臺灣博碩士論文加值系統

本文研究目標主要在於討論如何改良液壓滑台之摩擦力對定位精度的影響，改良方式可以設計低摩擦硬體與控制補償。本文所設計的低摩擦油壓伺服滑台，是以使用聚四氟乙烯(PTFE)滑動密封的油壓缸並以線性滑軌以便達到油壓滑台的低摩擦目標，經由量測滑台於各種工作條件下之摩擦特性與多點定位控制實驗結果，本文所設計之低摩擦滑台相較於一般油壓滑台於各項響應性能均較佳，但是在達到目標點以後易因中位飄移發生滑動。根據系統摩擦特性，對低速運動時易發生之黏滯摩擦設計補償訊號。由實驗結果可知，無論最大靜摩擦增益補償或是顫震訊號的控制器均可使一般的滑台也能達到1μm定位精度。

The purpose of this paper is to discuss how to improve the position accuracy effect by the friction force. The improving methods can be designing a low-friction hardware and compensation in controller. The hydraulic slider designed in this paper is with the PTFE slipper-seal and linear guide so it can achieve the low-friction goal. After measuring the friction force of the slider in each kind of working condition and multi-point positioning, the control performance of the slider designed in this paper is better than the general hydraulic slider, but when the slider reaches the goal position, it slips easily because of the null point draft. According to the friction character of the system, we can try to design the compensation signal for the stick friction due to the low working velocity. In the result of the control experiment, the controller with either the max static friction compensation or the dither signal can let the general slider achieve 1μm position accuracy.

目錄
中文摘要I
英文摘要II
致謝III
目錄IV
表目錄VI
圖目錄VII
符號說明XI
第一章緒論1
1-1 研究動機與目的1
1-2 文獻回顧2
1-3 研究目標與本文架構3
第二章液壓伺服滑台之系統架構5
2-1 微電腦與控制介面7
2-2 感測器7
2-3 電液伺服閥9
2-4 液壓滑台11
2-5 實驗設備元件12
第三章低摩擦油壓滑台之設計13
3-1 油壓滑台的運動特性13
3-2 油壓滑台之構造與低摩擦化方式15
3-3 線性滑軌20
3-4 油壓缸低摩擦設計23
第四章摩擦力量測原理與實驗結果27
4-1 系統模式推導27
4-2 油壓缸摩擦力的量測原理32
4-3 量測結果與討論35
第五章定位控制45
5-1 低摩擦滑台之定位控制與實驗結果46
5-2 一般油壓滑台之定位控制與實驗結果56
5-3 具摩擦補償之PD控制器設計65
第六章結論74
參考文獻77
自述81

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