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研究生:賴崇琪
研究生(外文):Chao Chin Lai
論文名稱:微流體元件Flip-flop之研發
論文名稱(外文):The Development of a Micro Flip-flop element
指導教授:秦繼華秦繼華引用關係
指導教授(外文):Jin Hua Chin
學位類別:碩士
校院名稱:國立交通大學
系所名稱:機械工程系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2002
畢業學年度:91
語文別:英文
論文頁數:73
中文關鍵詞:微流體半導體製程雙穩態開關邏輯元件微通道微機電
外文關鍵詞:LogicFlip-flopMEMSMicro ChannelIC
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近幾年來,微機電技術被廣泛的用在各個領域,如下圖[1]所示,將元件大幅縮小,不但可以節省大量成本,對一些控制系統而言,不但可以大幅提高精密度,又不會佔去太多空間,因此,論文中將一流體元件微小化,並設計實驗檢測其邏輯性,實驗結果符合,且出口壓力值約為2bar.
Over the past few years the field of MEMS (Micro Electro Mechanical System) has become well established technology. This development was advanced by the prospect of being able to produce new types of sensors and fabricate them at low cost. We use some semiconductor technology and (110) p-type Silicon wafer to minimize some fluid element. Use the characteristic of the wafer''s crystal face and choose suitable etching solution (KOH) to etch the wafer, we can get the channel which is vertical to the wafer''s surface. And the channel part is finished. Then, use the same etching solution to etch through wafer, we can get holes on the wafer. And the port part (input/output part) is finished. Using the bond technology to assemble wafers (channel part and port part). Then, we can get a micro fluidic logic element. In the experiment, the element (port part) link up capillaries together and connect with the suitable fluidic pressure supply. Configures these fluidic pressure supplies and signal controller and observes the logic characteristics of the micro fluidic logic element. The results of the experiment conform to the logic characteristics of the micro fluidic logic element. And the pressure of the output is about 2 bar.
Index
Abstract…………………………………………………………………I
Index………………………………………………………III
Figure index………………………………………………………IV
Table index………………………………………………VI
Chapter 1 Introduction………………………………………………1
1.1 Foreword……………………………………………………………1
1.2Purpose of study…………………………………………………4
Chapter 2 Background Literature…………………………………6
2.1 Element theorem…………………………………………………6
2.2 Element process…………………………………………………9
2.2.1 RCA Cleaning………………………………………11
2.2.2 Oxide growth………………………………………13
2.2.3 Sputter Al…………………………………………14
2.2.4 Photolithography………………………………15
2.2.5 Remove Silicon Dioxide……...………………18
2.2.6 RIE etch…………………………………………20
2.2.7 KOH Etch…………………………………………21
2.2.8 Anodic Bonding…………………………………23
2.2.9 Element fabrication process………………25
2.3 Calculate element’s fluidic properties………………28
Chapter3 Element Fabrication And Experiment………………35
3.1 Element size………………………………………35
3.1.1 The design of micro Flip-Flop channel…35
3.1.2 The design of micro Flip-flop port………36
3.2 Element fabrication……………………………37
3.3 Experiment…………………………………………43
Chapter 4 Discussion……………………………………………62
4.1 Process modification……………………………63
4.2 Data analysis of experiment I………………65
4.3 Data analysis of experiment II………………70
Chapter 5 Conclusion……………...……………………………71
Reference……………………………………………………………72
References
1.NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics (CAMPmode) Campus Box 427, Boulder, Colorado 80309-0427, USA
2.Menz, W. und Bley, P.: “Mikrosystemtechnik fur Ingenieure”, VCH Verlag, Weinheim, 1993
3.Anthony Esposito:”Fluid Power with Applications”, 1997 p.504-509
4.國家毫微米元件實驗室:”積體電路製程技術訓練班講義”.
5.VLSI製程技術,莊達仁
6.http://www.src.nctu.edu.tw/mech_frame.htm
7.黃淳權,微機電概論,2000
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9.W.H. Ko et al. 1985. "Bonding Techniques for Microsensors," Micromachining and Micropackaging of Transducers, Elsevier Science Publishers.
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11.R. Bayt et al. July 1997. "A performance evaluation of MEMS-based Micronozzles," Proc 33rd AIAA/ASME/SAE/ ASEE Joint Propulsion Conference and Exhibit, Seattle, WA.
12.Fundamentals of fluid mechanics ,New York ,Addison-Wesley,1985 ,Philip M. Gerhart ,Richard J. Gross.
13.Fundamentals of fluid mechanics ,Bruce R. Munson , Donald F. Young , Theodore H. Okiishi , New York ,Wiley , 1990.
14.A mathematical introduction to fluid mechanics ,Chorin, A. J. & Marsden , J. E. New York ,Springer-Verlag ,1992.
15.An introduction to fluid dynamics //by G.K. Batchelor. Cambridge University press , 1999.
16.T.S.J. Lammerink, N.R. Tas, J.W. Berenschot, M.C. Elwenspoek and J.H.J. Fluitman :”Micromachined Hydraulic astable Multivibrator”, MESA Research Institute, University of Twente P.O. Box 217,7500 AE Enschede, the Netherlands,1995.
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