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研究生:許世杰
論文名稱:生物濾床法應用於半導體實場操作之研究
指導教授:盧重興盧重興引用關係
學位類別:碩士
校院名稱:國立中興大學
系所名稱:環境工程學系
學門:工程學門
學類:環境工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:中文
中文關鍵詞:生物濾床異丙醇半導體
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本研究目的在於探討生物濾床法應用於實場之研究,研究中於一半導體實場進行模擬試驗,用以驗證生物濾床法處理半導體產業揮發性有機廢氣之適用性,包括影響去除率之操作因子及經濟效益分析。同時,因為研究中之半導體實場使用生物濾床法作為該廠揮發性有機廢氣之防治設備,且其長期操作效率約在30∼40 %之間。因此,為了提升其處理效率,本研究亦對實場濾床提出適合之改善方案。
研究中於半導體實廠設置三組試驗生物濾床處理其排放之揮發性有機廢氣。該廠主要排放之揮發性有機廢氣為異丙醇(約佔85 %)及二甲苯(約佔5∼10 %)等。實場濾床尺寸為12mx3.2mx3.2m,濾料填充厚度1.3m,使用馬糞與寶麗龍球所混合之商業化堆肥濾料,廢氣進入濾床前以增濕器增加廢氣溼度。
本研究對三組試驗濾床分別填充木炭球(添加營養源)及實場所用之濾料(分添加營養源與不加營養源)作模廠測試。在三組濾床實驗中發現,使用實場堆肥濾料的試驗濾床在空床停留時間20s以上的條件下,其總碳氫化合物穩定去除率皆可達到95 %以上。顯示實場生物濾床堆肥濾料並非不適用,影響去除率不佳的原因,可能為濾料內的微生物缺乏較佳的生長環境(生物因子),及濾料分佈不均勻(物理因子),造成實場生物濾床處理揮發性有機廢氣效率不彰。比較添加營養鹽與否,未加營養源生物濾床的去除率較差且在排放廢氣濃度負荷較高時去除率有下降的趨勢。填充木炭球的試驗濾床因為採現場污泥植種方式,因此,相較於其他兩組採用實場堆肥濾料的試驗濾床,其初期啟動速度較慢,約需2個月的時間(歷經停留時間90s及60s),其生物膜達到穩定,去除率可達95 %以上。
本研究中亦對生物濾床及活性碳吸附法作經濟及效益評估,結果顯示出生物濾床法初置成本較高,但透過年平均法(Annual worth method)的計算,活性碳吸附法為424.4萬元/年,而生物濾床法只需229.4萬元/年,顯示生物濾床法較活性碳吸附法經濟許多。
目錄
摘 要 I
目錄 III
圖 目 錄 VII
表 目 錄 IX
第一章 前言 1
1-1.研究背景 1
1-2.研究目的 2
第二章 文獻回顧 4
2-1.半導體產業概況 4
2-2.半導體製程及其VOCs排放來源 5
2-3.VOCs 對人體之危害性 8
2-4.目前常見的VOCs防治設備 9
2-4.1.吸附法 10
2-4.2.焚化法 11
2-4.3.沸石轉輪 11
2-4.4.生物處理法 12
2-5.生物濾床法介紹 13
2-6.影響生物濾床處裡效率因子 18
2-6.1.填充介質的選擇 18
2-6.2.水分含量及溼度 21
2-6.3.氣流流向 22
2-6.4.微生物菌相 23
2-6.5.pH值 24
2-6.6.溫度 26
2-6.7.營養源與毒性 28
2-6.8.進流流場與濾床中氣流分佈 29
2-6.9.廢氣種類 29
2-6.10.處理系統種類 31
第三章 材料與方法 33
3-1.研究流程圖 33
3-2.試驗設備及藥品 34
3-3.控制條件及進行步驟 39
3-4.分析項目及方法 40
第四章 結果與討論 43
4-1.實場簡介 43
4-2.試驗實驗結果 44
4-3.實場生物濾床操作問題研究 54
4-4.改善成效 59
4-5.經濟效益評估 62
4-5.1.初置成本 62
4-5.2.年操作成本 63
4-5.3.成本分析 64
4-5.4.成本比較 64
第五章 結論與建議 66
5-1.結論 66
5-2.建議 68
參 考 文 獻 69
一、國內文獻 69
二、國外文獻 71
附 件 78
1.木炭球添加營養源系統試驗數據 78
2.實場堆肥濾料添加營養源系統試驗數據 80
3.實場堆肥濾料未添加營養源系統試驗數據 82
4.實場濾床監測數據 84
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