臺灣博碩士論文加值系統

　　本文研究的對象為交指叉電極週期24 μm ，金屬線寬6 μm且金屬比為0.5的交指叉電極與其構成的表面聲波元件，研究範圍包括理論模擬、製程實作、與實驗量測。
　　在理論方面採用B.P. Abbott所提出的模態耦合理論作為模擬分析表面聲波元件的依據，將表面聲波元件的結構以三埠矩陣形式表示，再透過矩陣串聯的方式求得完整表面聲波元件的頻率響應；並利用模擬分別探討各項設計參數對於表面聲波元件頻率響應的影響，求取最適合的設計參數。在實驗方面搭配微機電系統技術，以三種壓電材料基板(ST-cut Quartz, YZ-cut LiNbO3, 128。Y-cut LiNbO3)實地製作表面聲波元件，並以高頻探針與網路分析儀量取表面聲波元件的頻率響應。比較模擬與實驗的結果，可以發現模擬與實驗在ST-cut Quartz壓電基板上有相當程度的吻合，但是在高壓電性質的壓電基板上，如128。Y-cut LiNbO3誤差較大，在YZ-cut LiNbO3則無法淬取出實用的模擬參數。
　　本文藉由實驗量測與理論模擬的比較，可以說明模態耦合理論應用於表面聲波元件上的適用性，並且可以作為往後設計時的依據。

　　This thesis investigates several surface acoustic wave devices and their performance by means of theoretical simulation, fabrication, and experimental measurement. The devises all have interdigital transducer (IDT) with a period of 24 um and a metalization ratio of 0.5.
　　The simulation is based on coupling-of-modes theory presented by B.P. Abbott in 1989. In this theory, the uniform interdigital transducer is represented as a three-port matrix. The frequency response of SAW devices can be obtained by cascading these matrices. The design parameters of interdigital transducer which influence the frequency response can be analyzed. The SAW devices are fabricated on three kinds of piezoelectric material substrates by MEMS technology. Their frequency response is measured by microwave probe and network analyzer. Comparison between simulation and measurement indicates that both ST-cut quartz and 128˚Y-cut LiNbO3 are in good agreement. However, the simulation parameters of YZ-cut LiNbO3 cannot be accurately determined.
　　It is also demonstrated that the frequency response of non-uniform or apodized interdigital transducers can also be simulated by dividing them into several independent sections. Hence, the coupling-of-modes theory can be further applied to SAW devices such as two-port SAW filters in the future.

摘要 …………………………………………………………………………I
Abstract ……………………………………………………………………II
致謝 …………………………………………………………………………III
目錄 …………………………………………………………………………IV
表目錄 ………………………………………………………………………VII
圖目錄 ………………………………………………………………………VIII
符號說明 ……………………………………………………………………XI
第一章導論 ………………………………………………………………… 1
1-1研究背景與目的 …………………………………………………… 1
1-2文獻回顧 …………………………………………………………… 2
1-3本文架構 …………………………………………………………… 4
第二章模態耦合理論 ……………………………………………………… 5
2-1非耦合一階波傳方程式 …………………………………………… 5
2-2波傳損失 …………………………………………………………… 8
2-3柵欄反射 …………………………………………………………… 9
2-4電性轉換 …………………………………………………………… 13
2-5匯流排電流 ………………………………………………………… 15
2-6參數化簡 …………………………………………………………… 19
2-7Mixed-Matrix，[P]矩陣 …………………………………………… 22
第三章設計參數 …………………………………………………………… 27
3-1壓電基板的選擇 …………………………………………………… 27
3-2各項參數定義 ……………………………………………………… 30
3-2.1波傳損失 …………………………………………………………… 30
3-2.2反射係數 …………………………………………………………… 31
3-2.3電性轉換係數 ……………………………………………………… 32
3-2.4薄膜電阻 …………………………………………………………… 32
3-2.5電容 ………………………………………………………………… 33
3-2.6表面波波速 ………………………………………………………… 33
3-3金屬柵欄數目 ……………………………………………………… 33
3-4金屬厚度 …………………………………………………………… 36
3-5交指叉電極對數 …………………………………………………… 38
3-6交指叉電極交叉重疊長度 ………………………………………… 39
3-7延遲距離 …………………………………………………………… 41
第四章實作與量測 ………………………………………………………… 45
4-1光罩設計 …………………………………………………………… 45
4-2元件製程 …………………………………………………………… 46
4-2.1晶片清洗 …………………………………………………………… 47
4-2.2微影製程 …………………………………………………………… 48
4-2.2.1塗佈光阻 …………………………………………………………… 48
4-2.2.2曝光 ………………………………………………………………… 50
4-2.2.3顯影 ………………………………………………………………… 51
4-2.3金屬蒸鍍 …………………………………………………………… 52
4-2.4光阻去除 …………………………………………………………… 55
4-2.5晶圓切割 …………………………………………………………… 57
4-3元件量測 …………………………………………………………… 58
4-3.1儀器架構 …………………………………………………………… 58
4-3.2量測方法 …………………………………………………………… 59
第五章量測結果與模擬分析 ……………………………………………… 61
5-1[P]矩陣平移 ………………………………………………………… 61
5-2理論模擬與實驗比較 ……………………………………………… 62
5-2.1單埠共振器 ………………………………………………………… 62
5-2.2雙埠濾波器 ………………………………………………………… 66
5-3參數淬取 …………………………………………………………… 68
5-4分割均勻交指叉電極換能器 ……………………………………… 79
第六章結論 ………………………………………………………………… 82
6-1結論 ………………………………………………………………… 82
6-2未來展望 …………………………………………………………… 84
參考文獻 ………………………………………………………………………… 85

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