensor.............................................54
4-2 Comparison of Acoustic sensors.........................................54
4-3 Experiment and Results.................................................58
4-3-1 Polymer Film Coating...................................................58
4-3-2 Experiment Setup.......................................................59
4-3-3 Result and Discussions.................................................61
4-4 Conclusions.........................................................70
Chapter 5 Conclusions and Future Works......................................73
5-1 Conclusions............................................................73
5-2 Future Works...........................................................74
Reference....................................................................75
Appendix.....................................................................79
VITA.........................................................................80

Figure captions

Figure 1-1. Physical dimensions which are converted into an electric signal.
Figure 1-2. Sensor principles. Schematic diagram of a sensor that produces an electrical output in response to the presence of an input quantity.
Figure 1-3. A general measurement system.
Figure 1-4. Schematic illustration of motions of groups of atoms shown in cross-sectional views of solids as plane elastic waves propagate to the right. (a) bulk longitudinal wave in unbounded solid; (b) bulk transverse wave in unbounded solid; (c) surface acoustic wave (SAW) in semi-infinite solid; (d) waves in thin solid plates (Lamb waves).
Figure 1-5. Transformation of mechanical energy into electrical energy.
Figure 1-6. Schematic representation of surface acoustic wave motion on the surface solid.
Figure 1-7. Schematic representation of surface acoustic wave motion on the surface solid.
Figure 1-8. Measurement methods for resonators and delay lines.
Figure 2-1. The basic scheme of IDT for a SAW filter.
Figure 2-2. The process flow diagram for SAW device.
Figure 2-3. The measurement of current leakage by using semiconductor parameter analyzer (HP4155C).
Figure 2-4. The simulation results of the PCB.
Figure 2-5. The diagram of soldered SAW device on the PCB.
Figure 2-6. Block diagram of a network analyzer measurement of two-port device.
Figure 2-7. The diagram of SAW device on the PCB.
Figure 2-8. The measurement of SAW device.
Figure 2-9. The commercial TO-series packages.
Figure 2-10. An oscillator model as the combination of an amplifier and a feedback loop.
Figure 2-11. Pierce oscillator working with SAW device.
Figure 2-12. The complete oscillator circuit.
Figure 2-13. The simulation of the oscillation condition and resonance frequency.
Figure 2-14. Conversion compression and intermodulation product of a mixer.
Figure 2-15. The diagram of SAW integration sensor.
Figure 2-16. SAW device with soldered PCBs.
Figure 2-17. The simulation and real measurement of SAW device (a) S11, (b) S21.
Figure 2-18. The scheme of measurement setup.
Figure 2-19. The measurement result of oscillation.
Figure 2-20. The circuit of the mixer.
Figure 2-21. The SAW integrated sensor circuit.
Figure 2-22. The intermediate frequency of integrated sensor circuit.
Figure 3-1. The schematic of alumina sensor.
Figure 3-2. The equivalent circuit of alumina sensor.
Figure 3-3. The schematic view of a colloidal Fe3O4 sensor.
Figure 3-4. The schematic drawing of a humidity sensor.
Figure 3-5. The structure of the integrated temperature humidity sensors (a) top view (b) cross sectional view at a-b.
Figure 3-6. The scheme of an MOS-type capacitive dew-point sensor.
Figure 3-7. The scheme of SAW sensors for relative humidity sensing in a commercial test chamber.
Figure 3-8. The long term drift of SAW oscillator.
Figure 3-9. The frequency shifts from 50%RH at 50oC of uncoated SAW oscillator.
Figure 3-10. The frequency shifts of SAW oscillator with polyimide coating.
Figure 3-11. The frequency shifts of SAW oscillator with cellulose acetate coating.
Figure 4-1. The schematic diagram of air spray.
Figure 4-2. The schematic diagram of organic vapor sensing system.
Figure 4-3. The diffusion tube of organic vapor sensing system.
Figure 4-4. Structure images of (a) poly(ethylenimine) (b) polystyrene (c) OV210 (d) ethyl cellulose.
Figure 4-5. The frequency variation that coated with polystyrene films for sensing (a) benzene vapors and poly(ethylenimine) films for sensing (b) water vapors.
Figure 4-6. omparison of (a) poly(ethylenimine) (b) polystyrene (c) OV210 (d) ethyl cellulose from radar chart.
Figure 4-7. Adsorption properties of the four polymer films (a) water (b) m-cresol (c) dichloroethane (d) ethanol (e) benzene.
Figure 4-8. Comparison of four-SAW-device sensor array response patterns for five chemical compounds. (a)ethanol (b)dichloroethane (c)water (d)benzene (e)m-cresol.
Figure 4-9. The concentration of ethanol versus the frequency shifts.
Figure 4-10. The summaried fingerprint of the adsorption for the four SAW sensors.

Table captions

Table 1-1. The various forms of energy from a physical point of view.
Table 1-2. Six types of input signal in the measurement system.
Table 2-1. The conditions of our design in mask.
Table 2-2. Oscillator performances
Table 2-3. Mixer performances
Table 3-1. Applications of Humidity Sensors
Table 4-1. Mass Sensitivities Sm of the main types of acoustic sensors.
Table 4-2. Qualitative Comparisons of Acoustic Sensors.
Table 4-3. The ratio of adsorption for four-SAW-device sensors.

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