臺灣博碩士論文加值系統

本文提出(1)使用雷射二極體與PSD(Position Sensing Detector)建立旋轉軸量測系統、(2)使用雷射二極體與PSD建立PSD平板量測系統。
旋轉軸量測系統具有架設容易，成本較低之優點，可應用於旋轉軸誤差量測、旋轉軸轉速、旋轉軸加速度、旋轉軸熱飄移等量測。此系統的最大特點在於雷射光源具有內建電源，當它架設於旋轉軸上，不具繞線問題，且不需使用標準軸或標準球。針對其擺設誤差，本文提出半反向法，此法可用於降低擺設誤差的影響。目前，系統已完成軟硬體的建立，經校正及實機測試，系統不確定度可達0.5μm。
PSD平板量測系統是由兩組雷射光源以及4組PSD所組成，透過文中所規劃的擺設方式及量測路徑，可以求得三軸工具機的21個體積誤差源。此系統系統除了體積誤差的量測外，亦可作為工具機定位重覆性測試工具。目前，系統已完成軟硬體的建立，經由校正及實機測試，不確定度可達1μm。

In this thesis, two measuring systems were developed: (1) a spindle error measuring system to measure the errors motion of spindle, and (2) a PSD plat measuring system to measure the geometric error of CMM/machine tools.
The advantages of the spindle error measurment system are its low cost and its multi-functions, which include spindle speed measurement, spindle acceleration measurement and spindle thermal drift measurement. Further more, with the benefit of a built-in power system, there was no wiring problem. Thus, no limitations exist on continue test of spindle error. Both software and hardware were established in this measurement system. Its uncertainty can be up to 0.5μm.
The PSDs plat measuring system consists of 2 lasers and 4 PSDs. By specifying its measuring path, the geometric errors of a three-axis machine tool can be obtained. It can use in CMM and CNC machine tool repeatability test. Both software and hardware were also developed. Its uncertainty can be up to 1μm.
keyword：spindle error, position sensing detector, inverse method, geometric error.

目錄
考試合格證明……………………………………………… I
中文摘要…………………………………………………… II
英文摘要……………………………………………………III
誌謝………………………………………………………… IV
目錄………………………………………………………… V
圖目錄………………………………………………………VII
表目錄……………………………………………………… XI
符號表………………………………………………………XII
第一章 緒論…………………………………………………1
1-1 前言…………………………………………………… 1
1-2 文獻回顧……………………………………………… 1
1-3 研究目的與本文架構………………………………… 7
1-3-1 研究目的……………………………………… 7
1-3-2 本文架構……………………………………… 8
第二章 工具機誤差來源………………………………… 9
2-1 靜態誤差………………………………………… 9
2-1-1熱變形誤差……………………………………9
2-1-2機構幾何誤差……………………………… 10
2-2 動態誤差種類……………………………………11
2-3 工具機運動誤差之原因…………………………12
2-4 旋轉軸誤差………………………………………12
第三章 雷射四象儀量測系統……………………………18
3-1 雷射四象儀量測系統關鍵元件介紹…………………18
3-1-1 PSD(Position Sensing Detector)………………18
3-1-2 雷射光源……………………………………………31
3-1-3 訊號處理器…………………………………………32
3-1-4 A/D卡(類比訊號轉數位訊號轉換卡)……………34
3-1-5 雷射干涉儀…………………………………………35
第四章 雷射四象儀旋轉軸量測系統……………………37
4-1旋轉軸量測系統系統架構…………………………… 37
4-2旋轉軸量測系統應用於工具機旋轉軸量測………… 38
4-3旋轉軸量測系統應用於第四軸……………………… 43
4-4 PSD擺設誤差的影響………………………………… 46
4-4-1誤差模型…………………………………………… 46
4-4-2半反向法…………………………………………… 47
4-4量測系統程式………………………………………… 55
第五章 PSD平板量測系統……………………………… 66
5-1 PSD平板量測原理…………………………………… 66
5-2 PSD平板校正………………………………………… 67
5-3幾何誤差量測方法…………………………………… 69
5-3-1量測系統架設……………………………………… 69
5-3-2 使用半反向法消除雷射的擺設誤差………………71
5-3-3幾何誤差量測……………………………………… 73
5-4平台重覆性測試……………………………………… 84
5-4-1 1D重覆性測試………………………………………84
5-4-2 2D重覆性測試………………………………………86
第六章 實驗結果與討論…………………………………90
6-1量測系統校正………………………………………… 90
6-2 Machine Center旋轉軸量測結果……………………92
6-2-1旋轉軸誤差量測…………………………………92
6-2-2轉速量測…………………………………………95
6-2-3加減速量測………………………………………97
6-2-4熱飄移量測…………………………………… 102
6-2-5 wobble誤差量測………………………………107
6-2-6半反向法量測………………………………… 110
6-3第四軸旋轉軸誤差量測結果…………………………122
6-4工具機幾何誤差量測…………………………………124
第七章 結論與與未來研究方向……………………… 127
7-1結論………………………………………………127
7-2未來研究方向……………………………………128
參考文獻………………………………………………… 129
自述……………………………………………………… 132

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