跳到主要內容

臺灣博碩士論文加值系統

(44.212.99.208) 您好!臺灣時間:2024/04/23 23:07
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

: 
twitterline
研究生:花聰傑
研究生(外文):Thung-Jie Hwa
論文名稱:微小型PVDF壓力感測器之聲學特性研究
論文名稱(外文):Acoustic Characteristics of Miniature PVDF Pressure Sensors
指導教授:王逸君
指導教授(外文):Yi-Chun Wang
學位類別:碩士
校院名稱:國立成功大學
系所名稱:機械工程學系碩博士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:中文
論文頁數:72
中文關鍵詞:準分子雷射微細加工PVDF微型壓力感測器聲波水下聽音器靈敏度
外文關鍵詞:Acoustic waveHydrophoneSensitivityPVDF micro-pressure sensorExcimer laser micro-machining
相關次數:
  • 被引用被引用:3
  • 點閱點閱:366
  • 評分評分:
  • 下載下載:93
  • 收藏至我的研究室書目清單書目收藏:0
本研究使用準分子雷射微細加工技術,以準分子雷射配合程式控制精密移動平台,在厚度 的PVDF (polyvinylidene fluoride) 壓電薄膜上,加工出感測面積為1.5mm×1.5mm及2mm×2mm之微型壓力感測器。為了瞭解此種微型壓力感測器之聲學特性,我們分別以超音波換能器及水下聽音器,頻率為數佰萬赫及數十仟赫的聲場,並以校正過之聽音器在同一聲場同一位置處所量得訊號,比較求得微型壓力感測器之靈敏度。
This study employed a excimer laser mirco-maching technique on a thick PVDF (polyvinylidene fluoride) piezoelectric film to fabricate miniature pressure sensors .The sizes of sensing area are 1.5mm×1.5mm and 2mm×2mm.
To investigate the acoustic characteristics of the sensors , acoustic fields generated by ultrasound transducers and hydrophones were used to test the sensors in frequencies of the orders of few MHz and tens of kHz respectively.
Sensitivities of the sensors were obtained by comparing the sensor output to those of calibrated hydrophones which were located nearby in the same acoustic field.
摘要...........................................Ⅰ
英文摘要.......................................Ⅱ
誌謝...........................................Ⅲ
目錄...........................................Ⅳ
圖目錄.........................................Ⅵ
表目錄.........................................Ⅸ
符號說明.......................................Ⅹ
第一章 緒論.....................................1
1-1 研究背景與動機...........................1
1-2 本文架構.................................2
第二章 實驗設備與儀器...........................3
2-1 實驗架構.................................3
2-2 實驗設備.................................4
2-2-1直流電源供應器(Power Supply) .........4
2-2-2 放大器...............................4
2-2-3 函數產生器(Function Generator)、示波.5
2-2-4 脈衝產生接收器(Pulse Receiver).......5
2-2-5 線性平台.............................6
2-2-6 超音波換能器(Ultrasound Transducer)..6
2-2-7 水下聽音器(Hydrophone)...............6
2-2-8 準分子雷射加工系統...................8
第三章 微型壓力感測器之加工與製作..............17
3-1 PVDF壓電薄膜之特性......................17
3-2 準分子雷射之加工原理與控制..............19
3-3 PVDF壓電薄膜之加工特性..................20
3-4 光罩之設計.............................21
3-5 微型壓力感測器製作過程..................22
3-6 整體組合................................23
第四章 PVDF感測器與水下聽音器之特性及壓力分佈..27
4-1 壓電特性................................27
4-1-1 正逆電壓效應........................27
4-1-2 壓電材料及其應用...................28
4-2 水下聽音器之操作效能與應用..............29
4-2-1 水下聽音器之應用....................30
4-3 聲壓量測................................31
4-3-1 聲源頻率在75kHz~100kHz之範圍........31
4-3-2 聲源頻率在1MHz~20MHz之範圍..........33
第五章 結果與討論..............................41
5-1 實驗量測步驟............................41
5-1-1 以超音波換能器為聲波之激發源產生聲場
(頻率範圍1MHz~20MHz)................41
5-1-2 以8104水聽器為聲波之激發源產生聲場
(頻率範圍75kHz~100kHz).............44
第六章 結論與未來展望..........................62
6-1 結論....................................63
6-2 未來展望................................64
附錄..........................................65
參考文獻......................................69
Brannon, J., 1997,“Excimer Laser Ablation and Etching.”IEEE Cir. Dev, Vol. 13, pp. 11-18.
Dou, K., Knobbe, E.T., Parkhill, R.L., and Wang, Y.M., 2000,“Surface Texturing of Aluminum Alloy 2024-T3 via Femto and Nanosecond Pulse Excimer Laser Irradiation .”IEEE J. Sel. Top. Quant, Vol. 6, pp. 689-695.
Hayashi, H. and Miyamoto, I., 1995,“Process of Thin Cu Film Removal by KrF Excimer Laser.”Proc. Laser Materials Processing Conf. ICALEO 1995, J. Mazumder et al., eds., Laser Institute of America, Orlando, Vol. 80, pp.391-400.
Pettit, G.H.and Sauerbrey, R., 1993, “Pulsed Ultraviolet Laser Ablation.” Phys. A, Vol. 56, pp. 51-63.
Lewin, P.A., 1981, “Miniature Piezoelectric Polymer Ultrasonic Hydrophone Probes.” Ultrasonics, Vol. 19, pp.123-126.
Bui, L., Shaw, H.J., and Zitelli, L.T., 1976, “Experimental Broadband Ultrasonic Transducers using PVDF Piezoelectric Film.” Electron. Lett, Vol. 12, pp.393-394.
Chivers, R.C. and Lewin, P. A., 1982, “The Voltage Sensitivity of Miniature Piezoelectric Plastic Ultrasonic Probes.” Ultrasonics, Vol. 20, pp.279-281.
Patterson, M. S. and Foster, F. S., 1982, “Acoustic Fields of Conical Radiatora.” IEEE Trans. Sonics Ultrasonics, Vol. SU-29, pp.83-92.

Harris, G. R., 1982, “ Sensitivity Considerations for PVDF Hydrophones using the Spot-poled Membrane Desing.” IEEE Trans. Sonics Ultrasonics, Vol. SU-29, pp.370-377.
Woodward, B., 1977, “ The suitability of polyvinylidene fluoride as an underwater transducer material.” Acoustica, Vol. 38, pp 264-268.
DeReggi, A.S., Edelman, S., and Roth, S., “Piezoelectric Polymer Receiving Arrays for Ultrasonic Applications.” J. Acoust. Soc. Am. Vol. 61, pp S17-18.
Chivers, R.C., and Lewin, P.A., 1979, “A Comparison of Different Designs of Miniature Hydrophone Probes.” Ultrasonics International 79, IPC Guildford, pp 434-446.
Wilson, D.T., Tancrell, R.H., and Callerame, J., 1979, “PVDF Polymer Microprobe, Proc. ”IEEE Ultrasonics Symposium, pp. 506-510.
Bacon, D.R., 1980, “ Properties of a PVDF Hydrophone With a 100MHz Bandwidth for Studying Medical.” IEEE Ultrasonics Symposium, pp. 582-585.
Kawai, H., 196, “ The piezoelectricity of poly(vinylidene flioride).” J. Appl. Phys, Vol. 8, pp. 975-976.
Murayama, N., Nakamura, K., Obara, H., and Segawa, M., 1976, “ The strong piezoelectricity in polyvinylidene fluoride(PVDF).” Ultrasonics, Vol. 14, pp. 15-23.
Woodward, B. and Chandra, R.C., 1975, “ Underwater acoustic measurements on polyvinylidene fluoride transducers.” Electrocomponent Sci. & Tech, Vol. 5, pp. 149-157.
Brendel, K. and Ludwing, G., 1976, “ Ultrasonics standard probe transducers.” Acoustica, Vol. 36, pp. 203-208.
Lewin, P.A. and Jensen, F., 1979, “ The use of miniature ultrasonic transducers for measurement in penetrable media.” In Ultrasonic International 79, IPC Science and Technology Press, Guildford, UK, PP. 279-286.
Ravinet, P., Hue, J., Volluet, G., Hartenmann, P., Broussoux, D., and Micheron, F., “ Acoustics and dielectric loss processes in PVDF.” In Proc. IEEE Symp. Ultrasonics, Vol. 80, pp. 1017-1022.
DeReggi, A.S., Roth, S.C., Kenney, J.M., Edelman, S., and Harris, G.R.
1981, “Piezoelectric Polymer Probe for Ultrasonic Applications.” J.Acoust. Soc. Am, Vol. 69, pp.853-859.
蒲勢艷, 2002,“應用雷射微細加工於PVDF壓力感測器之製作.”國立成功大學機械工程研究所碩士論文
劉金源, 2001, “水中聲學-水中系統之基本操作原理.” 國立編譯館主編.出版.
連結至畢業學校之論文網頁點我開啟連結
註: 此連結為研究生畢業學校所提供,不一定有電子全文可供下載,若連結有誤,請點選上方之〝勘誤回報〞功能,我們會盡快修正,謝謝!
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top