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研究生:王俊傑
研究生(外文):Chun Chieh Wang
論文名稱:大伸展式微熱致動器在微定位裝置上的研究
論文名稱(外文):Development of A Micro Positioner by Long Stretch Micro Drives
指導教授:徐文祥徐文祥引用關係
指導教授(外文):Wensyang Hsu
學位類別:碩士
校院名稱:國立交通大學
系所名稱:機械工程系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2003
畢業學年度:91
語文別:中文
論文頁數:39
中文關鍵詞:大伸展定位器
外文關鍵詞:Long StretchPositioner
相關次數:
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本研究使用了金屬面型微加工技術來製造一大伸展式微熱致動器(LSMD)以及利用 LSMD 及此製程來設計一定位機構,此製程使用了微影、犧牲層、以及電鍍技術來製造所設計之元件。為了增加 LSMD 之出力及位移以及定位器的定位可靠度,在此增加結構之厚度至 20 微米。
為克服增加厚度所遭遇之製造上的困難,在此需要改進過去的製程之參數,如微影製程與電鍍製程之參數;並且更換黏著層(由鉻換成鈦)與種子層(由鎳換成銅)之材料,可以提高元件存活之良率,由 80% 以下增至超過 95%。
經由測量與模擬結果之皆可發現 LSMD 之受力-位移行為顯現非線性的特性,且在固定操作電壓下其出力隨著位移的增加而減少。但卡榫致動器由於卡榫部分的結構過長,受到表面黏著現象的影響,LSMD 之出力無法克服其附著力來完成開合動作。種子層銅與結構鎳之間的材料附著性不足,受力在超過 50 g 即剝落。
A metal-base surface micromaching technology is developed to realize a long-stretch micro drives (LSMD) and a micro positioner device is designed and fabricated here. This process includes lithography , sacrificial layer and electroplating technique. The thickness of structures is increased to 20 um which is possible to induce larger output force and displacement of LSMD.
Because the increasing of the thickness of structures may cause many problems in fabrication, thus we improve some processes of fabrication such as lithography and electroplating.
Here, the behavior of LSMD is simulated and tested. The stiffness of LSMD approach to a nonlinear behavior and the output force is decreasing with the increasing of displacement under the controlled voltage.
The bayonet of the actuators of positioner has long structure that induces the bayonet stick with the wafer surface. And the adhesion force between seed layer Cu and structure Ni is too weak to reach up to 50 g.
中文摘要.………………………………………………………I
英文摘要.………………………………………………………Ⅱ
致謝.……………………………………………………………Ⅲ
附表目錄.………………………………………………………Ⅳ
附圖目錄.………………………………………………………Ⅴ
目錄……………………………………………………………Ⅶ
第一章 序論……………………………………………………1
1.1 研究動機……………………………………………………………1
1.2 文獻回顧……………………………………………………………3
1.3 研究方向……………………………………………………………11
第二章 元件設計………………………………………………12
2.1 概念設計……………………………………………………………12
2.2 細部設計……………………………………………………………15
2.2.1 大伸展式微熱致動器………………………………………15
2.2.2 卡榫致動器機構……………………………………………16
第三章 製程介紹………………………………………………20
3.1 材料選擇……………………………………………………………20
3.2 流程說明……………………………………………………………22
第四章 實驗設計………………………………………………24
4.1 實驗平台設計………………………………………………………24
第五章 結果討論………………………………………………26
5.1 製程改進……………………………………………………………26
5.1.1 厚膜光阻之微影參數調整…………………………………26
5.1.2 種子層與黏著層之改變……………………………………29
5.1.3 電鍍參數之調整……………………………………………31
5.2 模擬與量測結果……………………………………………………32
5.1.1 LSMD 之受力與變形關係…………………………………32
5.1.2 LSMD 之電壓與位移關……………………………………32
5.1.3 LSMD 之出力與位移關……………………………………33
5.1.3 定位器開合與拉力測試……………………………………34
第六章 總結……………………………………………………36
6.1 結論…………………………………………………………………36
6.2 未來工作……………………………………………………………36
參考資料…………………………………………………………37
1. Bhansali S., Zhang A.L., Zmood R.B., Jones P.E., Sood D.K. , “Prototype feedback-controlled bidirectional actuation system for MEMS applications”, Microelectromechanical Systems, Journal of , Volume: 9 Issue: 2 , June 2000, Page(s): 245 —251
2. Breguet J.-M., Perez R., Bergander A., Schmitt C., Clavel R., Bleuler H., “Piezoactuators for motion control from centimeter to nanometer”, Intelligent Robots and Systems, 2000. (IROS 2000). Proceedings. 2000 IEEE/RSJ International Conference on , Volume: 1 , 2000 Page(s): 492 -497 vol.1
3. Carley L.R., Ganger G., Guillou D.F., Nagle D. , “System design considerations for MEMS-actuated magnetic-probe-based mass storage”, Magnetics, IEEE Transactions on , Volume: 37 Issue: 2 Part: 1 , March 2001, Page(s): 657 —662
4. Eldada L., Norwood R., Blomquist R., Shacklette L.W., McFarland M.J. , “Thermo-optically active polymeric photonic components”, IEEE Optical Fiber Communication Conference VOL. 2, Page. 124~126,7-10 March 2000
5. Fukui R., Torii A., Ueda A. , “Micro robot actuated by rapid deformation of piezoelectric elements”, Micromechatronics and Human Science, 2001. MHS 2001. Proceedings of 2001 International Symposium on , 200, Page(s): 117 —122
6. Harald Sehr, Alan G. R. Evans, Arthur Brunnschweiler, Graharm J. Ensell and Trevor E. G. Niblock, “Fabrication and test of thermal vertical bimorph acturators for movement in the wafer plane”, Journal of Micromechanics and Microengineering, 2001, Page(s): 306 —310
7. Higuchi T., Yamagata Y.,,Furutani K., Kudoh K., “Precise positioning mechanism utilizing rapid deformations of piezoelectric elements”, Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE , 1990, Page(s): 222 —226
8. Jang-Kyo Kim, Lebbaj M., Liu J.H., Ji Hoon Kim, Yuen, M.M.F., “Interface adhesion between copper lead frame and epoxy moulding compound: effects of surface finish, oxidation and dimples”, Electronic Components and Technology Conference, 2000. 2000 Proceedings. 50th , 21-24 May 2000 Page(s): 601 —608
9. Jinghui Zhu “Development of Micro-Stepping Inchworm Mechanism”, Master of Science in Manufacturing Engineering University of California, Los Angeles, 1996 ,
10. Professor Chang-Jin Kim, Chair John H. Comtois, M. Adrian Michalicek, Carole Craig Barron , “Electrothermal actuators fabricated in foir-level planarized surface micromachined polycrystalline silicon”, Sensors and Actuators A 70 , 1998, Page(s):23-31M. Kohl*, K. D. Skrobanek, “Linear Microactuator Based on The Shape Memory Effect”, Sensors and Actuators A 70 , 1998, Page(s):104-111
12. Quanfang Chen, Da-Jeng Yao, Chang-Jin Kim, Carman, G.P. , “Mesoscale actuator device with micro interlocking mechanism”, Micro Electro Mechanical Systems, 1998, MEMS 98. Proceedings., The Eleventh Annual International Workshop on , 1998 , Page(s): 384 —389
13. Quevy E., Buchaillot L., Collard D., “Realization and actuation of continuous-membrane by an array of 3D self-assembling micro-mirrors for adaptive optics”, Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on , 2001, Page(s): 329 —332
14. Raum C., Mason R., Runtz, K. , “Optical fibre alignment using micromachines”, WESCANEX 95. Communications, Power, and Computing. Conference Proceedings.,IEEE ,Volume: 2 , 1995 Page(s): 371 —376 vol.2
15. S. Bakshi , M. Parameswaran , M. Syrzycki , “Surface Micromachined Reconfigurable Multi-Slit Mask”, A Progress Report Submitted to the National Research Council, Victoria, British Columbia , V8X 4M6 , September 23 , 1999
16. Sinclair, M.J. , “A high force low area MEMS thermal actuator ”,
Thermal and Thermomechanical Phenomena in Electronic Systems, 2000. ITHERM 2000. The Seventh Intersociety Conference on , 2000 -132
17. Xi-Qing Sun, Farmer K.R., Carr W.N. , “A bistable microrelay based on two-segment multimorph cantilever actuators”, Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on , 1998 , Page(s): 154 —159
18. Yamamoto Y., Makino T., Matsui H., “Micro-positioning and actuation devices using giant magnetostriction materials”, Robotics and Automation, 2000. Proceedings. ICRA ''00. IEEE International Conference on , Volume: 4 , 2000, Page(s): 3635 -3640 vol.4
19. 許鎮鵬 , “Electrothermally-Driven Long Stretch Micro Drive with Monolithic Cascaded Actuation Units in Compact Arrangement”, Transducers, 2003
20. 廖挺欣 , “Fabrication of Micro Actuators by Metal-based Surface Micromachining” , 國立交通大學機械系碩士論文 , 2002
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1. 林振春(民82)。衝突管理理論及其在團體中的應用。社會教育學刊,22,73-106。
2. 王麗雲、潘慧玲(民89)。教師彰權益能的概念與實施策略。教育研究集刊,44,173-195。
3. 王朝茂(民81)。學校衝突問題之探討。教育文粹,21,106-126。
4. 姜添輝(民91)。九年一貫課程政策影響教師專業自主權之研究。教育研究集刊,48(2),157-197。
5. 柯進雄(民87)。校長如何實行行政授權。研習資訊,14(1),64-68。
6. 洪福財(民84)。學校組織衝突成因及其因應策略。教育資料文摘,214,171-192。
7. 徐敏榮(民90)。從組織衝突談教師會與學校行政應有之觀念與作為。教育研究月刊,81/82,63-67。
8. 陳美如、郭昭佑(民90)。教師如何從事課程評鑑:從增權賦能評鑑理念談起。教育研究,88,83-93。
9. 曾燦金(民83)。衝突係助力乎?抑阻力乎?-論組織衝突之正反功能及其在學校行政管理之啟示。教育資料文摘,34(3),150-158。
10. 鄭美芳(民87)。人際衝突的發展過程與管理。學生輔導通訊,57,74-83。
11. 蔡進雄(民92a)。授權抑或授權賦能?論校長如何運用授權賦能領導。人文及社會學科教學通訊,13(5),62-79。
12. 歐用生(民88)。從課程統整的概念評析年一貫課程。教育研究資訊,7(1),22-32。
13. 賴威岑(民91)。學校組織衝突分析。教育社會學通訊,35,23-34。