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研究生:曾景泰
研究生(外文):Ching-Tai Tseng
論文名稱:內植壓力感測器之銬型微電極研究
論文名稱(外文):Study of Cuff Electrodes with Embedded Pressure Sensors
指導教授:朱銘祥朱銘祥引用關係林宙晴林宙晴引用關係
指導教授(外文):Ming-Shaung JuChou-Ching K. Lin
學位類別:碩士
校院名稱:國立成功大學
系所名稱:機械工程學系碩博士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:中文
論文頁數:67
中文關鍵詞:微機電系統銬型微電極壓力感測器
外文關鍵詞:Cuff electrodePressure sensorMEMS
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銬型微電極為神經義肢的重要元件,通常將其銬於神經周圍,用於直接刺激運動神經元,或者用來量測神經電訊號。從文獻上得知,當神經所受壓力大於20 mmHg時,便會對神經內之血液微循環造成阻礙,而導致神經組織之受損或壞死。因此,本研究應用微機電系統技術,利用薄膜製程技術發展內植壓力感測器之銬型微電極,以量測神經所受之壓力及監測其健康情況。以現有之電極製程技術,以及相關製程參數,選擇以電容式壓力感測器,來與銬型微電極之薄膜製程整合。
本研究所製作之電容式壓力感測器,在先前研究中透過有限元素法之電腦模擬,得到最大靈敏度設計之電極大小為700 × 700μm2,介電層厚度為4μm,量測範圍為0~100mmHg,而其靈敏度為1.81×10-4 pF / mmHg‧pF。在製程方面,已完成內植壓力感測器之銬型微電極之製作。並且製作一電容感測電路與架設一校正系統,進行壓力感測器之校正。同時測試介電層材料之機械性質,探討介電層之楊氏係數與感測器靈敏度之關係。此外,更透過神經銬型電極壓力感測器,量測不同直徑之銬型電極對神經所產生之壓力。最後透過動物實驗,探討電容式壓力感測器在動物體內之可行性。
Cuff electrode is an important component of neural prostheses, and they are usually wrapped around the nerves to stimulate the motor fibers or to measure the electrical signals of sensory fibers. It is known that the highest endurable pressure of the peripheral nerves is only 20mmHg. For a pressure over the limit, the micro circulation in the nerve fascicles will be blocked, causing ischemia in nerve tissues. The goal of this study is to design and fabricate a micro pressure sensor by MEMS technology and to be integrated with the cuff electrodes for monitoring the wellbeing condition of the peripheral nerves.
The maximum sensitivity of pressure sensors was determined from the simulation of finite element method in the previous study. The dimension of one sensing electrode is 700 by 700 micro meters, the thickness of dielectric layer is 4 micro meters, the measure range is 0 to 100 mmHg, and the sensitivity is 1.81×10-4 pF / mmHg‧pF. The fabrication of cuff electrodes with embedded pressure sensors is completed. A capacitance conditioning circuit is found and a calibration system is set up to calibrate the pressure sensor. The mechanical property of the dielectric layer, PDMS, is also measured to discuss the relationship between Young’s modulus and the sensitivity. Beside, a nerve cuff electrode pressure sensor is used to measure the external pressure generated by the cuff electrode of different diameters. Finally, the feasibility of capacitive pressure sensor is tested through an animal experiment.
中文摘要i
英文摘要ii
誌謝 iii
中文目錄iv
表目錄 vii
圖目錄 viii
符號說明xi
第一章 緒論 1
1-1 研究背景1
1-2 文獻回顧4
1-3 研究動機與目的 7
第二章 方法與實驗 8
2-1 微機電系統技術 8
2-1-1 面型微細加工 9
2-1-2 旋轉塗佈技術 10
2-1-3 電子束薄膜蒸鍍技術11
2-1-4 光微影及光蝕刻技術12
2-2 銬型電極 13
2-3 壓力感測器 15
2-3-1電容式壓力感測器原理 16
2-3-2電容式壓力感測器之設計 18
2-3-3介電層之機械力學性質 19
2-3-4電容量測電路 22
2-3-5壓力感測器之校正 24
2-4神經銬型電極所產生壓力之量測 28
2-5 具壓力感測器之銬型電極製程 31
2-6 動物實驗 34
第三章 結果與討論 36
3-1 微機電製程結果 36
3-1-1銬型電極之改良 36
3-1-2具壓力感測器之銬型電極製作結果41
3-1-3介電層厚度與力學性質測試結果 43
3-2 壓力感測器校正結果 50
3-2-1量測電路之測試結果 50
3-2-2壓力感測器之校正結果 52
3-3 銬型電極施加壓力之量測結果 54
3-4 動物實驗結果 55
3-5 討論 57
3-5-1 壓力感測器之設計 57
3-5-2 壓力感測器之製程 58
3-5-3 壓力感測器之薄膜力學性質 59
3-5-4 壓力感測器之校正測試 60
3-5-5 動物實驗 61
第四章 結論與建議 62
4-1 結論 62
4-2 建議 64
參考文獻 65
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